Ulvac RFS-2730H Manuals

Manuals and User Guides for Ulvac RFS-2730H. We have 1 Ulvac RFS-2730H manual available for free PDF download: Instruction Manual

Ulvac RFS-2730H Instruction Manual

Ulvac RFS-2730H Instruction Manual (125 pages)

Solid-State RF Power Supply Matching Box

Brand: Ulvac | Category: Power Supply | Size: 3 MB

Table of Contents

Table of Contents
10
For Safe Operation
13
Precautions When Handling the System
13
Warning Labels/Nameplate
13
Contact Information
14
Overview
15
Introduction
15
Features
15
System Configuration
16
Approach to the Restriction of Hazardous Substances (Rohs) Directive
17
Cooling Water Quality Standard
18
RF Power Supply Individual Specifications
20
Matching Box Individual Specifications
22
Remote Controller Individual Specifications
24
Setup
25
Checking the Accessories
25
Power Supply Installation
26
Installation Method and Rack Fabrication
26
Power Supply Installation Environment
27
Storage Environment and Transportation Conditions
27
Matching Box Installation
27
Installation Method
28
Remote Controller Installation
29
System Wiring
30
Cable Connections
31
Input Power Supply Wiring
31
Connecting the Earth Terminal
32
Functions
34
RF Power Supply Functions Description
34
Front Panel Functions Description
34
Rear Panel Functions Description
37
Alarm Function Description
39
Safety Lock (Interlock) Function Description
49
Instantaneous Voltage Drop Function Description
51
External Control (REMOTE) Function Description
52
External Control (RS-232C) Function Description
59
Pulse Function Description
71
Matching Box Functions Description
72
Front Panel Functions Description
72
Left Panel Functions Description
74
Bottom Panel Functions Description
75
External Control (I/F) Function Description
76
Remote Controller Functions Description
81
Front Panel Functions Description
81
Rear Panel Functions Description
82
Operation
83
RF Power Supply Operating Procedures
83
Turning on the Power Supply
83
Selecting the Control Mode
84
Main Monitor Screen
85
Pulse Set Screen
86
Run Time Screen
87
Power Calibrate Screen
88
All Reset Screen
89
Analog Level Screen
90
Timer Adjust Screen
91
AC down Protect Screen
92
Main Menu Screen
93
Mode Select Screen
93
Exciter Mode Screen
94
RF Output Mode Screen
94
Parameter Set Screen
95
Alarm Set Screen
96
Timer Set Screen
97
RF on Timer Screen
97
Alarm Reset Timer Screen
98
RS-232C Time out Screen
99
Pulse Init Timer Screen
100
Power Control Screen
101
Arc Detect Count Screen
102
No Alarm History Screen
102
Alarm History Screen
103
Parameter Reset Screen
104
Remote Controller Operating Procedures
105
Initial Screen
105
Preset Channel Screen
105
Preset Mem Lock Screen
106
Stop Window Screen
106
Restart Window Screen
108
Control Gain Screen
108
Dec Limit Ctrl Screen
109
Inc Limit Ctrl Screen
111
Control Flag Screen
111
Soft Dip Switch Screen
112
Ref Ctrl Window Screen
113
Ref Ctrl Gain Screen
113
Manual Matching Operation
114
Auto Matching Operation
114
Preset Operation
115
Maintenance
117
RF Power Supply Maintenance and Inspection
117
Matching Box Maintenance and Inspection
118
Reference Materials
119

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