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Diffusion Pumps
for Applied
Film Coating
Systems
Manual Number 699950040
Revision A
March 2003
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
INSTRUCTION MANUAL
SUPPLEMENT
R1330-529 HS-16
R1797-301 HS-20
R1333-539 NHS-35
R1333-543 NHS-35
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Table of Contents
Related Manuals for Agilent Technologies R1330-529 HS-16
Summary of Contents for Agilent Technologies R1330-529 HS-16
- Page 1 Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies Diffusion Pumps INSTRUCTION MANUAL SUPPLEMENT for Applied R1330-529 HS-16 Film Coating R1797-301 HS-20 R1333-539 NHS-35 Systems R1333-543 NHS-35 Manual Number 699950040 Revision A...
- Page 2 Diffusion Pumps for Applied Film Coating Systems VacuSolv is a trademarks of Varian Vacuum Technologies. Apiezon is a registered trademark of M&I Materials Ltd. Alconox is a registered trademark of Alconox, Inc. Copyright 2003 Varian Vacuum Technologies...
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Page 3: Warranty Replacement And Adjustment
Diffusion Pumps for Applied Film Coating Systems Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product. -
Page 4: Hazard And Safety Information
Diffusion Pumps for Applied Film Coating Systems Hazard and Safety Information This manual uses the following standard safety protocols: The warning messages are for attracting the attention of the WARNING operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury. - Page 5 Diffusion Pumps for Applied Film Coating Systems O-ring Care When removing, checking, or replacing O-rings, keep in mind the following: Varian Vacuum Technologies recommends replacing all NOTE O-rings during routine maintenance or during any maintenance procedure requiring that O-rings be removed. Remove O-rings carefully with your fingers.
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Page 6: Contacting Varian Vacuum Technologies
Diffusion Pumps for Applied Film Coating Systems Contacting Varian Vacuum Technologies In the United States, you can contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN. Internet users: Send email to Customer Service & Technical Support at vpl.customer.support@varianinc.com Visit our web site at www.varianinc.com/vacuum Order on line at www.evarian.com See the back cover of this manual for a listing of our sales and service offices. -
Page 7: Replacement Parts
Diffusion Pumps for Applied Film Coating Systems General This document supplements the standard instruction manuals for the HS-16, HS-20, and NHS-35 diffusion pumps, which are customized for Applied Films coating systems. Please refer to the standard instruction manuals for general information regarding safety considerations, installation, operation and maintenance. - Page 8 Diffusion Pumps for Applied Film Coating Systems Figure 2 on page 4, Figure 3 on page 5, and Figure 4 on page 6 show the electrical wiring schematics of the various diffusion pumps within the electrical box. For the wiring schematic of the heaters to the terminal strip, please refer to the standard instruction manual or the wiring label on the inside cover of the electrical box.
- Page 9 Diffusion Pumps for Applied Film Coating Systems Figure 1 Supplemental Replacement Part Location...
- Page 10 Diffusion Pumps for Applied Film Coating Systems Figure 2 HS-16 Wire Schematic...
- Page 11 Diffusion Pumps for Applied Film Coating Systems Figure 3 HS-20 Wire Schematic...
- Page 12 Diffusion Pumps for Applied Film Coating Systems Figure 4 NHS-35 Wire Schematic, 480V & 400V...
- Page 13 Diffusion Pumps for Applied Film Coating Systems “L1” “L2” “L3” “N” “PE” Figure 5 Power Module Pin Assignments Figure 6 ATHf-20 Switch and Thermostat Wire Harness Pin Assignments Figure 7 PT-100 Wire Harness Pin Assignments...
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Page 15: Request For Return Health And Safety Certification
Request for Return Health and Safety Certification Diffusion Pumps for Applied Film Coating Systems Request for Return Health and Safety Certification Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to a Varian Customer Service Representative. - Page 16 Diffusion Pumps for Applied Film Coating Systems Request for Return Health and Safety Certification FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): TURBO PUMPS and TURBOCONTROLLERS CLAIMED DEFECT POSITION PARAMETERS Power: Rotational Speed: Does not start...
- Page 17 Returned Materials Report...
- Page 20 Varian Vacuum Technologies Sales and Service Offices Argentina Germany and Austria Taiwan Varian Argentina Ltd. Varian Deutschland GmbH Varian Technologies Asia Ltd. Sucursal Argentina Alsfelder Strasse 6 14F-16 No.77, Hsin Tai Wu Road Sec. 1, Av. Ricardo Balbin 2316 Postfach 11 14 35 Hsi Chih, Taipei Hsien 1428 Buenos Aires 64289 Darmstadt...