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Hazard and Safety Information
This manual uses the following standard safety protocols:
Operators and service personnel must be aware of all hazards associated with this equip-
ment. They must know how to recognize hazardous and potentially hazardous conditions,
and know how to avoid them. The consequences of unskilled, improper, or careless opera-
tion of the equipment can be serious. This product must only be operated and maintained
by trained personnel. Every operator or service person must read and thoroughly understand
operation/maintenance manuals and any additional information provided by Varian
Vacuum Technologies. All warning and cautions should be read carefully and strictly
observed. Consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Varian Vacuum Technologies office.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing any vacuum equipment.
iv
Diffusion Pumps for Applied Film Coating Systems
The warning messages are for attracting the attention of the
WARNING
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
The caution messages are displayed before procedures, which
CAUTION
if not followed, could cause damage to the equipment.
The notes contain important information.
NOTE
Do not use silicone oil or silicone grease.
CAUTION
Use powder-free butyl or polycarbonate gloves to prevent
skin oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox
is not compatible with aluminum and will cause damage.
Normally, it is unnecessary to use vacuum grease.
NOTE
However, if it must be used, avoid silicone types, and
use it sparingly. Apiezon
(Varian Part Number 695400004).
®
L grease is recommended
®
. Alconox
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