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Table of Contents
Related Manuals for Aerotech PlanarDL-100XY Series
Summary of Contents for Aerotech PlanarDL-100XY Series
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Page 1: Planardl Hardware Manual
PlanarDL Hardware Manual Revision: 1.04.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
3.3. Motor and Feedback Specifications 3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com... -
Page 4: List Of Figures
PlanarDL 200XY Cantilevered Load Capabilities Figure 2-15: PlanarDL 300XY Cantilevered Load Capabilities Figure 3-1: Motor and Feedback Wiring Figure 3-2: Machine Direction Figure 3-3: Hall Phasing Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) www.aerotech.com... -
Page 5: List Of Tables
PlanarDL Hardware Manual Table of Contents List of Tables Table 1-1: Model Options Table 1-2: Environmental Specifications Table 1-3: PlanarDL-100XY Series Specifications Table 1-4: PlanarDL-200XY Series Specifications Table 1-5: PlanarDL-300XY Series Specifications Table 2-1: Stage to Mounting Surface Hardware Table 3-1:... - Page 6 Table of Contents PlanarDL Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 7: Safety Procedures And Warnings
Danger or Warning symbol in this manual. If you do not obey these precautions, injury to you or damage to the equipment can occur. If you do not understand the information in this manual, contact Aerotech Global Technical Support. This product has been designed for light industrial manufacturing or laboratory environments. The protection provided by the equipment could be impaired if the product is used in a manner not specified by the manufacturer. - Page 8 The danger points are on the short sides of the cover next to the middle carriage lower axis motion, and the long top edge that is covered by the upper carriage when it moves toward the positive end of travel. Figure 1: Pinch Point Locations www.aerotech.com...
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Page 9: Eu Declaration Of Incorporation
PlanarDL Hardware Manual Declaration of Conformity EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: PlanarDL Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... - Page 10 Declaration of Conformity PlanarDL Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 11: Chapter 1: Overview
Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information. -
Page 12: Environmental Specifications
Indoor use only 1.1.1. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the PlanarDL. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the PlanarDL specifications are repeatable over an extended period of time. -
Page 13: Basic Specifications
Black Anodized Aluminum Mean Time Between Failure 30,000 Hours 1. Requires the use of an Aerotech controller. 2. Repeatability specification assumes a feedback resolution of 20 nm or less. 3. Axis orientation for on-axis loading is listed (refer to Section 2.4. -
Page 14: Table 1-4: Planardl-200Xy Series Specifications
Black Anodized Aluminum Mean Time Between Failure 30,000 Hours 1. Requires the use of an Aerotech controller. 2. Repeatability specification assumes a feedback resolution of 20 nm or less. 3. Axis orientation for on-axis loading is listed (refer to Section 2.4. -
Page 15: Table 1-5: Planardl-300Xy Series Specifications
Black Anodized Aluminum Mean Time Between Failure 30,000 Hours 1. Requires the use of an Aerotech controller. 2. Repeatability specification assumes a feedback resolution of 20 nm or less. 3. Axis orientation for on-axis loading is listed (refer to Section 2.4. -
Page 16: Vacuum Operation
Overview PlanarDL Hardware Manual 1.3. Vacuum Operation Aerotech can specially prepare the PlanarDL for operation in vacuum environments. Aerotech offers two vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10 Torr) and one for high vacuum (preparation for environments from 10 to 10 Torr). -
Page 17: Chapter 2: Mechanical Specifications And Installation
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to remove any dust or debris that has collected during shipping. -
Page 18: Figure 2-1: Lifting Hardware And Shipping Brackets
Mechanical Specifications and Installation PlanarDL Hardware Manual PlanarDL-100XY PlanarDL-100XY with CMS PlanarDL-200XY & PlanarDL-300XY Figure 2-1: Lifting Hardware and Shipping Brackets Chapter 2 www.aerotech.com... -
Page 19: Dimensions
Mechanical Specifications and Installation 2.2. Dimensions N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 20: Figure 2-3: Planardl-100Xy-Cms1 Dimensions
Mechanical Specifications and Installation PlanarDL Hardware Manual Figure 2-3: PlanarDL-100XY-CMS1 Dimensions Figure 2-4: PlanarDL-100XY-CMS2 Dimensions Chapter 2 www.aerotech.com... -
Page 21: Figure 2-5: Planardl-200Xy Dimensions Without Cable Management
PlanarDL Hardware Manual Mechanical Specifications and Installation Figure 2-5: PlanarDL-200XY Dimensions without Cable Management www.aerotech.com Chapter 2... -
Page 22: Figure 2-6: Planardl-200Xy-Cms1 Dimensions
Mechanical Specifications and Installation PlanarDL Hardware Manual Figure 2-6: PlanarDL-200XY-CMS1 Dimensions Figure 2-7: PlanarDL-200XY-CMS2 Dimensions Chapter 2 www.aerotech.com... -
Page 23: Figure 2-8: Planardl-300Xy Dimensions Without Cable Management
PlanarDL Hardware Manual Mechanical Specifications and Installation Figure 2-8: PlanarDL-300XY Dimensions without Cable Management www.aerotech.com Chapter 2... -
Page 24: Figure 2-9: Planardl-300Xy-Cms1 Dimensions
Mechanical Specifications and Installation PlanarDL Hardware Manual Figure 2-9: PlanarDL-300XY-CMS1 Dimensions Figure 2-10: PlanarDL-300XY-CMS2 Dimensions Chapter 2 www.aerotech.com... -
Page 25: Securing The Stage To The Mounting Surface
2-12). The CMS bracket is held in place with two M3-0.5 x 8mm long button head cap screws. When reinstalling the bracket after the stage is mounted, tighten the M3 button head screws to 0.7 N-m (6 in-lb). www.aerotech.com Chapter 2... -
Page 26: Figure 2-11: Mounting Hole Locations
M6 x 30 mm long socket head cap screw, PlanarDL-200XY 5.6 N·m Stainless steel with flat washer M8 x 30 mm long socket head cap screw, PlanarDL-300XY 13.5 N·m Stainless steel with flat washer Figure 2-11: Mounting Hole Locations Chapter 2 www.aerotech.com... -
Page 27: Figure 2-12: Mounting Hole Locations Hidden By -Cms1
PlanarDL Hardware Manual Mechanical Specifications and Installation Figure 2-12: Mounting Hole Locations Hidden by -CMS1 www.aerotech.com Chapter 2... -
Page 28: Attaching The Payload To The Stage
N O T E : If your PlanarDL was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the PlanarDL is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. -
Page 29: Figure 2-14: Planardl 200Xy Cantilevered Load Capabilities
PlanarDL Hardware Manual Mechanical Specifications and Installation Figure 2-14: PlanarDL 200XY Cantilevered Load Capabilities Figure 2-15: PlanarDL 300XY Cantilevered Load Capabilities www.aerotech.com Chapter 2... - Page 30 Mechanical Specifications and Installation PlanarDL Hardware Manual This page intentionally left blank. Chapter 2 www.aerotech.com...
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Page 31: Chapter 3: Electrical Specifications And Installation
Aerotech motion control systems are adjusted at the factory for optimum performance. When the PlanarDL is part of a complete Aerotech motion control system, setup usually involves connecting the PlanarDL to the appropriate drive chassis with the cables provided. Labels on the system components usually indicate the appropriate connections. -
Page 32: Motor And Feedback Connectors
N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. N O T E : If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 33: Table 3-1: Motor Connector Pinout
Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-2: Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com... -
Page 34: Table 3-3: Feedback Connector Pinout
Common ground to limit switch Common ground to encoder power Reserved Reserved Negative (CCW) hardware limit Reserved Table 3-4: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3... -
Page 35: Table 3-5: -Cms2 Third-Axis Motor Pinout
Reserved Reserved Reserved Frame Ground (motor protective ground) 22 [0.326] Table 3-6: Mating Connector Part Numbers for the -CMS2 Third-Axis Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6... -
Page 36: Table 3-7: -Cms2 Third-Axis Feedback Connector Pinout
Reserved Negative (CCW) hardware limit 26 [0.129] Brake + 26 [0.129] Table 3-8: Mating Connector Part Numbers for the -CMS2 Third-Axis Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3... -
Page 37: Motor And Feedback Wiring
All motor and controller manufacturers have their own designations for motor phases A/B/C and Hall signals A/B/C (refer to Section 3.5. for motor phasing). Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring www.aerotech.com Chapter 3... -
Page 38: Motor And Feedback Specifications
Note: If the PlanarDL is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Brake Specifications (-CMS2 Option Only) Supply Voltage 24 VDC Supply Current (typical) 0.25A to 0.7A (Current required to release the brake and allow motion.) Chapter 3 www.aerotech.com... -
Page 39: Table 3-10: Planardl-100Xy Motor Specifications
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing. -
Page 40: Table 3-11: Planardl-200Xy Motor Specifications
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing. -
Page 41: Table 3-12: Planardl-300Xy Motor Specifications
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing. -
Page 42: Limits, Marker, And Machine Direction
PlanarDL Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5. -
Page 43: Motor And Feedback Phasing
PlanarDL Hardware Manual Electrical Specifications and Installation 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-3: Hall Phasing www.aerotech.com Chapter 3... -
Page 44: Figure 3-4: Analog Encoder Phasing Reference Diagram
Electrical Specifications and Installation PlanarDL Hardware Manual Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) Chapter 3 www.aerotech.com... -
Page 45: Chapter 4: Maintenance
Re-tighten loose connectors. Replace or repair damaged cables. Clean the PlanarDL and any components and cables as needed. Repair any damage before operating the PlanarDL. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com Chapter 4... -
Page 46: Cleaning And Lubrication
W A R N I N G : Further disassembly of the stage is not recommended because proper assembly and calibration can only be done at the factory. In addition, a laser interferometer is required for post assembly verification to maintain warranties. Contact Aerotech for more information. - Page 47 PlanarDL Hardware Manual Maintenance 8. Repeat steps 1 through 7 for the upper axis carriage. The two moving carriages should move smoothly with light resistance. 9. Restore power to the stage. www.aerotech.com Chapter 4...
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Page 48: Troubleshooting
Encoder (sine and cosine) signal connections (refer to Chapter 3 Stage moves Controller documentation). uncontrollably Motor Connections (refer to Chapter 3 and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). Chapter 4 www.aerotech.com... -
Page 49: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s... - Page 50 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 51: Appendix B: Revision History
Table 3-9 Motor specifications updated in Table 3-11 Table 3-12 Encoder specifications updated in Table 3-13 Lubrication procedure updated in Section 4.2. General revision 1.01.00 Mounting Surface specifications updated in Section 2.3. Section 2.4. 1.00.00 New Manual www.aerotech.com Appendix B... - Page 52 Revision History PlanarDL Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
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Page 53: Index
EN ISO 12100 2010 multiaxis combinations Encoder Specifications EU 2015/863 orthogonality Force Constant part number Peak Current Global Technical Support Peak Force grease 16,46 PlanarDL-100XY Motor Specifications PlanarDL-200XY Motor Specifications Hall-Effect Sensors Specifications PlanarDL-300XY Motor Specifications Humidity Protection Rating www.aerotech.com Index... - Page 54 Index PlanarDL Hardware Manual protective ground connection Resistance serial number Service and Inspection Schedule shimming solvents stabilizing stage stage distortion stabilizing Support Technical Support Thermistor Specifications vacuum vacuum guidelines Vibration Warranty and Field Service Index www.aerotech.com...
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