Gas K Factors - Omega 3200 User Manual

Thermal mass flow controllers
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G.

Gas K Factors

Gas
Acetylene
Air
Argon
Butane
Carbon Dioxide
Deuterium
Ethylene
Freon 11
Freon 12
Freon 13
Freon 14
Freon 22
Germane
Helium
Hydrogen
Krypton
Methane
Neon
Nitric Oxide
Nitrogen
Nitrous Oxide
Oxygen
Ozone
Propane
Sulfur Dioxide
Xenon
These K Factors are given for reference only and are not intended as a recommendation of
application suitability. Accuracy and response will be affected depending on the gas and
flow range. Check the compatibility of all wetted materials before using any gas other than
the calibration gas for the unit.
Chemical
K Factor
Symbol
C
H
2
2
-
Ar
C
H
4
10
CO
2
D
2
C
H
2
4
CCL
F
3
CCL
F
2
2
CCLF
3
CF
4
CHCLF
2
GeH
4
He
H
2
Kr
CH
4
Ne
NO
N
2
N
O
2
O
2
O
3
C
H
3
8
SO
2
Xe
M-4271/0707, pg. 22 of 26
0.589
1.000
1.438
0.260
0.739
1.000
0.598
0.330
0.354
0.385
0.420
0.460
0.570
1.458
1.011
1.440
0.721
1.443
0.990
1.000
0.710
0.991
0.446
0.383
0.690
1.437

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