Table of Contents
Advertisement
5
Diffusion pump MSD vacuum system
Diffusion pump MSD vacuum system
The high vacuum pump in the HP G1098A model of the MSD is a vapor diffusion
pump. A diffusion pump requires baffling to prevent vapor from migrating into the
vacuum manifold. Foreline pressure is monitored by the foreline gauge. The ac
board controls the diffusion pump heater. The diffusion pump MSD can accept up
to 2 ml/min carrier gas flow.
Calibration valve
Diffusion pump
Diffusion pump baffle adapter
Manifold cooling fins
Diffusion pump vacuum manifold
Too hot switch
Too cold switch
Foreline gauge
High vacuum cooling fan
(diffusion pump position)
186
Vacuum System
Advertisement
Table of Contents
