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List of Parameters
Unit No.
4
0
1
5
0
40
0
3
4
5
8
9
1
10
11
12
13
14
32
33
ZS-HL-N Series
8
Non-procedural Communication Command Reference
Data No.
Parameter
Mutual interference
prevention mode
Mutual interference
prevention timing
Gain setting
Measurement mode
Parameter X
Parameter Y
Parameter K
Parameter M
Parameter N
Surface for
measurement (Area 1)
Surface for
measurement (Area 2)
Measurement position 1
(for thickness
measurement)
Measurement position 2
(for thickness
measurement)
Measurement area
Width of peak bottom
Measurement value
(First surface)
Measurement value
(Second surface)
Setting range/Output range
0: OFF
1: ON
0: Timing A
1: Timing B
1 to 5
0: OFF
1: Average
2: Peak
3: Bottom
4: Thickness
5: Gap
6: K+mX; +nY
0: None
1: TASK 1
2: TASK 2
3: TASK 3
4: TASK 4
0: None
1: TASK 1
2: TASK 2
3: TASK 3
4: TASK 4
-999999999 to 999999999 (nm)
-100 to 100 (1div: 0.1)
-100 to 100 (1div: 0.1)
0: First surface
1: Second surface
2: Third surface
3: Peak
0: First surface
1: Second surface
2: Third surface
3: Peak
0: None
1: Average
2: Peak
3: Bottom
0: None
1: Average
2: Peak
3: Bottom
0: Area 1
1: Area 2
0 to 255
- (nm)
- (nm)
Others
TASK1 settings.
The settings in Unit
Number 40 are valid
only for multi-task
mode.
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