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4
To remove a filament
To remove a filament
Materials needed:
Gloves, clean, lint-free
Hex ball driver, 1.5-mm (8710-1570)
1 Vent the MSD (page 52).
2 Open the vacuum manifold (page 54).
3 Remove the ion source (page 146).
4 Remove the filament(s) to be replaced.
: $ 5 1 , 1 *
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158
Maintaining the MSD
large (8650-0030)
small (8650-0029)
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