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- Page 1 InstruTech®, Inc. Hot Cathode Ionization Vacuum Gauge IGM401 Module The Hornet™ User Manual InstruTech, Inc. 1475 S. Fordham St. Longmont, CO 80503 Phone: +1-303-651-0551 Fax: +1-303-678-1754 E-mail info@instrutechinc.com www.instrutechinc.com p/n 000710-116...
- Page 2 In no event will InstruTech, Inc. be responsible or liable for indirect or consequential damages that result from the use or application of this equipment.
- Page 3 Instruction Manual IGM401 Hornet Copyright © 2011 by InstruTech®, Inc. All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by InstruTech, Inc.
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Page 4: Table Of Contents
Instruction Manual IGM401 Hornet Table of Contents Introduction / General Information ........................4 Description ..............................4 Specifications ............................. 4 Dimensions ..............................5 Part Numbers ............................. 5 Options & Accessories ..........................5 Important Safety Information ..........................6 Safety Precautions - General ........................6 Safety Precautions - Service and operation .................... - Page 5 Instruction Manual IGM401 Hornet Factory-Set Default Parameters ....................... 19 Programming ............................20 5.8.1 SETUP DISP ............................21 5.8.2 SETUP UNIT ............................22 5.8.3 SETUP IG ............................25 5.8.4 SETUP COMMS ..........................27 5.8.5 SERVICE MENU ..........................27 Activating the sensor ..........................28 Using the gauge with different gases .......................
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Page 6: Introduction / General Information
The InstruTech® IGM401 Hornet™ module provides the basic signal conditioning required to turn a hot cathode ionization vacuum gauge into a complete measuring instrument. The module provides a log-linear analog output, RS485 serial communications, and one setpoint relay. -
Page 7: Dimensions
IGM401THD IG4YH IG4TH 1/2 in. Cajon® 8VCR® female Options & Accessories PS501-A Compatibility: Powers the IGM401 Hornet™ vacuum gauge module Power Input: 100 - 240 Vac Power Plug: North American 115 Vac Output: 24 Vdc @ 2.5 A (60 W) -
Page 8: Important Safety Information
IGM401 Hornet Important Safety Information InstruTech has designed and tested this product to provide safe and reliable service, provided it is installed and operated within the strict safety guidelines provided in this manual. Please read and follow all warnings and instructions. -
Page 9: Safety Precautions - Service And Operation
This will be more problematic in dirty applications. Use an appropriate power source of 20 to 28 Vdc, 30 W min. (InstruTech PS501 power supply is rated 60 W). Turn off power to the unit before attempting to service the module. Turn off power to the unit before detaching the electronics from the sensor for sensor replacement or bake-out purposes. -
Page 10: Electrical Conditions
Instruction Manual IGM401 Hornet Do not use if the unit has been dropped or the enclosure has been damaged. Contact InstruTech for return authorization and instructions for returning the product to InstruTech for evaluation. Use yttria coated filaments with air and inert gases such as N , argon, etc. -
Page 11: Overpressure And Use With Hazardous Gases
) or air without referring to correction factor data tables. InstruTech gauges and modules are calibrated for direct readout of nitrogen or air. Do not attempt to use with other gases such as argon (Ar) or carbon dioxide (CO ), unless you have programmed the device for the appropriate gas or use accurate conversion data for N to other gases. -
Page 12: Installation
Instruction Manual IGM401 Hornet Installation Mechanical Installation Mount the IGM401 as close as possible to the pressure you want to measure. Long or restricted, small diameter tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay in response to pressure changes. -
Page 13: Electrical Installation
2. 9-pin, D-sub female (DE-9S) connector for relay connections and RS485 serial communications. IGM401 I/O Interface When using InstruTech’s power Supply PS501A, connect the power supply to the ANALOG connector. If using a power supply other than InstruTech’s PS501A, connect your power supply to either the RS485 or the ANALOG connector as shown on the next page. -
Page 14: Analog Connector Pin-Out
Instruction Manual IGM401 Hornet 3.2.2.1 Analog Connector pin-out CAUTION! Do not connect power to both the Analog and the RS485 connectors. Apply power only to one or the other. Applying power to both connectors may cause damage to the gauge and other connected devices. - Page 15 Note - The RS485 version of MKS Instruments / Granville-Phillips® Series 354 Micro-Ion® is provided with a 9-pin male connector. The InstruTech’s RS485 connector is a 9-pin female connector. If you are replacing an RS485 version of Micro-Ion® and would like to use your existing cable, a 9-pin use a female to male gender changer.
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Page 16: Bakeout
Instruction Manual IGM401 Hornet Bakeout If desired, a chamber bake may be performed for new systems or after routine maintenance. The IGM401 sensor can be baked out to 200 C as long as the sensor fitting uses metal seals. For sensor fittings using elastomer O-rings, the maximum bakeout temperature is limited to the maximum temperature rating of the elastomer O-ring. -
Page 17: Setup And Operation
IGM401 that you intend to connect to. Alternatively, you can power the device by connecting InstruTech’s PS501-A power supply to the ANALOG connector of the IGM401. When you connect power, the display will show “UNIT STATUS OFF”. This indicates the display is on but the filament is not turned on and the sensor has not been activated yet. -
Page 18: Overpressure Shut Down
Instruction Manual IGM401 Hornet Overpressure shut down The IGM401 is provided with factory set default values for overpressure shut down. The gauge will shut off automatically should the pressure reach or rise above the pressure shut down values shown below:... -
Page 19: Filament Material Selection / Venting The Chamber
Good vacuum practice is to use a separate pressure gauge such as InstruTech’s Stinger™ or Super Bee™ convection gauge to know when to turn on the ion gauge filament. The relay outputs of convection gauges can be used to turn on the ion gauge filament. -
Page 20: User Interface Basics
Instruction Manual IGM401 Hornet User Interface Basics The user interface is designed for easy operation and a natural progression of setup parameters. This section gives a brief explanation of operation for added clarity. Programming soft-keys There are four soft-keys located on the front panel, below the display. These keys are used to select and program the various functions available. -
Page 21: Factory-Set Default Parameters
Instruction Manual IGM401 Hornet Factory-Set Default Parameters The following is a summary of all factory-set default values in the IGM401 display menu. SETUP DISP - SET CONTRAST [Factory default = 10] - MODE [Factory default = NORMAL] - FLIP SCREEN [Factory default = NORMAL]... -
Page 22: Programming
Instruction Manual IGM401 Hornet Programming This section provides detailed information on programming and configuration of various menus and submenus of the device. The main, top-level menu choices shown starting at section 5.8.1 SETUP DISP (setup display) are what will be displayed when factory defaults are set. If you set IG CNTL (ion gauge control) to FRONT PANEL, the top-level menu choices change to include easy access for control of IG ON, IG OFF, EMISSION SEL, DEGAS ON and DEGAS OFF. -
Page 23: Setup Disp
Instruction Manual IGM401 Hornet 5.8.1 SETUP DISP The following submenu choices allow you to setup the display (DISP) to show the format you desire. These will be shown on the front panel display when you press the ENTER key when SETUP DISP is highlighted. Scroll to the menu of choice by using either the ... -
Page 24: Setup Unit
Instruction Manual IGM401 Hornet RESEARCH This mode displays the measured pressure, emission current, ion current, filament voltage and filament current. In the following example, the measured pressure is 1.00E-9 Torr, (Pressure unit is based on selected units in SETUP UNIT menu). Emission current is 4.00E-3 amperes, Ion current is 4.00E-11 amperes, filament voltage is 1.5 Vdc and filament current is 1.9 amperes. - Page 25 Instruction Manual IGM401 Hornet be displayed on the IGM401 screen showing the error. This is intended to prompt the user to determine what the error condition is before the filament can be turned on again. Once the cause of the error has been determined and resolved, the error must be cleared before the filament can be turned on again.
- Page 26 Instruction Manual IGM401 Hornet The program code control logic is such that when switching from DIGI controls to RS485 controls, the device will invoke a ‘safe state’ if any RS485 command is sent to switch from DIGI to RS485. A...
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Page 27: Setup Ig
Instruction Manual IGM401 Hornet 5.8.3 SETUP IG - DEGAS TIME [Factory default = 2] The length of time in minutes degassing will run after it is initiated. Degas cycle can be selected from 2 to 10 minutes. - SENSITIVITY [Factory default = Actual Sensor sensitivity (nominal = 8-15)] The actual sensitivity value of each ion gauge sensor is marked on the end plate below the electronic enclosure. - Page 28 Instruction Manual IGM401 Hornet RLY I HI TRP listed below and increase that value to a number higher than the value of RLY I LO TRP you are trying to set. - RLY HI TRP [Factory default = 5.00E-06 TORR] The relay is de-energized when pressure reaches this setpoint.
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Page 29: Setup Comms
Instruction Manual IGM401 Hornet current takes place. The user has the choice of programming the AUTO IE TRIP point anywhere between 1.00E-06 to 1.00E-04 Torr. Example: If AUTO IE TRIP point is set to 1.00E-05 Torr, then the ion gauge can operate at an emission current of 100 µA over a pressure range of 5.00E-02 Torr to 1.00E-05. -
Page 30: Activating The Sensor
IGM401 in the Digital Input mode and using control signals from another gauge such as an InstruTech convection enhanced pirani (CG) gauge. The latter is a recommended method of operating the hot cathode gauge. For example, you may use an InstruTech CVM211 Stinger™... -
Page 31: Using The Gauge With Different Gases
IGM401 Hornet Using the gauge with different gases InstruTech gauge transducers and modules are calibrated for nitrogen gas. Read the following information very carefully if you intend to use a gas other than nitrogen or air. The IGM401 offers the user the choice to use the factory default gas type N or select from a table of 16 most commonly used gases in the menu. -
Page 32: Analog Output
Instruction Manual IGM401 Hornet Analog Output A) The log-linear output signal and pressure are related by the Log-Linear Analog Output following formulas when units of measurement is in Torr and Pressure (Torr) Voltage mbar: (volts – 10) P= 10 V= log (P) + 10 1.0E-10... -
Page 33: Rs485 Serial Communications
Instruction Manual IGM401 Hornet RS485 serial communications Device Specific Serial Communication Info The standard IGM401 model provides RS485 serial communications. The following information and the RS485 command protocol summary listed on the next page can be used to establish serial communications with the device. -
Page 34: Rs485 Command Protocol Summary
Instruction Manual IGM401 Hornet RS485 Command Protocol Summary COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ ION GAUGE Read the current displayed #xxRD<CR> *xx_y.yyEzyy<CR> PRESSURE pressure of the ion gauge in (e.g., #01RD<CR>) where y.yy = mantissa, z = sign of... - Page 35 Instruction Manual IGM401 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE READ TRIP POINT Read the ‘turns on below’ #xxRLz<CR> *xx_y.yyEzyy<CR> for RLY pressure point for RLY (e.g., #01RL+<CR>) (e.g., *01+2.60E-06<CR>) read the ‘turns off above’ pressure (e.g., #01RL-<CR>) (e.g.,*01-7.60E-06<CR>) point for RLY...
- Page 36 Instruction Manual IGM401 Hornet COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE TOGGLE UNL The TLU command will #xxTLU<CR> *xx_1_UL_ON_<CR> FUNCTION (TLU) toggle the state of the UNL (e.g., #01TLU<CR>) *xx_0_UL_OFF<CR> function. When the response is UL_ON, then UNL is required to execute SB, SPN, SPO, and SPE.
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Page 37: Service
Instruction Manual IGM401 Hornet Service Calibration Every InstruTech module is calibrated prior to shipment using nitrogen. Care should be exercised when using gases other than nitrogen (N ) / air (see Section 6 titled “Using the gauge with different gases”). -
Page 38: Troubleshooting - Error Messages
Instruction Manual IGM401 Hornet Troubleshooting - Error Messages Indication Possible Cause Possible Solution OVERPRESSURE The calculated pressure is greater than Change to 100 μA emission current which maximum setting for emission current. will operate at higher pressures or reduce System pressure too high... -
Page 39: Troubleshooting - Filaments F1 Or F2 Open
Instruction Manual IGM401 Hornet Troubleshooting - Filaments F1 or F2 open If a filament is open, then trying to start the filament will result in error messages “F1 or F2 open” or similar displayed error messages. This error may be an indication of open filaments but in some cases it could also be an indication of faulty electronics. -
Page 40: R & D (Research) Diagnostic Display
Instruction Manual IGM401 Hornet R & D (Research) Diagnostic Display In addition to the normal pressure measurement screen the IGM401 provides a diagnostic display screen that allows you to monitor the measurements of the critical electrical parameters used for measurement of very low pressures, i.e., high vacuum, made by the ionization gauge. - Page 41 Instruction Manual IGM401 Hornet The Pressure, Ion Current (Collector Current) and Emission Current are indications that the ionization gauge transducer is operating and pressure (vacuum) is being measured. In the above example, most of the critical, measured quantities required for the calculation of measured pressure are displayed. The relationship of these parameters leads to the calculation of pressure given by P = I •...
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Page 42: Maintenance
100 μA emission current. Maintenance In general, maintenance is not required for your InstruTech module. Periodic performance checks may be done by comparing the gauge to a known reference standard. When using the transducer in gases containing contaminants or materials that react with the filaments of the hot cathode ion gauge, periodic degas and switching to the alternate filament from time-to-time is recommended for longest useable transducer lifetime. -
Page 43: Contamination
Instruction Manual IGM401 Hornet Contamination The most common cause of all vacuum gauge failures is contamination of the sensor. Noisy or erratic readings, and total gauge failure are all possible indications of gauge contamination. Contamination can be generally characterized as either a reaction of process gases with sensor elements, or an accumulation of material on the sensor elements. -
Page 44: Sensor Replacement
Instruction Manual IGM401 Hornet Sensor Replacement The IGM401 ion gauge module is factory calibrated for the specific ion gauge transducer (sensor) installed in it. If both filaments fail for any reason, the sensor can be replaced with a new one. The sensitivity of the new sensor must be re-programmed in the module electronics. -
Page 45: Factory Service And Support
(examination of which shall disclose to SELLER's satisfaction that it is defective) returned, to SELLER's plant, properly identified within eighteen (18) months after the date of shipment from InstruTech Plant. BUYER must obtain the approval of SELLER and a return authorization number prior to shipment. - Page 46 InstruTech®, Inc. 1475 S. Fordham St. Longmont, CO 80503 Phone +1-303-651-0551 Fax +1-303-678-1754 E-mail info@instrutechinc.com www.instrutechinc.com p/n 000710-116...