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PlanarDLA Hardware Manual

Revision: 1.03.00

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Summary of Contents for Aerotech PlanarDLA Series

  • Page 1: Planardla Hardware Manual

    PlanarDLA Hardware Manual Revision: 1.03.00...
  • Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
  • Page 3: Table Of Contents

    3.3. Motor and Feedback Specifications 3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com...
  • Page 4: List Of Figures

    Figure 2-8: PlanarDLA 330XY Cantilevered Load Capabilities Figure 3-1: Motor and Feedback Wiring Figure 3-2: Machine Direction Figure 3-3: Hall Phasing Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) Figure 4-1: Grease Nipple Locations www.aerotech.com...
  • Page 5: List Of Tables

    PlanarDLA-150XY (Lower Axis) and PlanarDLA-250XY (Upper Axis) Motor Spe- cifications Table 3-12: PlanarDLA-250XY (Lower Axis) Motor Specifications Table 3-13: PlanarDLA-330XY (Upper Axis) Motor Specifications Table 3-14: PlanarDLA-330XY (Lower Axis) Motor Specifications Table 3-15: Encoder Specifications Table 4-1: Grease Quantities www.aerotech.com...
  • Page 6 Table of Contents PlanarDLA Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 7: Safety Procedures And Warnings

    Danger or Warning symbol in this manual. If you do not obey these precautions, injury to you or damage to the equipment can occur. If you do not understand the information in this manual, contact Aerotech Global Technical Support. This product has been designed for light industrial manufacturing or laboratory environments. The protection provided by the equipment could be impaired if the product is used in a manner not specified by the manufacturer.
  • Page 8 Safety PlanarDLA Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 9: Eu Declaration Of Incorporation

    PlanarDLA Hardware Manual Declaration of Conformity EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: PlanarDLA Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 10 Declaration of Conformity PlanarDLA Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 11: Chapter 1: Overview

    Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information.
  • Page 12: Environmental Specifications

    Indoor use only 1.1.1. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the PlanarDLA. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the PlanarDLA specifications are repeatable over an extended period of time.
  • Page 13: Basic Specifications

    Mean Time Between Failure 30,000 Hours 1. Requires the use of an Aerotech controller. 2. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY measured 25 mm above the tabletop.
  • Page 14: Table 1-4: Planardla-250Xy Series Specifications

    Mean Time Between Failure 30,000 Hours 1. Requires the use of an Aerotech controller. 2. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY measured 25 mm above the tabletop.
  • Page 15: Table 1-5: Planardla-330Xy Series Specifications

    Mean Time Between Failure 30,000 Hours 1. Requires the use of an Aerotech controller. 2. Specifications for -PL1 and -PL3 options are per axis measured 25 mm above the tabletop. Specifications for -PL4 are XY measured 25 mm above the tabletop.
  • Page 16: Vacuum Operation

    Overview PlanarDLA Hardware Manual 1.3. Vacuum Operation Aerotech can specially prepare the PlanarDLA for operation in vacuum environments. Aerotech offers two vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10 Torr) and one for high vacuum (preparation for environments from 10 to 10 Torr).
  • Page 17: Chapter 2: Mechanical Specifications And Installation

    2.1. Unpacking and Handling the Stage D A N G E R / H E A V Y : Manually lifting and moving the stage is not recommended. Aerotech strongly recommends lifting the stage with lifting hardware (refer to Figure 2-1).
  • Page 18: Figure 2-1: Lifting Hardware And Shipping Brackets

    Mechanical Specifications and Installation PlanarDLA Hardware Manual Figure 2-1: Lifting Hardware and Shipping Brackets Chapter 2 www.aerotech.com...
  • Page 19: Dimensions

    Mechanical Specifications and Installation 2.2. Dimensions N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release.
  • Page 20: Figure 2-3: Planardla-250Xy Dimensions

    Mechanical Specifications and Installation PlanarDLA Hardware Manual Figure 2-3: PlanarDLA-250XY Dimensions Chapter 2 www.aerotech.com...
  • Page 21: Figure 2-4: Planardla-330Xy Dimensions

    PlanarDLA Hardware Manual Mechanical Specifications and Installation Figure 2-4: PlanarDLA-330XY Dimensions www.aerotech.com Chapter 2...
  • Page 22: Securing The Stage To The Mounting Surface

    Access the mounting holes in the base of the PlanarDLA stage by sliding the carriage all the way to either end of travel (as shown in Figure 2-5). The user must be aware at all times of the pinch point dangers while the stage is in motion. Chapter 2 www.aerotech.com...
  • Page 23: Figure 2-5: Mounting Hole Locations

    M8 x 30 mm socket head cap screw, 18-8 stainless steel PlanarDLA-250XY 10 ft·lb M8 washer, hardened steel M8 x 30 mm socket head cap screw, 18-8 stainless steel PlanarDLA-330XY 10 ft·lb M8 washer, hardened steel Figure 2-5: Mounting Hole Locations www.aerotech.com Chapter 2...
  • Page 24: Attaching The Payload To The Stage

    N O T E : If your PlanarDLA was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the PlanarDLA is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur.
  • Page 25: Figure 2-7: Planardla 250Xy Cantilevered Load Capabilities

    PlanarDLA Hardware Manual Mechanical Specifications and Installation Figure 2-7: PlanarDLA 250XY Cantilevered Load Capabilities Figure 2-8: PlanarDLA 330XY Cantilevered Load Capabilities www.aerotech.com Chapter 2...
  • Page 26 Mechanical Specifications and Installation PlanarDLA Hardware Manual This page intentionally left blank. Chapter 2 www.aerotech.com...
  • Page 27: Chapter 3: Electrical Specifications And Installation

    Electrical installation requirements will vary depending on product options. Installation instructions in this section are for PlanarDLA stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information regarding products that are otherwise configured.
  • Page 28: Motor And Feedback Connectors

    N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. N O T E : If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required.
  • Page 29: Table 3-1: Motor Connector Pinout

    Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-2: Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com...
  • Page 30: Table 3-3: Feedback Connector Pinout

    Common ground to limit switch Common ground to encoder power Reserved Reserved Negative (CCW) hardware limit Reserved Table 3-4: Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3...
  • Page 31: Table 3-5: -Cms2 Third-Axis Motor Connector Pinout

    Reserved Reserved Reserved Frame Ground (motor protective ground) 22 [0.326] Table 3-6: Mating Connector Part Numbers for the -CMS2 Third-Axis Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6...
  • Page 32: Table 3-7: -Cms2 Third-Axis Feedback Connector Pinout

    Reserved Negative (CCW) hardware limit 26 [0.129] Brake + 26 [0.129] Table 3-8: Mating Connector Part Numbers for the -CMS2 Third-Axis Feedback Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3...
  • Page 33: Motor And Feedback Wiring

    All motor and controller manufacturers have their own designations for motor phases A/B/C and Hall signals A/B/C (refer to Section 3.5. for motor phasing). Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring www.aerotech.com Chapter 3...
  • Page 34: Motor And Feedback Specifications

    Note: If the PlanarDLA is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Brake Specifications (-CMS2 Option Only) Supply Voltage 24 VDC Supply Current (typical) 0.25A to 0.7A (Current required to release the brake and allow motion.) Chapter 3 www.aerotech.com...
  • Page 35: Table 3-10: Planardla-150Xy (Upper Axis) Motor Specifications

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
  • Page 36: Table 3-11: Planardla-150Xy (Lower Axis) And Planardla-250Xy (Upper Axis) Motor Specifications

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
  • Page 37: Table 3-12: Planardla-250Xy (Lower Axis) Motor Specifications

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
  • Page 38: Table 3-13: Planardla-330Xy (Upper Axis) Motor Specifications

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
  • Page 39: Table 3-14: Planardla-330Xy (Lower Axis) Motor Specifications

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
  • Page 40: Limits, Marker, And Machine Direction

    PlanarDLA Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5.
  • Page 41: Motor And Feedback Phasing

    PlanarDLA Hardware Manual Electrical Specifications and Installation 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-3: Hall Phasing www.aerotech.com Chapter 3...
  • Page 42: Figure 3-4: Analog Encoder Phasing Reference Diagram

    Electrical Specifications and Installation PlanarDLA Hardware Manual Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) Chapter 3 www.aerotech.com...
  • Page 43: Chapter 4: Maintenance

    Re-tighten loose connectors. Replace or repair damaged cables. Clean the PlanarDLA and any components and cables as needed. Repair any damage before operating the PlanarDLA. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com Chapter 4...
  • Page 44: Cleaning And Lubrication

    W A R N I N G : Further disassembly of the stage is not recommended because proper assembly and calibration can only be done at the factory. In addition, a laser interferometer is required for post assembly verification to maintain warranties. Contact Aerotech for more information.
  • Page 45: Figure 4-1: Grease Nipple Locations

    Table 4-1: Grease Quantities Stage Quantity PlanarDLA-150XY 0.6 cc per truck PlanarDLA-250XY 1.5 cc per truck on lower axis trucks, 0.6 cc per truck on upper axis trucks PlanarDLA-330XY 1.5 cc per truck Figure 4-1: Grease Nipple Locations www.aerotech.com Chapter 4...
  • Page 46: Troubleshooting

    Encoder (sine and cosine) signal connections (refer to Chapter 3 Stage moves Controller documentation). uncontrollably Motor Connections (refer to Chapter 3 and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). Chapter 4 www.aerotech.com...
  • Page 47: Appendix A: Warranty And Field Service

    Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s...
  • Page 48 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
  • Page 49: Appendix B: Revision History

    Motor and Feedback Wiring drawing updated for Figure 3-1 Encoder, Limit Switch, and Brake specifications updated in Table 3-9 Motor specifications updated in Table 3-14 Encoder specifications updated in Table 3-15 1.01.00 Screw Torque specifications updated in Section 2.3. 1.00.00 New Manual www.aerotech.com Appendix B...
  • Page 50 Revision History PlanarDLA Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
  • Page 51: Index

    PlanarDLA-330XY UX (Upper Axis) EN ISO 12100 2010 Mounting Hole Locations Encoder Specifications mounting surface EU 2015/863 cleaning securing stage Force Constant multiaxis combinations Global Technical Support orthogonality grease 16,44 part number Hall-Effect Sensors Specifications Peak Current Humidity Peak Force www.aerotech.com Index...
  • Page 52 PlanarDLA-330 UX (Upper Axis) Motor Specifications Protection Rating protective ground connection Resistance serial number Service and Inspection Schedule shimming solvents stabilizing stage stage distortion stabilizing Support Technical Support Thermistor Specifications vacuum vacuum guidelines Vibration Warranty and Field Service Index www.aerotech.com...

This manual is also suitable for:

Planardla-150xyPlanardla-250xyPlanardla-330xy

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