Mitsubishi MELFA SQ Series Special Specifications Manual page 26

２ Robot arm
2.2.6 Clean specifications
(1) Types of clean specifications
Type
RV-3SQC/
RV-3SQJC
RV-3SQBC/
RV-3SQJBC
Type
MEDT 14
Degree of cleanliness
10(0.3μm) Concentrated suction with vaccum
generating valve.
Use it in the clean room with the
down flow (flow velocity 0.3 m/s
above).
Maker
KONEGAI CORPORATION ・ Vacuum rate (supply pressure is 0.5MPa): 96l. / min
・ Ultimate vacuum (supply pressure is 0.5MPa): -84KPa
Internal suction
Air pressure
Remarks
The use of a vacuum generating valve
is recommended.
Note1)
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