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Unit No.
Data No.
40
34
41
0
1
2
42
2
43
2
44
2
3
45
2
3
4
5
6
7
8
46
5
7
64
Parameter
Measurement value
- (nm)
(Third surface)
Scaling mode
0: OFF
1: ON
Span value
-20000 to 20000 (1 div: 0.0001)
Offset value
-999999999 to 999999999 (nm)
Smooth
0: OFF
1: ON
Average
0: 1 time
1: 2 times
2: 4 times
3: 8 times
4: 16 times
5: 32 times
6: 64 times
7: 128 times
8: 256 times
9: 512 times
10: 1024 times
11: 2048 times
12: 4096 times
Differential type
0: OFF
1: ON
Differentiation cycles
1 to 5000 (ms)
Hold type
0: Through
1: Peak
2: Bottom
3: Peak to peak
4: Average
5: Sampling
Trigger method
0: External input
1: Self up
2: Self down
Trigger level
-999999999 to 999999999 (nm)
Trigger hysteresis
0 to 999999999 (nm)
Trigger delay (ms)
0 to 5000 (ms)
Sampling period (ms)
1 to 5000 (ms)
Trigger delay mode
0: OFF
1: ON
Offset at zero reset
-999999999 to 999999999 (nm)
Zero reset mode
0: REAL
1: HOLD
Status
0: OFF
1: ON
Setting range/Output range
Non-procedural Communication Command Reference
List of Parameters
Others
TASK1 settings.
The settings in Unit
Number 40 are valid
only for multi-task
mode.
ZS-HL-N Series
9
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