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9
Vacuum system
Table 15
Turbomolecular pump MSD vacuum system components
Description
Baffle (inside stem of triode gauge tube – not shown)
Calibration valve assembly
Claw clamps for turbo pump
Collar for triode gauge tube
Fan
KF25 clamp (for turbo pump outlet)
KF25 O-ring assembly (for turbo pump outlet)
Manifold end plates
Shield for triode gauge tube port
Side plate (includes thumbscrews)
Triode gauge tube
Turbomolecular pump
Turbo pump controller
Turbo pump seal
Vacuum manifold
Vent valve knob
1
266
Parts
calibration vial
front
rear
1
1
The turbo pump and its seal are not user-replaceable parts. Refer
service to your Hewlett-Packard service representative.
HP part number
05972-00015
G1099-60203
05980-20018
0100-1881
05972-60210
3160-1037
0100-0549
0100-1551
G1099-20552
G1099-20553
G1099-00003
G1099-60021
0960-0897
G1946-89001
G1099-89002
0100-1879
G1099-20550
G1099-20554
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