Inficon IMM-200 Operating Manual
  1. Manuals
  2. Brands
  3. Inficon Manuals
  4. Industrial Equipment
  5. IMM-200
  6. Operating manual
Inficon IMM-200 Operating Manual

Inficon IMM-200 Operating Manual

Thin film deposition monitor
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
Operating Manual
IMM-200
074-733-P1A

Advertisement

Table of Contents
loading

Related Manuals for Inficon IMM-200

Summary of Contents for Inficon IMM-200

  • Page 1 Operating Manual IMM-200 074-733-P1A...
  • Page 2 INFICON Two Technology Place East Syracuse, NY 13057-9714...

  • Page 3: Table Of Contents

    7 Ethernet Communications .......................... 29 Introduction ............................ 29 Setting the IP Address .........................  29 Protocol.............................. 29 Example IMM-200 P3P Messages ......................  31 7.4.1 Request Read Value........................ 31 7.4.2 Request Write Value ........................ 31 7.4.3 Request Read/Write Attribute -Combination Message ...............  31...
  • Page 4 Table of Contents INFICON IMM-200 PID List .......................... 33 CRC Calculation .......................... 35 8 Maintenance and Calibration Procedures ...................... 37 Importance of Density, Tooling, and Z-Ratio .................. 37 Determine Density .......................... 37 Determine Tooling .......................... 38 Laboratory Determination of Z-Ratio .................... 38 9 Troubleshooting and Error Messages ...................... 41...

  • Page 5: Disclaimer And Copyrights

    The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product.

  • Page 6: Declaration Of Conformity

    2 | Declaration of Conformity INFICON 2 Declaration of Conformity 6 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 7: Warranty

    Seller by or for Buyer. This manual is intended for private use by INFICON Inc. and its customers. Contact INFICON before reproducing its contents. 074-733-P1A IMM-200 Operating Manual...
  • Page 8 3 | Warranty INFICON These instructions do not provide for every contingency that may arise in connection related to the installation, operation, or maintenance of this equipment. Should you require further assistance, please contact INFICON. 8 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 9: Introduction And Specifications

    User interaction is accomplished via remote communication and consists of the selection or entry of parameters to define the material and instrument characteristics. A complete QCM system consists of an electronics unit, also called IMM-200, a power supply, a sensor head containing a quartz crystal and software to communicate to IMM-200.
  • Page 10 0 = none, 1 = warning, device not responding, 2 = error, device not responding Remote Communica- Start/Stop measure Starts or stops the instrument from tions Commands measuring frequency Zero thickness Zeros the material thickness 10 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 11 Input voltage 24 V (dc) Power consumption 12 W Fuse 30 V (dc), 2.5 A, internal, self-resetting Temporary overvoltages per CE requirements Warm-up period None required, up to 15 minutes for maximum stability 074-733-P1A IMM-200 Operating Manual 11 / 67...

  • Page 12: Safety

    When using this manual, please pay attention to the Notes, Cautions, Warnings, and Dangers found throughout. For the purposes of this manual they are defined as follows: Pertinent information that is useful in achieving maximum IMM-200 efficiency when followed. CAUTION Failure to heed these messages could result in damage to the instrument.
  • Page 13 Disconnect power whenever making any interface connections. Refer all maintenance to qualified personnel. DANGER Risk of Electric Shock There are no user-serviceable components within the IMM-200 case. Potentially lethal voltages are present. Refer all maintenance to qualified personnel. 074-733-P1A IMM-200 Operating Manual 13 / 67...

  • Page 14: Earth Ground

    INFICON 4.2.3 Earth Ground When using the optional power supply, IMM-200 is connected to earth ground through a sealed three-core (three-conductor) power cable, which must be plugged into a socket outlet with a protective earth terminal. If an extension cable is used, it must always have three conductors, including a protective earth terminal.

  • Page 15: How To Contact Us

    RMA number, the package will be held and the sender will be contacted. This will result in delays in servicing IMM-200. Prior to being given an RMA number, a Declaration Of Contamination (DOC) form may need to be completed if the product has been exposed to process materials.

  • Page 16: Parts And Options Overview

    4 | Introduction and Specifications INFICON To perform a power-on verification, see Initial Power-On Verification. For additional information or technical assistance, contact INFICON, refer to How to Contact Us [} 15]. 4.5 Parts and Options Overview IMM-200 Part Number 785-602-G1 Optional Power Supply...

  • Page 17: Optional Mounting Bracket Kit

    785-201-G1). Item 1 shows the neoprene mounting feet 070-2104, item 2 is a stainless steel M4 hex nut, item 3 is a stainless steel M4 internal lock washer, and item 4 is the mounting bracket. 074-733-P1A IMM-200 Operating Manual 17 / 67...
  • Page 18 IMM-200 and the mounting bracket (approximately 0.68 kg (1.5 lbs.)). NOTICE When mounting IMM-200 into a fixed position, ensure there is enough room to disconnect the power cord when needed. PN 070-2104 contains neoprene. If you are mounting IMM-200 and the mounting...

  • Page 19: Initial Power-On Verification

    This status indicates proper operation of IMM-200. If a good crystal is not connected, the Status LED illuminates 1 s on,1 s off, to indicate a crystal fail. IMM-200 is in Idle if the Status LED flash pattern is 1 s on, 4 s off.
  • Page 20 Dangerous voltages may be present whenever power is present. Refer all maintenance to qualified personnel. This symbol indicates where the protective earth ground is connected inside IMM-200. Never unscrew or loosen this connection. 20 / 67...

  • Page 21: Installation And Interfaces

    There are two required earth ground connections: Ground 1. The earth ground connection on IMM-200 is a threaded stud with a hex nut. Connect a ring terminal to the ground strap, allowing a good connection and easy removal and installation. This connection must be made at installation. For best protection against high frequency noise, the length-to-width ratio of the earth conductor should not exceed a ratio of 5:1.
  • Page 22 Whenever a user supplied power supply is used, the connector shield on the 24 V power cable must be connected to the mains protective earth ground terminal through the user supplied power supply. 22 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 23 • Be sure that a good ground system and straps are in place per recommendations Avoiding Electrical Interference [} 21]. • Ensure that all IMM-200 covers are in place and tightly secured with the provided fasteners. 074-733-P1A IMM-200 Operating Manual...

  • Page 24: Connecting The Instrument

    5 | Installation and Interfaces INFICON Always use shielded cables when making connection to IMM-200 to minimize electrical noise pickup. See also 2 Parts and Options Overview [} 16] 5.2 Connecting the Instrument For operating IMM-200, interface cables conforming to the Ethernet standard are required.
  • Page 25 The unit is in Measure mode and a crystal failure has (1 second on been detected. 1 second off) The unit is in Measure mode or the unit is running normally in boot. 074-733-P1A IMM-200 Operating Manual 25 / 67...

  • Page 26: Special Features

    This command is very useful when using a rotary sensor head. Since IMM-200 does not control the indexing of the rotary head, it has no way of knowing when a crystal switch is being performed.

  • Page 27: Crystal Type

    6.4 Crystal Type Crystals cut from different crystallographic orientations of quartz can be used with IMM-200. These are referred to as AT, BT, SC, or IT cut crystals. Thickness shear mode waves propagating through these different crystal cuts have different acoustic velocities.

  • Page 28: Crystal Life And Starting Frequency

    Crystal life is reported as a percentage of the monitor crystal’s frequency shift, relative to the 1.50 MHz frequency shift allowed by IMM-200. This quantity is useful as an indicator of when to change the monitor crystal to safeguard against crystal failures during deposition.

  • Page 29: Ethernet Communications

    IMM-200 is shipped with both the username and password unset/empty, so leave them blank and click OK to login. The IP address for IMM-200 is under Network. Make sure that the IP address for the Remote Host (under Channel 1 | Connection) is set to the same subnet as the new IP.
  • Page 30 7 | Ethernet Communications INFICON • DEV ID set to 129 (0x81) by slave for all Responses from slave • PIDX ignored (set to 0) 30 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 31: Example Imm-200 P3P Messages

    INFICON Ethernet Communications | 7 7.4 Example IMM-200 P3P Messages 7.4.1 Request Read Value Get Material Density RQA = 1 (Requested Read Value) PID = 302 (0×012e) Request (11 bytes): 0000000501012e0000405e Response (15 bytes): 0081010902012e00003f8000001e06 Density = 1.0 7.4.2 Request Write Value...
  • Page 32 Send 703 Combination message Read Attribute Request for the data RQA = 5 (Request Read Attribute) PID = 703 Request (11 bytes): 000000050102bf000028a8 Response (39 bytes): 008101210202bf00000000001392054ec00000000100000065000000104155d21452d fc79f1969 Timestamp 84054200000 Crystal status 1 Activity Crystal life % Frequency 5720145.29491 32 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 33: Imm-200 Pid List

    INFICON Ethernet Communications | 7 crc16 = 26805 7.5 IMM-200 PID List Request Access (RQA) / Response Access (RPA) Read Write Read Write Data Data Notes Value Value Attr. Attr. Query Type Length (Bytes) General Device 9/10 Parameters Production Number...
  • Page 34 PIDs in the list (Data Type U08). Read Attribute: Response Message contains list of values returned in the listed order requested via the Write Attribute message. Data Type is PID-dependent 34 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 35: Crc Calculation

    0x5DFD 0xB58B 0xA402 0x9699 0x8710 0xF3AF 0xE226 0xD0BD 0xC134 0x39C3 0x284A 0x1AD1 0x0B58 0x7FE7 0x6E6E 0x5CF5 0x4D7C 0xC60C 0xD785 0xE51E 0xF497 0x8028 0x91A1 0xA33A 0xB2B3 0x4A44 0x5BCD 0x6956 0x78DF 0x0C60 0x1DE9 0x2F72 0x3EFB 074-733-P1A IMM-200 Operating Manual 35 / 67...
  • Page 36 CRC_bCheckCrc16( const uint8_T *pu8Data, const uint16_T u16CrcInit, const uint16_T u16Len )   uint16_T u16Crc;   bool_T bReturnFlag = false;   u16Crc = CRC_u16CalcCrc16(pu8Data, u16CrcInit, u16Len + 2u);   if (u16Crc == 0u)   {     bReturnFlag = true;   }   return bReturnFlag; 36 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 37: Maintenance And Calibration Procedures

    The tooling factor can be experimentally established by following the guidelines in Determine Tooling [} 38]. In IMM-200, if the Z-Ratio is not known it can be estimated from the procedure outlined in Laboratory Determination of Z-Ratio. [} 38] 8.2 Determine Density...

  • Page 38: Determine Tooling

    )    [2] where T = Actual thickness at substrate holder T = Thickness reading in IMM-200 = Initial tooling factor It is recommended that a minimum of three separate evaporations be made when calibrating tooling. Variations in source distribution and other system factors will contribute to slight thickness variations.
  • Page 39 For most applications the following three rules provide reasonable accuracies: 1. If the thickness of material 1 is large compared to material 2, use material 1 Z- Ratio value for both materials. 074-733-P1A IMM-200 Operating Manual 39 / 67...
  • Page 40 3. If the thickness of both materials is similar, use the Z-Ratio value of material 1 for material 1 and then use a value for Z-Ratio which is the weighted average of the two Z-Ratio values for deposition of material 2 and subsequent materials. 40 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 41: Troubleshooting And Error Messages

    INFICON Troubleshooting and Error Messages | 9 9 Troubleshooting and Error Messages 9.1 Troubleshooting If IMM-200 fails to work or appears to have diminished performance, the following Symptom/Cause/Remedy charts may be helpful. DANGER Risk of Electric Shock There are no user-serviceable components within the IMM-200 case. Potentially lethal voltages are present.

  • Page 42: Troubleshooting Sensors

    1 length to width ratio is recommended). Eliminate any ground loops by establishing the correct system grounding. Verify proper IMM-200 grounding. 3. IMM-200 does not retain There is a power supply Contact the service parameters on power down problem. department.
  • Page 43 Material on the crystal source conditioning. holder partially masks the crystal cover aperture. b. Clean the crystal holder. Refer to the appropriate c. There is an electrical sensor manual. short or an open condition. 074-733-P1A IMM-200 Operating Manual 43 / 67...
  • Page 44 Change the location of IMM-200 and move the oscillator cabling away from RF power lines. Connect the IMM-200 power supply to a different power line. d. Verify that there are proper connections. 44 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 45 If a new water tube is not available, use a single layer of aluminum foil between the cooling tube and sensor body, if the process allows. 074-733-P1A IMM-200 Operating Manual 45 / 67...
  • Page 46 Make use of an intermediate adhesion layer. d. Make certain the source sweep frequency is not "beating" with the IMM-200 measurement frequency. 7. There is a large drift in a. There is crystal heating a. Clean or polish the...

  • Page 47: Troubleshooting Computer Communication

    Ensure that the cables be established between communication cable are connected to the the computer and connection. correct ports on IMM-200 IMM-200. and the computer. b. There is a defective communication cable. b. Verify that the cable is plugged in and is not c.
  • Page 48 IMM-200 match the information in the computer. 2. There is an incomplete There is an incorrectly Verify that the or erroneous response. formatted message. communication message is formatted correctly. 48 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 49: Measurement Theory

    1.G. Z. Sauerbrey, Phys. Verhand .8, 193 (1957) 2.G. Z. Sauerbrey, Z. Phys. 155,206 (1959) 3. P. Lostis, Rev. Opt. 38,1 (1959) 074-733-P1A IMM-200 Operating Manual 49 / 67...

  • Page 50: Monitor Crystals

    The second set of improvements was to contour one face of the crystal and to reduce the size of the exciting electrode. These improvements have the effect of trapping the 50 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 51 It is only in this way that small changes in mass can be measured accurately. 074-733-P1A IMM-200 Operating Manual 51 / 67...

  • Page 52: Period Measurement Technique

    Ultimately, the practical stability and frequency of the reference oscillator limits the precision of measurement for conventional instrumentation. 4. K. H. Behrndt, J. Vac. Sci. Technol. 8, 622 (1961) 52 / 67 074-733-P1A IMM-200 Operating Manual...

  • Page 53: Z-Match Technique

    The basic crystal oscillator stability is derived from the rapid change of phase for a small change in the crystal frequency near the series resonance point. 074-733-P1A IMM-200 Operating Manual 53 / 67...
  • Page 54 It is important to note that an active oscillator monitor will frequently continue to operate under these conditions; in fact there is no way to tell this has 54 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 55 Measurement Theory | 10 happened except that the film thickness is suddenly apparently thinner by an amount equivalent to the frequency difference between the fundamental and the anharmonic that is sustaining the oscillation. 074-733-P1A IMM-200 Operating Manual 55 / 67...

  • Page 56: Modelock Measurement

    INFICON 10.6 ModeLock Measurement INFICON created a technology that eliminates the active oscillator and its limitations. This system constantly tests the crystal response to an applied frequency in order to not only determine the resonant frequency, but also to verify that the crystal is oscillating in the desired mode.

  • Page 57: Appendix A: Material Table

    1.860 *1.000 boron nitride 3.500 2.100 barium 4.886 0.793 barium fluoride 3.244 1.261 barium nitrate 5.720 *1.000 barium oxide BaTiO 5.999 0.464 barium titanate (tetragonal) BaTiO 6.035 0.412 barium titanate (cubic) 074-733-P1A IMM-200 Operating Manual 57 / 67...
  • Page 58 6.780 *1.000 cerium 6.160 *1.000 cerium (III) fluoride 7.130 *1.000 cerium (IV) dioxide 8.900 0.343 cobalt 6.440 0.412 cobalt oxide 7.200 0.305 chromium 5.210 *1.000 chromium (III) oxide 6.680 *1.000 chromium carbide 58 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 59 6.100 *1.000 gallium nitride 4.100 *1.000 gallium phosphide GaSb 5.600 *1.000 gallium antimonide 7.890 0.670 gadolinium 7.410 *1.000 gadolinium oxide 5.350 0.516 germanium 5.200 *1.000 germanium nitride 6.240 *1.000 germanium oxide 074-733-P1A IMM-200 Operating Manual 59 / 67...
  • Page 60 2.610 *1.000 lanthanum boride 5.940 *1.000 lanthanum fluoride 0.530 5.900 lithium LiBr 3.470 1.230 lithium bromide 2.638 0.778 lithium fluoride LiNbO 4.700 0.463 lithium niobate 9.840 *1.000 lutetium 1.740 1.610 magnesium 60 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 61 4.470 *1.000 niobium (V) oxide 6.970 *1.000 niobium boride 7.820 *1.000 niobium carbide 8.400 *1.000 niobium nitride 7.000 *1.000 neodymium 7.240 *1.000 neodymium oxide 6.506 *1.000 neodymium fluoride 8.910 0.331 nickel 074-733-P1A IMM-200 Operating Manual 61 / 67...
  • Page 62 *1.000 rubidium iodide 21.040 0.150 rhenium 12.410 0.210 rhodium 12.362 0.182 ruthenium 2.070 2.290 sulfur 6.620 0.768 antimony 5.200 *1.000 antimony trioxide 4.640 *1.000 antimony trisulfide 3.000 0.910 scandium 3.860 *1.000 scandium oxide 62 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 63 11.694 0.484 thorium 6.320 *1.000 thorium (IV) fluoride 9.860 0.284 thorium dioxide ThOF 9.100 *1.000 thorium oxyfluoride 4.500 0.628 titanium 4.600 *1.000 titanium sesquioxide 4.500 *1.000 titanium boride 4.930 *1.000 titanium carbide 074-733-P1A IMM-200 Operating Manual 63 / 67...
  • Page 64 4.340 0.835 yttrium 5.010 *1.000 yttrium oxide 6.980 1.130 ytterbium 9.170 *1.000 ytterbium oxide 7.040 0.514 zinc 6.300 *1.000 zinc antimonide 4.950 *1.000 zinc fluoride 5.610 0.556 zinc oxide 4.090 0.775 zinc sulfide 64 / 67 074-733-P1A IMM-200 Operating Manual...
  • Page 65 Density Z-Ratio Material Name ZnSe 5.260 0.722 zinc selenide ZnTe 6.340 0.770 zinc telluride 6.490 0.600 zirconium 6.080 *1.000 zirconium boride 6.730 0.264 zirconium carbide 7.090 *1.000 zirconium nitride 5.600 *1.000 zirconium oxide 074-733-P1A IMM-200 Operating Manual 65 / 67...
  • Page 67 074-733-P1A ©2020...

Table of Contents