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/LWKR )XQFWLRQV
.KVJQ HWPEVKQPU FGVGTOKPG JQY GCEJ NKVJQ YJGGN OQXGU 'CEJ NKVJQ HWPEVKQP
ECP TWP CV HWNN URGGF
GKIJV HWPEVKQPU QT /5RGGF
GKIJV HWPEVKQPU
.KVJQ HWPEVKQPU CTG EQPVTQNNGF D[ &/: EJCPPGN HQT NKVJQ YJGGN CPF
EJCPPGN HQT YJGGN
4GHGT VQ 6CDNG HQT VJG CXCKNCDNG NKVJQ HWPEVKQPU CPF FGUETKRVKQPU
Function
+PFGZGF
(QTYCTF TQVCVG
4GXGTUG TQVCVG
9JGGN URKP
+PFGZGF UECP
4CPFQO
$NKPM YJGGN~
$NKPM CRGTVWTG~
~ .QPI ETQUUHCFG CPF /5RGGF VKOGU EQWNF TGUWNV KP WPFGUKTCDNG GHHGEVU CU VJGTG YKNN DG PQ
NKIJV QWVRWV
6WXGLR 6SRW 8VHU·V 0DQXDO
Table 2.2: Litho Functions
#NNQYU VJG NKVJQ YJGGN VQ DG KPFGZGF
TQVCVGF VQ VJG
RTQRGT QTKGPVCVKQP
#NNQYU XCTKCDNG HQTYCTF TQVCVKQP QH VJG NKVJQ
#NNQYU XCTKCDNG TGXGTUG TQVCVKQP QH VJG NKVJQ
#NNQYU XCTKCDNG HQTYCTF CPF TGXGTUG TQVCVKQP QH VJG
NKVJQ YJGGN
#NNQYU XCTKCDNG URGGF UECPU DGVYGGP CFLQKPKPI NKVJQ
RQUKVKQPU
#NNQYU TCPFQO NKVJQ UGNGEVKQP CV XCTKCDNG URGGFU
#NNQYU VJG UJWVVGT VQ SWKEMN[ ENQUG FWTKPI C NKVJQ
EJCPIG 6JG UJWVVGT YKNN TGQRGP YJGP VJG YJGGN JCU
TGCEJGF KVU FGUVKPCVKQP
#NNQYU VJG UJWVVGT VQ SWKEMN[ ENQUG YJGP C NKVJQ KU
KPFGZGF 6JG UJWVVGT YKNN TGQRGP YJGP VJG NKVJQ JCU
TGCEJGF KVU FGUVKPCVKQP
Description
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