crest Optics X-Light V2 TP Installation And User Manual page 51

Confocal imager with vcs super-resolution module
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3.1.4 VCS Mask replacement
VCS module will be shipped with a mask that is separate from the unit and with the following specifications
1.
Double pattern mask:
a.
13um pinholes 78um pitch (grid)
b.
13um pinholes 78um pitch (slits)
51

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