Agilent Technologies Turbo-V 750 TwisTorr User Manual page 396

Table of Contents

Advertisement

17
Technical Information
Venting the Turbo-V 750/850 TwisTorr Pumping System
6
7
Evidently, the default settings can be bypassed and the "Controlled
Venting Procedure" can be eliminated, as explained in a previous
section of this manual. In this case one of the previous described
venting procedures can be followed.
396/406
When the Turbo-V 750/850 TwisTorr Pumping System and the
backing pump are stopped and the system is at atmospheric
pressure, for a better bearing protection it is advisable to leave
the purge gas flowing into the Turbo V pump. In doing this, leave
the chamber or the Turbo-V vent valve (positioned on the enve-
lope) opened, to avoid system overpressures. If the vent valve
can't be kept opened, the backing pump should be left operating;
For water cooling: shut off the water supply.
Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01
(A)

Advertisement

Table of Contents
loading

Table of Contents