Installation; Mechanical Installation - Instrutech Hornet User Manual

Instruction Manual IGM401 Hornet
3

Installation

3.1

Mechanical Installation

Mount the IGM401 as close as possible to the pressure you want to measure. Long or restricted, small diameter
tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay
in response to pressure changes. Mounting the IGM401 too close to a gas source inlet may also cause
measurement and control instability.
The IGM401 can be mounted in any orientation, however, if possible, mount the gauge with port down to help
minimize the effect of any particles or condensation collecting in the gauge.
Do not mount the IGM401 where it will be subjected to excessive vibration. Vibrations may cause unstable
readings, measurement errors and possible mechanical stress to components in the IGM401.
Shield the IGM401 near ion or electron sources such as an electron beam or in a sputtering system.
For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber. When using
KF flanges, metal clamps must be used to ensure proper grounding. Do not attempt to modify your flange in
order to use non-metallic-type flange clamps.
Fittings/Flanges - follow the fitting/flange manufacturer's recommendations for installation and use.
Use all metal vacuum fittings with metal seals when operating pressures are expected to be below
-7 -7 -5
1.00 x 10 Torr (1.33 x 10 mbar, 1.33 x 10 Pa).
InstruTech, Inc.
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