CONTENTS
1
INTRODUCTION .......................................................... 2
2
DESCRIPTION .............................................................. 3
2.1
2.1.1
2.2
2.3
2.4
3
PREPARATION ............................................................. 5
3.1
Identification ....................................................... 5
3.1.1
3.1.2
3.1.3
3.1.4
4
4.1
4.1.1
4.1.2
4.1.3
4.1.4
4.2
5
5.1
5.1.1
5.1.2
5.1.3
5.2
5.2.1
5.2.2
5.2.3
5.2.4
6
SETTING UP ............................................................... 20
6.1
6.2
6.3
6.3.1
6.3.2
6.3.3
7
7.1
Displays ............................................................ 22
7.2
8
STARTUP .................................................................... 23
8.1
8.2
8.2.1
8.2.2
8.3
8.4
8.4.1
8.4.2
Purge Gas ........................................... 23
8.3.2
Hydrogen ............................................ 24
9
OPERATION ............................................................... 24
9.1
Normal .............................................................. 24
9.1.1
9.1.2
10
PROGRAMMING ........................................................ 26
10.1
Range 1 ............................................................ 29
10.2
Range 2 ............................................................ 32
10.3
Range 3 ............................................................ 35
11
MAINTENANCE .......................................................... 39
11.1
11.1.2 Flow .................................................... 39
11.1.3 Leaks .................................................. 39
11.2
11.3
11.4
12
12.1
Consumables ................................................... 41
12.2
12.3
13
SPECIFICATION ......................................................... 42
1