Clearing Up; Recipe; Consumables List - Logitech PM5 User Manual

Lapping & Polishing System Logitech PM5 user manual 2017/05/08
9.4. Clean well the ceramic plate with wiper and acetone,
9.5. Let the hotplate cool down and put it away.

10. Clearing up

10.1. In case of lapping, wipe the plate as much as possible in order to remove the slurry,
10.2. In case of polishing cloth:
10.2.1. Put the conditioning ring on the cloth (after polishing) or on the metallic plate (after lapping), against
the roller arm assembly,
10.2.2. Set the rotation speed to 5rpm, then sweep to 外内 100% and set the time to 5min;
10.2.3. Start to dribble water,
10.2.4. Start the rotation,
10.2.5. Increase slowly the rotation speed up to 15rpm,
10.2.6. Continue until there is no more slurry on the cloth (the water inside the ring gets transparent). It takes
about 5min,
10.2.7. Stop the rotation,
10.3. Brush the PP6 jig with the brush using neutral detergent,
10.4. Prepare the ultrasonic bath,
10.5. Wash the PP6 jig, the roller arm and the conditioning ring in the ultrasonic bath.
reach the bottom surface of the PP6 jig's central ring, not higher.
to clean are the rollers,
10.6. Dry with wiper and put things back to their original places. The PP6 jig should be very well dried. Use the air
gun,
10.7. Take out the stainless steel plate and put it in the sink. Be careful as it is very heavy,
10.8. Wash the plate with pure water and, only in case of lapping (no cloth on the plate), with nylon brush,
10.9. Dry the plate and put it back at its original place,
10.10. Wipe the saucer with wiper, take it away and wash it in the sink with pure water,
10.11. Dry the saucer and put it back on the main body,
10.12. Shut down the main body power and the pump power,
10.13. Open the trap leak valve B,
10.14. Wipe well the main body and the desk with wiper,
10.15. Fill out the paper sheet and the logging system (the polishing time includes conditioning time).

11. Recipe

This is only a guide. You have to make your own tests.
Target
Cu wiring VLSI 50~100g/cm

12. Consumables list

They all can be purchased at BN Technology.
• アルコワックス (Arco waks?) 20g bar, 20 units, 16800 JPY (in 2008),
ウルトラポル（cloth） 10 units, 29700 JPY (in 2008)
•
SF1 5L 51770 JPY (in 2008)
•
PL-20 20L 84000 JPY (in 2008)
•
Load Slurry
2 PL-20
As for the roller arm, the most important part
Rotation speed
15 rpm No (arm position 50%)
7 / 7
The water level should
Sweep Polishing rate
~50nm/min