Panasonic SP22P Operating Instructions Manual page 23
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Also See for SP22P:
- Operating instructions manual (62 pages) ,
- Maintenance manual (131 pages)
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S
G
o
1
B
a
k c
G
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2
B
a
k c
153C-E-TE008
Optimum discharge amount of cleaning solvent for cleaning
It is optimum to discharge the 35mm ± 5mm width of cleaning solvent onto the cleaning paper for the
wet cleaning.
Adjustment method : Adjust the discharge amount with the regulator on the back of the machine
193C-E-OMA00-A04-00
p
e
e
d
P
t a
e t
n r
m
m
s /
4
0
D
y r
4
0
D
y r
2
0
W
t e
1
0
D
y r
(next to the cleaning solvent container).
(0.147 MPa to 0.196 MPa)
CLEANING SOLVENT FOR WET CLEANING
V
a
c
u
u
m
O
N
O
N
O
F
F
O
N
35 mm ±5 mm
∗ However, the cleaning result gets worse.
Besides, it takes more time for the mask to
dry, so set the cleaning speed to 10mm/s
for Back of the second cleaning.
The increase of pressure makes the dis-
charge amount larger.
The decrease of pressure makes the dis-
charge amount smaller.
Page 23
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