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Instruction Manual
CDM900 Micro Bee
3 Installation
3.1 Mechanical Installation
WARNING! Fragile components. The ceramic sensor may be damaged by impacts. Do not drop the
product and prevent shocks and impacts.
CAUTION! Dirt and damage can impair the function of the vacuum component. Take appropriate
measures to ensure cleanliness and prevent damage. Touching the product or parts with bare hands increases
the desorption rate. Always use clean, lint free gloves as well as clean tools when working with this product.
Mount the gauge so that no vibrations occur. Should gauge adjustments become necessary in the future, be
sure to install it so that the adjustment button can be accessed with a pin.
Mount the CDM900 as close as possible to the pressure you want to measure. Long or restricted, small
diameter tubing will create a pressure difference between your process chamber and the gauge. This may cause
a delay in response to pressure changes. Mounting the CDM900 too close to a gas source inlet may also cause
measurement and control instability.
The CDM900 can be mounted in any orientation, however, if possible, mount the gauge with port down to help
minimize the effect of any particles or condensation collecting in the gauge.
For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber. When using
KF flanges, metal clamps must be used to ensure proper grounding. Do not attempt to modify your flange in
order to use non-metallic-type flange clamps.
-7
Use all metal vacuum fittings with metal seals when operating pressures are expected to be below 1.00 x 10
-7
-5
Torr (1.33 x 10
mbar, 1.33 x 10
Pa).
For potentially contaminating applications and to protect the measurement system against contamination,
installation of the optional seal with centering ring and filter is recommended.
InstruTech
Page 8
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