Keysight B1500A Series Configuration And Connection Manual
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Keysight B1500A Series Configuration And Connection Manual

Keysight B1500A Series Configuration And Connection Manual

Semiconductor device analyzer
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Keysight B1500A
Semiconductor Device
Analyzer
Configuration and
Connection Guide

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Summary of Contents for Keysight B1500A Series

  • Page 1 Keysight B1500A Semiconductor Device Analyzer Configuration and Connection Guide...

  • Page 2: Declaration Of Conformity

    FAR 52.227-19 (June 1987) or any equivalent agency regulation or contract clause. Use, duplication or disclo- sure of Software is subject to Keysight Tech- nologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as defined in FAR 52.227-19(c)(1-2) (June 1987).

  • Page 3: Table Of Contents

    Product line up of the B1500A series ........
  • Page 4 Configuration example of WGFMU ........4-26 Ultra-fast 1 us NBTI characterization using the B1530A WGFMU module . 4-26 Contents - 2 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 5: B1500A Product Configuration

    B1500A Product Configuration...

  • Page 6: Product Line Up Of The B1500A Series

    Also, in the GPIB remote control mode, you can control the B1500A from an external computer by using Keysight FLEX command set that is the common language for Keysight semiconductor DC measurement instruments. So you can reuse the measurement program created for Keysight 4155/4156/E5260/E5270 series.
  • Page 7 50 s pulse Medium current source/monitor unit module. Occupies one slot. • MFCMU module (B1500A-A20) Multi frequency capacitance measurement unit module. Occupies one slot. Needs Keysight N1301A-100 SCUU to perform automatic switching of the measurement resources connection. • HVSPGU module (B1500A-A25) High voltage semiconductor pulse generator unit module.
  • Page 8 B1500A Product Configuration Product line up of the B1500A series • N1302A-200 GSWU Guard switch unit (GSWU). Needs the SCUU to use the GSWU. Effective for the accurate impedance measurements by connecting the guard lines between CMU high and low near the DUT.
  • Page 9 B1500A Product Configuration Product line up of the B1500A series Figure 1-1 B1500A Rear View Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 10: Options Of B1500A Series

    B1500A Product Configuration Options of B1500A series 1.2 Options of B1500A series This section describes Option items of the Keysight B1500A Semiconductor Device Analyzer. Table 1-3 B1500A Options Model/ Description OP Instruction Option Mainframe B1500A Semiconductor device analyzer • Select option 015 or 030 to specify cable length.
  • Page 11 Power Source Monitor Unit (B1511B) cable. • Cable length 1.5 m or 3.0 m is specified by option 015 or 030. • ASU and D-sub cable require ASU connector on the B1511B MPSMU module. Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 12 Contains B1500A user B1500A-ABJ Paper manual set, Japanese guide, Plug & Play driver user guide, self-paced training manual, EasyEXPERT user guide, and programming guide. Select the read-only drive if you need (optional) Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 13 • Rack mount kit for the B1500A. • 7U height EIA Select WGFMU learning kit (optional) B1530A-0KN Self-paced sample program learning kit • This option becomes available when for B1530A WGFMU B1500A-A30 or A31 is selected. Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 14: Furnished Accessories

    Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030. GNDU cable Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030. 1-10 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 15 The following utility programs (sample) are also stored in the HDD of B1500A. • Prober control program • sleep.exe program • 4155/4156 setup file converter • MDM file converter for IC-CAP users For more details of programs, see Keysight EasyEXPERT User’s Guide. Keysight B1500A Configuration and Connection Guide, Edition 6 1-11...
  • Page 16 HVSPGU Installed High voltage semiconductor pulse generator unit (HVSPGU) SPGU cable SPGU Cable (SMA to Coaxial). Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030. 1-12 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 17 B1500A-A11 Add-on Package - Medium power source monitor unit Description Qty. Note MPSMU Installed Medium power source/monitor unit (MPSMU) Triaxial cable Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030. Keysight B1500A Configuration and Connection Guide, Edition 6 1-13...
  • Page 18 Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030. Connection box N1255A Connection box for B1514A Medium Current Source/Monitor unit to make connection to DUT easy. 1-14 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 19 HVSPGU Installed High voltage semiconductor pulse generator unit (HVSPGU) SPGU cable SPGU Cable (SMA to Coaxial). Cable length 1.5 m or 3.0 m is specified by the option B1500A-015 or B1500A-030. Keysight B1500A Configuration and Connection Guide, Edition 6 1-15...
  • Page 20 Atto sense switch unit (E5288A ASU), 1 ea. Triaxial and D-sub cable Triaxial/D-sub Cable for ASU (16493M). Cable length 1.5 m or 3.0 m is for ASU specified by the option B1500A-015 or B1500A-030. 1-16 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 21 RSU cable, 0.6 m RSU cable, 2.4 m, between RSU and connector adapter. The option B1500A-A31 cannot be selected with the option B1500A-015. Connector adapter Connector adapter for RSU cable, female - female (16493R-801). Keysight B1500A Configuration and Connection Guide, Edition 6 1-17...
  • Page 22 SSMC short-open cable for current return path, 70 mm (16493R-102) SMA-SSMC cable, 200 SMA-SSMC cable between RSU and DC probe, 200 mm (16493R-202) SMA cable, 200 mm SMA-SMA cable between RSU and RF probe, 200 mm (16493R-302) 1-18 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 23 Connection wire, mini banana to mini clip. There is three colors. 3ea per each calor Connection wire Connection wire, mini banana to mini banana. There is three colors. 3ea per each calor Keysight B1500A Configuration and Connection Guide, Edition 6 1-19...

  • Page 24: Upgrade Products For The B1500A Series

    Upgrade products for the B1500A series 1.4 Upgrade products for the B1500A series The Keysight B1500A has 10 slots so that users can install appropriate modules into mainframe. The upgrade/retrofit product is available to add more modules. These modules should be installed in Keysight Technologies service center to meet the specifications.
  • Page 25 WGFMU-to-RSU cable, 0.6 m / 2.4 m cable set (2 ea). WGFMU and RSU(2ea). Require This option requires prober I/F and connection adapter. prober I/F with adapter B1500AU-W02 3m Cable between WGFMU and WGFMU-to-RSU cable, 3 m (2 ea) RSU (2ea) Keysight B1500A Configuration and Connection Guide, Edition 6 1-21...
  • Page 26 If you quote or order the hardware upgrade and the S/N support and subscription (price of B1500A is less than MY53280101, option SWS and adjustment) option SWD for price adjustment are bundled in the order. Power supply and board upgrade 1-22 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 27 Additional RSU for Keysight B1530A WGFMU module Model/Option Description OP Instruction B1531A Remote-sense and Switch Unit The B1530A WGFMU includes two RSU. If you need (RSU) additional RSU, specify this product. This does not include WGFMU cable. Keysight B1500A Configuration and Connection Guide, Edition 6 1-23...

  • Page 28: About Plug-In Modules

    For returning ASU or RSU, do not forget to notify the combination of the unit, connection cable, and module channel. WARNING To prevent electrical shock, turn off Keysight B1500A and remove the power cable before removing the connection cables. NOTE...

  • Page 29: Module Type And Locations

    NOTE About HVSPGU and WGFMU modules The HVSPGU and the WGFMU cannot be installed to slot 10. The SPGU module must be installed in the slots from the slot number 1. Keysight B1500A Configuration and Connection Guide, Edition 6 1-25...

  • Page 30: Maximum Module Configuration

    After the module installation, upgrade, and so on, the B1500A will be returned with the module configuration decided by the rule shown in Table 1-24. If you want to change the module locations, consult the service personnel before servicing. 1-26 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 31: Easyexpert And Desktop Easyexpert Software

    Data import/export capability, data output by CSV/XML format, and graph output by EMF/BMP/GIF/PNG format • Maintenance; self-test and self-calibration NOTE The latest version of the EasyEXPERT update package can be obtained from Keysight Technologies web site. Operation mode The EasyEXPERT has the following measurement operation environments. •...

  • Page 32: Application Library

    • Sampling points: 2000 Sa Sampling duration: 22 s to 24 ms • • Marker function Data read-put for each channel Resolution: 2 s • Data saving Numeric: TXT/CSV/XMLSS Image: EMF/BMP/JPG/PNG 1-28 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 33: Workspace And Data Management

    • VXI plug&play driver for Keysight B1500A • 4155/56 setup file converter Converts the measurement setup file (extension MES or DAT) for Keysight 4155 and 4156 into the equivalent setup file for EasyEXPERT classic test mode. • MDM file converter Converts the EasyEXPERT test result data file (extension XTR or ZTR) to Keysight IC-CAP MDM file.

  • Page 34: Desktop Easyexpert Software

    EasyEXPERT and Desktop EasyEXPERT software 1.5.2 Desktop EasyEXPERT Software Keysight Desktop EasyEXPERT is the same software that is built-in to the PC-based Keysight B1500A Semiconductor Device Analyzer, except that it runs on a standalone PC. In addition, Desktop EasyEXPERT supports Offline mode and control capability of the following 4155 series.

  • Page 35: System Requirements

    If your computer does not install a software, install the software in the above order. For example, if your computer does not install Microsoft .NET Framework 3.5 SP1, install it and Keysight IO Libraries in this order. If you do not use the Online execution mode, you do not need to install the IO Libraries.
  • Page 36 All commands must be terminated with a newline for the message to be parsed. All query responses will also be terminated with a newline. 1-32 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 37: License Management Tool

    The EasyEXPERT software revision 5.5 or later requires license of Keysight EasyEXPERT Extension (B1500A-SWS or B1500A-SWS). • To launch program Click Start > All Programs > (Keysight B1500 EasyEXPERT >) Licence Management Tool. • To check licenses already installed Click Installed Licenses tab on the Licence Management Tool. The installed licenses will be displayed.
  • Page 38 The license file (.lic file) for SWS Extension can be gotten on the following web site with order number, certificate number and Host ID in EasyEXPERT / Desktop EasyEXPERT software. Please make sure order number and certificate number on LTU sheet. Keysight Software License (KSL) Redemption provides the license file for SWS Extension.

  • Page 39: B1542A Pulsed Iv Package For B1500A

    1.6 B1542A Pulsed IV package for B1500A Keysight B1542A Pulsed IV Package for B1500/EasyEXPERT is a solution package for the Keysight B1500A or Desktop EasyEXPERT users and expands the capabilities of the B1500A to enable the ultra short pulsed IV measurements with parametric characterization...
  • Page 40 Pulsed IV Test system by using Keysight B1542A NOTE The pulsed IV system uses 3 channels of SMU. So Keysight E5262A/E5263A 2-channel SMU is not recommended. However it may be used if you change the connections manually. Because the pulsed IV measurement uses one SMU and the DC IV measurement uses only 2 ea.
  • Page 41 • Pulsed IV system reset • Pulsed IV system setup • DC I-V sweep measurement for 4155/4156/E5260/E5270 • DC Id-Vd characteristics measurement for 4155/4156/E5260/E5270 • DC Id-Vg characteristics measurement for 4155/4156/E5260/E5270 Keysight B1500A Configuration and Connection Guide, Edition 6 1-37...
  • Page 42 B1500A Product Configuration B1542A Pulsed IV package for B1500A 1-38 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 43: B1500A Accessories

    B1500A Accessories...

  • Page 44: Accessories For The B1500A

    Triaxial cable, 3 m 16494A-003 Triaxial cable, 80 cm 16494A-004 Triaxial cable, 40 cm 16494A-005 Triaxial cable, 4 m Kelvin triaxial cable 16493K-001 Kelvin triaxial cable, 1.5 m 16493K-002 Kelvin triaxial cable, 3 m Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 45 Coaxial cable, BNC(m) to BNC(m), 3.0 m The maximum voltage is 40 V, and Maximum current is 200 mA. The Keysight 16493B Coaxial Cable is designed for use with VSU (Voltage Source Unit), VMU (Voltage Measurement Unit) or PGU (Pulse Generator Unit) on the Keysight 4155 series Semiconductor Parameter Analyzer.

  • Page 46: Cmu Accessories

    Accessories for the B1500A CAUTION The GNDU can sink current of up to 4.2 A. Use the Keysight 16493L GNDU cable to connect the GNDU to a test fixture or a connector plate. Do not use normal triaxial cable (Keysight 16494A), because the maximum current rating of the cable is 1 A.
  • Page 47 Dimensions of the GSWU are 33.2 mm (W)  41.5 mm (H)  32.8 mm (D). NOTE About SCUU output cables To perform capacitance measurements accurately, the cable length between DUT and the SCUU output must be as short as possible. Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 48: Hvspgu Accessories

    SMU/PGU selector 16440A SMU PGU selector One 16440A has 2 channels and each channel can switch an SMU and a pulse generator. 16440A-003 Control cable, 40 cm Connect between 16440A and 16445A Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 49 Digital I/O control cable, 3 m NOTE Connect the Ref Out/In, Sync Out/In, and Trig Out terminals to the specified terminal properly. Connecting to the other terminal may result in damage to the SPGU. Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 50: Wgfmu Accessories

    SSMC short-open cable for current return path, 75 16493R-202 SMA-SSMC cable between RSU and DC probe, 200 Cable option for connection with RF probe 16493R-302 SMA-SMA cable between RSU and RF probe, 200 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 51 Cables used for the same measurement Connect all measurement cables to the appropriate terminals, tie them up together, and make them stable by taping or something. This is important to reduce an environmental noise. Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 52: Test Fixture

    • 2 VSU channels (BNC connector) • 2 VMU channels (BNC connector) • 2 PGU channels (BNC connector) • 1 GNDU channel (Triaxial connector. It requires the Keysight 16493L GNDU cable.) • 1 interlock 6-pin connector Table 2-5 16442B Test Fixture...
  • Page 53 Extra wire set (mini banana to mini banana, 6 ea) 16442B-821 Add socket module, 4-pin TO package 16442B-822 Add socket module, 18-pin DIP package 16442B-823 Extra socket module, 28-pin DIP package 16442B-890 Extra accessories case Keysight B1500A Configuration and Connection Guide, Edition 6 2-11...

  • Page 54: Other Accessories And Interlock

    GNDU cable, 5 m 16493N-001 GNDU cable for B2200A/B2201A switching matrix input, 2 m Digital I/O cable 16493G-001 Digital I/O control cable, 1.5 m 16493G-002 Digital I/O control cable, 3 m 2-12 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 55 The adapter which converts the GNDU connector to 2 triaxial connectors like connectors of SMU output. This adapter can be used with only B1500A / E5270 Series. It does not fit with GNDU of 41501A/B. Keysight B1500A Configuration and Connection Guide, Edition 6 2-13...
  • Page 56 Contact Pins (10 ea) Connection pins (10 ea) included in 16442B-801, 802 and 803 N1254A-301 Mini banana - pin plug (black, 1 ea) Mini banana - pin plug included in 16442B-811 2-14 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 57 Product N1254A-503 HCSMU coaxial cable assy 1.5 m - BNC to Guide of B1505A. open-end N1254A-504 HVSMU jack cable assy 1.5 m - HV jack to open-end Keysight B1500A Configuration and Connection Guide, Edition 6 2-15...
  • Page 58 Ultra High Current Prober System Cable BNC-T Plug (m) -BNC (f) - BNC (f) adapter, 1 ea 1250-2405 Accessories for Mediam Current SMU (MCSMU) N1255A 2 Channel connection box for B1514A Medium Current Source/Monitor unit 2-16 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 59: Rack Mount Kit For Keysight Standard Cabinet

    B1500A Accessories Accessories for the B1500A 2.1.7 Rack mount kit for Keysight standard cabinet Keysight B1500A can be mounted in a 19-inch EIA rack cabinet. It is designed to fit in seven rack-units (7U) of space. Table 2-8 Rack mount parts for B1500A...

  • Page 60: Accessories For The Wafer Prober / Connector Plate

    Accessories for the wafer prober / connector plate 2.2 Accessories for the wafer prober / connector plate When connecting the Keysight B1500A to a prober, a connector interface may be required to feed the test leads through a shielding box. A connector plate fulfills the requirement of such an interface.
  • Page 61 Common terminals are GNDU floating. ATTENTION: Must specify either 16495J-001 or 16495J-002 16495J-001 Bulkhead feedthru Connection type is "Connector-Connector" connectors 16495J-002 Connectors to contacts for Connection type is "Connector-Solder" soldering Keysight B1500A Configuration and Connection Guide, Edition 6 2-19...
  • Page 62 16495F (12 triax., Intlk, GNDU) 16495G (24 triax., Intlk, GNDU) 16495H (6 triax. 6coax., Intlk, GNDU) 16495J (8 triax. 4 coax., Intlk, 16495K 16495K inside GNDU) Connector Plate with Universal Cable Holder for ASU 2-20 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 63: Connection Guide For Wafer Prober

    Connection Guide for Wafer Prober...

  • Page 64: Smu/Gndu Connection With Prober

    Connection Guide for Wafer Prober SMU/GNDU connection with prober 3.1 SMU/GNDU connection with prober This section describes how to connect a wafer prober to the Keysight B1500A semiconductor device analyzer. Table 3-1 Semi automated prober with B1500A B1500A with Cascade Prober...

  • Page 65: Gndu Connections

    GNDU to standard triaxial connections. CAUTION User should use the Keysight 16493L GNDU cable to connect the GNDU to the connector plate; do not use a standard triaxial cable. The GNDU cable can handle the maximum GNDU current of 4.2 A, but standard triaxial cables (16494A) are only rated to 1 A.

  • Page 66: Kelvin Connection

    Item number information for GNDU Kelvin connection with B1500A Description Product Number Part number Kelvin triaxial cable (1.5 m) - Max 3.0 A 16493K-001 Kelvin triaxial cable (3.0 m) - Max 2.6 A 16493K-002 GNDU to Kelvin adapter N1254A-100 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 67: Smu Connections

    SMU terminal Non-Kelvin connection These instructions apply when all connections are non-Kelvin. Connect the Keysight 16494A triaxial cables between the SMU and the Connector plate. Connect the triaxial connector on the probe cable as shown in Figure 3-5. For parts information, see Table 3-4.

  • Page 68: Kelvin Connection

    Kelvin connection These instructions apply when all connections are Kelvin. Two probes must contact the wafer in this connection. Connect an Keysight 16493K Kelvin triaxial cable (or two Keysight 16494A triaxial cables) between the SMU and the connector plate. Connect the FORCE and SENSE lines to probes separately.

  • Page 69: Kelvin To Non-Kelvin Connection

    These instructions apply when the connections up to the Connector Plate are Kelvin, but the probe is a non-Kelvin connection. Connect an Keysight 16493K Kelvin triaxial cable (or two Keysight 16494A triaxial cables) between the SMU and the Connector plate.

  • Page 70: Mcsmu Connections

    3.1.3 MCSMU connections The MCSMU output connection example is shown in Figure 3-8. For the connection of the MCSMU, the Keysight N1255A connection box is required. Input panel provides six triaxial connectors for connecting two MCSMU and one GNDU or SMU. Output panel provides six triaxial connectors for the High1, High2, and Low terminals.
  • Page 71 To simplify the connections, omit the wiring of the Common. For the non-Kelvin connection, use the High Force and the Low Force only. Omit the wiring of the High Sense and the Low Sense. Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 72 If the switch is set to “Non-Kelvin”, do not extend the Sense output corresponding to it. Voltage on the Force line also appears on the Sense line. So, open the Sense connector on the Output panel. 3-10 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 73 Sense Common Sense Common Open the Sense terminal if the switch is set to Non-Kelvin. Circuit Common Circuit Common High Sense Low Sense Low Force High Force Circuit Common Circuit Common Keysight B1500A Configuration and Connection Guide, Edition 6 3-11...

  • Page 74: Connection For Low Current Measurement

    Therefore, the current measured by the instrument is same as current at the DUT terminal because no current is leaked. 3-12 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 75 The potential of the guard terminal is equal to the output voltage. CAUTION Never connect the Guard terminal to any other output, including circuit common, chassis ground, or any other guard terminal. Doing so will damage the B1500A. Keysight B1500A Configuration and Connection Guide, Edition 6 3-13...

  • Page 76: Connection For Low Resistance Measurement

    Coaxial cable Connector plate Contact pad 3.3.2 Kelvin connection Kelvin connections give good measurement results when you force high-current. The following figure shows the equivalent circuits for Kelvin and non-Kelvin connections. 3-14 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 77 Force terminals only. Then open the Sense terminals. This is the non-Kelvin connection. The Force terminals can be used to force and measure dc voltage or current via R in Figure 3-16. Figure 3-16 Simplified SMU circuit diagram Buffer Guard Sense Force Shield Keysight B1500A Configuration and Connection Guide, Edition 6 3-15...

  • Page 78: Scuu And Asu

    Connection Guide for Wafer Prober SCUU and ASU 3.4 SCUU and ASU This section describes how to connect a wafer prober to the Keysight B1500A semiconductor device analyzer with SCUU and ASU. 3.4.1 SCUU positioner-based probing connection The SCUU should be connected to the DUT by using triaxial cables as shown in Figure 3-17.

  • Page 79: Asu Connection

    16493M-001 Triax and D-sub cable for ASU (3.0 m) 16493M-002 CMU cable for B1500 (1.5 m) N1300A-001 CMU cable for B1500 (3.0 m) N1300A-002 Connector plate with universal cable 16495K holder Keysight B1500A Configuration and Connection Guide, Edition 6 3-17...
  • Page 80 The prober vender will have the solutions. Dimensions of the ASU are 132 mm (W)  88.5 mm (H)  50 mm (D) excluding the connectors. 3-18 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 81: Wgfmu And Rsu

    WGFMU. See Keysight B1500 manual. NOTE About WGFMU module installation Module installation of WGFMU must be performed by Keysight Technologies service personnel. Contact Keysight Technologies for the module installation. NOTE RSU has SMA terminal which is coaxial connection. In this connection, ultra low current measurement can not be performed.
  • Page 82 The 16493R-801 is used to connect the cable from WGFMU and the cable from RSU. See Keysight B1530A Waveform Generator/Fast Measurement Unit User’s Guide for the dimensions of adapter and for the opening and screw holes which are required to mount the adapter on the shield box.

  • Page 83: Connecting Rf Probes

    Figure 3-22 shows RF probes from Cascade Microtech, Inc. Figure 3-23 Contact Pad and Probe Tip RF probe RF probe Source/Well Signal Signal Drain Gate Source/Well Keysight B1500A Configuration and Connection Guide, Edition 6 3-21...
  • Page 84 16493R-302 SMA-SMA cable 200 mm length, 2 ea. Procedure: • Connect a SMA-SMA cable between a RSU (ex: RSU1) and the Drain RF probe. And set the Drain RF probe to the appropriate place. 3-22 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 85 3m cable between WGFMU and RSU (2ea) B1500A-030 B1500AU-W02 SMA - SMA cable (200mm) between RSU B1500A-A3P 16493R-302 and RF probe Magnet stand for RSU [Recommended] 16493R-802 16493R-802 Triaxial cable (3 m) [Optional] 16494A-002 B1500AU-T02 Keysight B1500A Configuration and Connection Guide, Edition 6 3-23...

  • Page 86: Connecting Dc Probes

    3m cable between WGFMU and RSU (2ea) B1500A-030 B1500AU-W02 SMA - SSMC cable (200mm) between RSU B1500A-A3P 16493R-202 and DC probe SSMC-SSMC cable (70mm) for current B1500A-A3P 16493R-102 return path Triaxial cable (3 m) [Optional] 16494A-002 B1500AU-T02 3-24 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 87 DC probe. And set the Gate DC probe to the appropriate place. Figure 3-27 SSMC Short-Open Cable Black Yellow 50 mm or 75 mm SSMC(plug) SSMC(plug) no signal pin Signal line and shield are shorted. Keysight B1500A Configuration and Connection Guide, Edition 6 3-25...

  • Page 88: Interlock Circuit

    For the dimensions of the switch, see Figure 3-31 below. 3. Mount an LED on your shielding box. For the dimensions of the LED, see Figure 3-29. 3-26 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 89 See Figure 3-28. 6. Attach the interlock connector to the mounting hole. If Keysight B1500A Interlock connector is connected to the interlock circuit, Keysight B1500A SMU cannot force more than ± 42 V when the door is open. When the door is closed, it can force more than ±...

  • Page 90: To Connect Interlock Circuit

    Before performing measurement, connect the 16493J interlock cable between the B1500A Interlock connector and the interlock connector which is a part of the interlock circuit installed in your DUT interface as described in the previous section. 3-28 Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 91: Connection And Ordering Examples

    Connection and Ordering Examples...

  • Page 92: Two Terminal Device

    Connection and Ordering Examples Two terminal device 4.1 Two terminal device This chapter describes prober or Fixture connection and ordering example of Keysight B1500A Semiconductor Device Analyzer for 2 terminal devices. 4.1.1 General IV characterization Figure 4-1 General IV configuration...
  • Page 93 B1500A-A00 Empty package for custom solution, contains no measurement module B1500A-A11 MPSMU add-on package, adds one MPSMU and two triaxial cables B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 94: General Iv/Cv Characterization

    100 mA / 100 V 10 fA / 0.5 V Minimum I/V resolution CV frequency range 1 kHz to 5 MHz Maximum DC bias to CV 100 V MPSMU and SCUU is required. Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 95 SCUU cable, 3 m N1301A-110 SCUU magnetic stand (Optional) N1301A-200 Guard switch unit (GSWU) N1301A-201/202 GSWU cable, 1.5 m or 3 m B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 96: High Resolution Iv Characterization

    Diode , Breakdown Resister R-I, R-V 2-wire or 4-wire Table 4-8 Key specification Item Range Note Maximum I/V range 100 mA / 100 V 1 fA / 0.5 V Minimum I/V resolution Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 97 HRSMU add-on package, adds one HRSMU and two triaxial cables B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) NOTE The low current level is around 1 nA with the 16442B test fixture. Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 98: Four Terminal Device

    Connection and Ordering Examples Four terminal device 4.2 Four terminal device This chapter describes prober or Fixture connection and ordering example of Keysight B1500A Semiconductor Device Analyzer for 4 terminal devices. 4.2.1 General IV characterization, Migration from 4155 Figure 4-4...
  • Page 99 Semiconductor Device Analyzer Mainframe B1500A-015/030 1.5 m or 3 m length of bundled cables B1500A-A01 Standard package, contains four MPSMU and eight triaxial cables B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) Keysight B1500A Configuration and Connection Guide, Edition 6...

  • Page 100: General Iv/Cv Characterization

    Force CMUL Subs Sense Sense2 Force Sense Force Sense Triaxial cable Interlock Interlock cable Connector plate Table 4-13 Target device and application Device Application Note , BV leak, I leak, C 4-10 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 101 SCUU cable, 3 m N1301A-110 SCUU magnetic stand (Optional) N1301A-200 Guard switch unit (GSWU) N1301A-201/202 GSWU cable, 1.5 m or 3 m B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) Keysight B1500A Configuration and Connection Guide, Edition 6 4-11...

  • Page 102: High Resolution Iv Characterization, Migration From 4156

    Device Application Note , BV leak, I leak Table 4-17 Key specification Item Range Note Maximum I/V range 100 mA / 100 V 1 fA / 0.5 V Minimum I/V resolution 4-12 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 103 High resolution package, contains four HRSMU and eight triaxial cables B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) NOTE The low current level is around 1 nA with the 16442B test fixture. Keysight B1500A Configuration and Connection Guide, Edition 6 4-13...

  • Page 104: High Resolution Iv Characterization (Asu)

    Device Application Note , BV leak, I leak Table 4-20 Key specification Item Range Note Maximum I/V range 100 mA / 100 V 0.1 fA / 0.5 V Minimum I/V resolution 4-14 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 105 Test fixture for packaged device measurement, adds one 16442B (Optional) NOTE The low current level is around 1 nA with the 16442B test fixture. NOTE To connect ASU, MPSMU (B1511B) option A11 is also available. Keysight B1500A Configuration and Connection Guide, Edition 6 4-15...

  • Page 106: High Power Iv Characterization

    Device Application Note , BV leak, I leak Table 4-23 Key specification Item Range Note Maximum I/V range 1 A / 200 V 10 fA / 0.5 V Minimum I/V resolution 4-16 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 107 1.5 m or 3 m length of bundled cables B1500A-A03 High power package, contains two HPSMU, two MPSMU, and eight triaxial cables B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) Keysight B1500A Configuration and Connection Guide, Edition 6 4-17...

  • Page 108: Ms Pulse Iv Characterization (Mcsmu)

    Sense (H/L) Force Force MCSMU2 High2 Sense Sense GNDU cable Froce/Sense Force Force Force GNDU/SMU Sense Sense Sense N1254A-100 Triaxial cable Triaxial cable GNDU Adapter Interlock Interlock cable Connector plate Control cable 4-18 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 109 MPSMU add-on package, adds one MPSMU and two triaxial cables B1500A-A1A MCSMU add-on package, adds one MCSMU, connection box and two triaxial cables B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) 16494A Triaxial cable Keysight B1500A Configuration and Connection Guide, Edition 6 4-19...

  • Page 110: Ms Pulse Iv Characterization (Two Mcsmu)

    Force MCSMU2 High2 Sense Sense (H/L) Sense GNDU cable Froce/Sense Force Force Force GNDU/SMU Sense Sense Sense N1254A-100 Triaxial cable Triaxial cable GNDU Adapter Interlock Interlock cable Connector plate Control cable 4-20 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 111 MPSMU add-on package, adds one MPSMU and two triaxial cables B1500A-A1B MCSMU add-on package, adds two MCSMU, connection box and four triaxial cables B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) 16494A Triaxial cable Keysight B1500A Configuration and Connection Guide, Edition 6 4-21...

  • Page 112: Flash Memory Cell Characterization (2 Pulse Channels)

    PGU 2 Sense Channel 1 Ctrl Out Ctrl In Channel 2 SPGU cable Ctrl Out Control cable 16445A Selector Adapter Digital I/O Ctrl In Digital I/O cable Interlock Interlock cable Connector plate 4-22 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 113 Semiconductor Device Analyzer Mainframe B1500A-015/030 1.5 m or 3 m length of bundled cables B1500A-A04 Flash memory cell measurement basic package B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) Keysight B1500A Configuration and Connection Guide, Edition 6 4-23...

  • Page 114: Flash Memory Cell Characterization (3 Or 4 Pulse Channels)

    Channel 1 Ctrl Out 16440A Ctrl In Channel 2 Selector SPGU cable Ctrl Out Control cable 16445A Digital I/O Selector Adapter Ctrl In Digital I/O cable Interlock Interlock cable Connector plate 4-24 Keysight B1500A Configuration and Connection Guide, Edition 6...
  • Page 115 HVSPGU add-on package, adds one HVSPGU and two SPGU cables 16440A SMU/PGU pulse generator selector 16440A-003 Control cable, 40 cm for second selector B1500A-A5F Test fixture for packaged device measurement, adds one 16442B (Optional) Keysight B1500A Configuration and Connection Guide, Edition 6 4-25...

  • Page 116: Configuration Example Of Wgfmu

    Connection and Ordering Examples Configuration example of WGFMU 4.3 Configuration example of WGFMU This chapter describes prober or Fixture connection and ordering example of Keysight B1500A Semiconductor Device Analyzer for NBTI characterization by WGFMU. 4.3.1 Ultra-fast 1 us NBTI characterization using the B1530A...
  • Page 117 MPSMU add-on package, adds one MPSMU and two triaxial cables B1500A-A31 WGFMU add-on package with connector adapters (B1500A-A30) WGFMU add-on package, If you put RSU on external shield box. B1500A-A3P WGFMU probe cable kit Keysight B1500A Configuration and Connection Guide, Edition 6 4-27...
  • Page 118 This information is subject to change without notice. © Keysight Technologies 2005-2015 *B1500-90090* B1500-90090 www.keysight.com...

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