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Summary of Contents for Aerotech PRO560LM Series
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Page 1: Pro560Lm Hardware Manual
PRO560LM Hardware Manual Revision: 1.05.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
3.3. Motor and Feedback Specifications 3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Technical Changes Index www.aerotech.com... -
Page 4: List Of Figures
PRO560LM Accessory Tabletop Dimensions (-TT3, -TT6 Options) Figure 2-5: Dimensions for Stages without a Cable Management System (-CMS0 Option) Figure 2-6: Cantilevered Load Capability of PRO560LM Series Stages Figure 2-7: Stage Orientations Figure 3-1: Ground Connection Points for the -CMS0 Option... -
Page 5: List Of Tables
List of Tables Table 1-1: Model Numbers and Ordering Options Table 1-2: Environmental Specifications Table 1-3: PRO560LM Series Specifications (-0400 to -1000) Table 1-4: PRO560LM Series Specifications (-0800 to -1500) Table 2-1: Stage Mounting Surface Flatness Requirement Table 2-2: Stage to Mounting Surface Hardware... - Page 6 Table of Contents PRO560LM Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 7: Safety Procedures And Warnings
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. - Page 8 Safety PRO560LM Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 9: Eu Declaration Of Incorporation
PRO560LM Hardware Manual Declaration of Conformity EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: PRO560LM Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... - Page 10 Declaration of Conformity PRO560LM Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 11: Chapter 1: Overview
The specifications in this manual pertain to the second generation of PRO LM stages. Second generation stages can be distinguished from their first generation counterparts by the second generation's curved hardcover. Contact Aerotech if you need a first generation manual. Table 1-1:... - Page 12 XY assembly; 5 arc sec orthogonality. Alignment to within 3 µm orthogonality for ALIGN-PA5 short travel stages. XZ or YZ assembly with L-bracket; 5 arc sec orthogonality. Alignment to within 5 ALIGN-PA5Z µm orthogonality for short travel stages. Chapter 1 www.aerotech.com...
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Page 13: Environmental Specifications
1.2. Accuracy and Temperature Effects The accuracy specification of PRO560LM series stages is measured 25 mm above the table with the stage in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or exceeding the specification in Section 2.3. -
Page 14: Basic Specifications
PRO560LM Hardware Manual 1.3. Basic Specifications N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 15: Table 1-4: Pro560Lm Series Specifications (-0800 To -1500)
3. Axis orientation for on-axis loading is listed. 4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. www.aerotech.com Chapter 1... -
Page 16: Vacuum Operation
Overview PRO560LM Hardware Manual 1.4. Vacuum Operation Aerotech can specially prepare the PRO560LM for operation in vacuum environments. Aerotech offers two vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10 torr) and one for high vacuum (preparation for environments from 10 to 10 torr). -
Page 17: Chapter 2: Mechanical Specifications And Installation
The brackets are red anodized aluminum (the only red anodized pieces Aerotech uses) that attach to the stage base on either side of the stage carriage. The rubber pads on the shipping brackets compress slightly to gently hold the carriage in place. Two shipping brackets are used on single axis and upper axis stages in a multi-axis stack, while four shipping brackets are used on lower axis stages in multi-axis stacks. -
Page 18: Figure 2-1: Shipping Brackets Used On Single Axis Stages Or Upper Axes Of Xy Systems
Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems N O T E : After removing the shipping brackets, retain them for future use. Do not transport or ship the PRO560LM without the shipping brackets attached. Chapter 2 www.aerotech.com... -
Page 19: Figure 2-2: Pro560Lm Series Stage With Lifting Features
Figure 2-2: PRO560LM Series Stage with Lifting Features N O T E : After removing the shipping brackets, retain them for future use. Do not transport or ship the PRO560LM without the shipping brackets attached. -
Page 20: Dimensions
Mechanical Specifications and Installation PRO560LM Hardware Manual 2.2. Dimensions Figure 2-3: PRO560LM Dimensions Chapter 2 www.aerotech.com... -
Page 21: Figure 2-4: Pro560Lm Accessory Tabletop Dimensions (-Tt3, -Tt6 Options)
PRO560LM Hardware Manual Mechanical Specifications and Installation Figure 2-4: PRO560LM Accessory Tabletop Dimensions (-TT3, -TT6 Options) www.aerotech.com Chapter 2... -
Page 22: Figure 2-5: Dimensions For Stages Without A Cable Management System (-Cms0 Option)
Mechanical Specifications and Installation PRO560LM Hardware Manual Figure 2-5: Dimensions for Stages without a Cable Management System (-CMS0 Option) Chapter 2 www.aerotech.com... -
Page 23: Securing The Stage To The Mounting Surface
Section 2.2. for specific model mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Typical Screw Mounting Hardware Torque 16.8 N·m [12 M8 x 30 mm (or 5/16" x 1-1/8") SHCS with flat washers ft·lb] www.aerotech.com Chapter 2... -
Page 24: Attaching The Payload To The Stage
N O T E : If your PRO560LM was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the PRO560LM is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. -
Page 25: Speed Capability
The Motor Sizer application supplied by Aerotech at https://www.aerotech.com/resources/motor-sizer.aspx can be used to estimate allowable speeds and accelerations based on these parameters. Consult with an Aerotech Applications Engineer to specify the system configuration for optimum performance. - Page 26 Mechanical Specifications and Installation PRO560LM Hardware Manual This page intentionally left blank. Chapter 2 www.aerotech.com...
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Page 27: Chapter 3: Electrical Specifications And Installation
Electrical installation requirements will vary depending on product options. Installation instructions in this section are for PRO560LM stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information regarding products that are otherwise configured. -
Page 28: Motor And Feedback Connectors
N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. N O T E : If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 29: Table 3-1: Motor Connector Pinout
Reserved Reserved Reserved Reserved Reserved Frame ground (motor protective ground) Table 3-2: Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com... -
Page 30: Table 3-3: Feedback Connector Pinout (-E1 And -E2 Options)
Common ground to limit switch Common ground to encoder power Reserved Reserved Negative (CCW) hardware limit Reserved Table 3-4: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol 17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3... -
Page 31: Table 3-5: Feedback Connector Pinout (-E3 Option)
Reserved Reserved Data + Common ground Common ground Reserved Reserved Reserved Reserved Table 3-6: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol 17E-1726-2 Connector ECK00300 FCI DB25S064TLF www.aerotech.com Chapter 3... -
Page 32: Table 3-7: General Motor Connector Pinout (For Z Or T Axes)
Reserved Reserved Reserved Reserved Frame ground (motor protective ground) 16 [1.31] Table 3-8: Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector... -
Page 33: Table 3-9: General Feedback Connector Pinout (For Z Or T Axes)
26 [0.129] Reserved/Brake + 26 [0.129] 1. BRAKE pins on Z or T axis, otherwise Reserved Table 3-10: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol 17E-1726-2 Connector ECK00300 FCI DB25S064TLF www.aerotech.com... -
Page 34: Motor And Feedback Wiring
Electrical Specifications and Installation PRO560LM Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-2: Motor and Feedback Wiring Chapter 3 www.aerotech.com... -
Page 35: Figure 3-3: Motor And Feedback Wiring For A Typical Vertical Or Rotary Axis Stage
PRO560LM Hardware Manual Electrical Specifications and Installation Figure 3-3: Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage www.aerotech.com Chapter 3... -
Page 36: Motor And Feedback Specifications
If the PRO560LM is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Hall effect, encoder, and limit switch 5 VDC supplies are connected by the wiring system of the stage. Chapter 3 www.aerotech.com... -
Page 37: Table 3-12: Pro560Lm Linear Motor Specifications (Dual Blmh-262-A Motors)
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing. -
Page 38: Limits, Marker, And Machine Direction
PRO560LM Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5. -
Page 39: Motor And Feedback Phasing
PRO560LM Hardware Manual Electrical Specifications and Installation 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-5: Hall Phasing www.aerotech.com Chapter 3... -
Page 40: Figure 3-6: Analog Encoder Phasing Reference Diagram (-E1 Incremental Encoder)
Electrical Specifications and Installation PRO560LM Hardware Manual Figure 3-6: Analog Encoder Phasing Reference Diagram (-E1 Incremental Encoder) Figure 3-7: Encoder Phasing Reference Diagram (-E2 Incremental Encoder) Chapter 3 www.aerotech.com... -
Page 41: Chapter 4: Maintenance
Re-tighten loose connectors. Replace or repair damaged cables. Clean the PRO560LM and any components and cables as needed. Repair any damage before operating the PRO560LM. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com Chapter 4... -
Page 42: Cleaning And Lubrication
Cleaning If a solvent is necessary for cleaning the stage, Aerotech recommends using isopropyl alcohol. Harsher solvents, such as acetone, may damage the plastic and end caps on the bearing trucks. - Page 43 Check each mounting screw for full engagement by tightening the screw while holding the long side of a standard hex wrench. 10. Restore power to the stage; drive the stage table back to its original position to redistribute lubricants. www.aerotech.com Chapter 4...
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Page 44: Figure 4-1: Endplate Cover Removal (Step 2)
Maintenance PRO560LM Hardware Manual Figure 4-1: Endplate Cover Removal (Step 2) Figure 4-2: Hardcover Screw Removal (Step 3) Chapter 4 www.aerotech.com... -
Page 45: Figure 4-3: Hardcover Removal (Step 3)
PRO560LM Hardware Manual Maintenance Figure 4-3: Hardcover Removal (Step 3) www.aerotech.com Chapter 4... -
Page 46: Troubleshooting
Encoder (sine and cosine) signal connections (refer to Chapter 3 and Controller Stage moves documentation). uncontrollably Motor Connections (refer to Chapter 3 and the Controller documentation). Stage oscillates or Gains misadjusted (refer to the Controller documentation). squeals Encoder signals (refer to the Controller documentation). Chapter 4 www.aerotech.com... -
Page 47: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s... - Page 48 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 49: Appendix B: Technical Changes
Order and part number specifications updated: Chapter 1 Added ThermoComp™ information Updated specifications: Section 3.3. Motor and Feedback Specifications 1.02.00 Revision changes have been archived. If you need a copy of this revision, contact Aerotech 1.01.00 Global Technical Support. 1.00.00 www.aerotech.com Appendix B... - Page 50 Revision History PRO560LM Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
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Page 51: Index
EN 60204-1 protective ground connection EN ISO 12100 Encoder Specifications red anodized aluminum Global Technical Support serial number grease service schedule shimming Hall-Effect Sensors Specifications shipping brackets Humidity Shipping Brackets Solution inspection schedule Specifications Inspection Schedule Speed Limitations www.aerotech.com Index... - Page 52 Index PRO560LM Hardware Manual stabilizing stage stage distortion stabilizing Support Symptom Technical Support Thermistor Specifications Unpacking and Handling the Stage vacuum vacuum guidelines Vibration Warranty and Field Service Index www.aerotech.com...
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