High End Systems Studio Spot User Manual page 50

/LWKR )XQFWLRQV
.KVJQ HWPEVKQPU FGVGTOKPG JQY GCEJ NKVJQ YJGGN OQXGU 'CEJ NKVJQ HWPEVKQP
ECP TWP CV HWNN URGGF GKIJV HWPEVKQPU QT /5RGGF GKIJV HWPEVKQPU 
.KVJQ HWPEVKQPU CTG EQPVTQNNGF D[ &/: EJCPPGN  HQT NKVJQ YJGGN  CPF
EJCPPGN  HQT YJGGN 
4GHGT VQ 6CDNG  HQT VJG CXCKNCDNG NKVJQ HWPEVKQPU CPF FGUETKRVKQPU
Function
+PFGZGF
(QTYCTF TQVCVG
4GXGTUG TQVCVG
9JGGN URKP
+PFGZGF UECP
4CPFQO
$NKPM YJGGN~
$NKPM CRGTVWTG~
~ .QPI ETQUUHCFG CPF /5RGGF VKOGU EQWNF TGUWNV KP WPFGUKTCDNG GHHGEVU CU VJGTG YKNN DG PQ
NKIJV QWVRWV
 6WXGLR 6SRW 8VHU·V 0DQXDO
Table 2.2: Litho Functions
#NNQYU VJG NKVJQ YJGGN VQ DG KPFGZGF TQVCVGF VQ VJG
RTQRGT QTKGPVCVKQP
#NNQYU XCTKCDNG HQTYCTF TQVCVKQP QH VJG NKVJQ
#NNQYU XCTKCDNG TGXGTUG TQVCVKQP QH VJG NKVJQ
#NNQYU XCTKCDNG HQTYCTF CPF TGXGTUG TQVCVKQP QH VJG
NKVJQ YJGGN
#NNQYU XCTKCDNG URGGF UECPU DGVYGGP CFLQKPKPI NKVJQ
RQUKVKQPU
#NNQYU TCPFQO NKVJQ UGNGEVKQP CV XCTKCDNG URGGFU
#NNQYU VJG UJWVVGT VQ SWKEMN[ ENQUG FWTKPI C NKVJQ
EJCPIG 6JG UJWVVGT YKNN TGQRGP YJGP VJG YJGGN JCU
TGCEJGF KVU FGUVKPCVKQP
#NNQYU VJG UJWVVGT VQ SWKEMN[ ENQUG YJGP C NKVJQ KU
KPFGZGF 6JG UJWVVGT YKNN TGQRGP YJGP VJG NKVJQ JCU
TGCEJGF KVU FGUVKPCVKQP
Description