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/LWKR 5RWDWLRQ
.KVJQ TQVCVKQP WVKNK\GU DKV TGUQNWVKQP HQT RTGEKUG RQUKVKQPKPI .KVJQ
TQVCVKQP OQXGU VJG NKVJQU CPF OQXGU VJG YJGGN KP YJGGN URKP CPF TCPFQO
OQFGU
.KVJQ TQVCVKQP HQT YJGGN KU EQPVTQNNGF D[ &/: EJCPPGN HQT EQCTUG
RQUKVKQPKPI
JKIJ D[VG CPF EJCPPGN HQT HKPG RQUKVKQPKPI
NQY D[VG .KVJQ
TQVCVKQP HQT YJGGN KU EQPVTQNNGF D[ &/: EJCPPGN HQT EQCTUG
RQUKVKQPKPI
JKIJ D[VG CPF EJCPPGN HQT HKPG RQUKVKQPKPI
NQY D[VG
4GHGT VQ 6CDNG HQT VJG CXCKNCDNG TQVCVKQP QRVKQPU CPF FGUETKRVKQPU
0QVG VJG NKVJQ TQVCVKQP EJCPPGNU CNUQ EQPVTQN YJGGN URKP NKVJQ UECP CPF TCPFQO
NKVJQ HWPEVKQPU
Option
+PFGZGF
(QTYCTF TQVCVG
4GXGTUG TQVCVG
9JGGN URKP
5ECP
4CPFQO
6WXGLR 6SRW 8VHU·V 0DQXDO
Table 2.3: Litho Rotation
+PFGZGU VJG NKVJQ HTQO u
5VQRU QT TQVCVGU VJG NKVJQ ENQEMYKUG
RTQLGEVGF XKGY
CV XCTKCDNG URGGFU
5VQRU QT TQVCVGU VJG NKVJQ EQWPVGTENQEMYKUG
RTQLGEVGF
XKGY CV XCTKCDNG URGGFU
5VQRU QT URKPU VJG NKVJQ YJGGN KP GKVJGT FKTGEVKQP CV
XCTKCDNG URGGFU
5ECPU DGVYGGP VYQ NKVJQU CV XCTKCDNG URGGFU
4CPFQON[ UYKVEJGU DGVYGGP NKVJQU CV XCTKCDNG URGGFU
Description
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