Table of Contents
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Maintaining the MSD
4
To disassemble the ion source
Interface socket
Source body
Set screw
Repeller
Repeller insulator
Filament
Source heater assembly
Repeller insulator
Washer
Repeller nut (do not overtighten)
Filament
Ion focus lens
Drawout cylinder
Drawout plate
Lens insulator (one of a pair)
Entrance lens
149
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