MKS 946 Series Manuals

Manuals and User Guides for MKS 946 Series. We have 1 MKS 946 Series manual available for free PDF download: Operation And Maintenance Manual

MKS 946 Series Operation And Maintenance Manual (130 pages)

Vacuum System Controller

Brand: MKS | Category: Controller | Size: 1 MB

Table of Contents
2
Safety Information
6
Symbols Used in this Manual and Their Definitions
6
Safety Precautions
6
Safety Procedures and Precautions
6
Specifications
8
Controller
8
Pressure, Flow Sensors, & Valves
10
Controller Display
14
Display Message
14
Display Resolutions
15
Serial Communication Response Format
16
Feature, Control Locations and Dimensions
17
Typical Applications for the Series 946 Controller
19
MKS Series 946 Vacuum System Controller
20
Operating the Series 946 Controller
22
Power
22
Front Panel Control Lock
22
Front Panel Display
22
Standard Front Panel Display
22
Large Font Display
24
System Setup
24
Overview of 946 System Setup
24
Display System Setup Parameters
25
Change and Save a Parameter Value
26
Description of the System Setup Parameters
26
Channel Setup for Pressure Measurement
30
Overview of 946 Channel Setup
30
Setup for a Capacitance Manometer
32
Setup for a CP (Convection Pirani), Convectron, or PR Sensor
35
Setup a Cold Cathode Sensor
38
Setup a Hot Cathode Sensor
41
Power Control of a Pressure Sensor
45
Power (Including Degas) Control of a Sensor Using Front Panel Control Button
45
Power (Including Degas) Control of a Sensor Via 37 Pin AIO D-Sub Connector
46
Power (Including Degas) Control of a Sensor Using Serial Communication Commands
46
Channel Setup for Flow Measurement and MFC Based Pressure Control
47
Simple Operation of a Mass Flow Controller
47
Setup MFC Controlling Parameters for Flow Control
48
Set MFC(S) for Dynamically Controlling System Pressure
50
Pressure Control Using a Control Valve
60
Valve Type Selection
61
Valve Control Recipe Setup
62
Activate a Pressure Control with a Valve
63
Terminate a PID Pressure Control Using a Valve
64
Installing Vacuum Sensors
66
Installing Cold Cathode Sensors
66
Locating a Cold Cathode Sensor
66
Orienting a Cold Cathode Sensor
66
Managing Contamination in a Cold Cathode Sensor
66
Connecting the Series 431/422 Sensor
66
Connecting the 423 I-Mag Sensor
67
Installing Hot Cathode Sensors
67
Over Pressure Conditions
67
Locating a Hot Cathode Sensor
67
Preventing Contamination in a Hot Cathode Sensor
67
Orienting a Hot Cathode Sensor
68
Connecting a Hot Cathode Sensor to the Vacuum System
68
Connecting a Hot Cathode Sensor to the 946 Controller
68
Installing Convection Pirani, Convectron, or Pirani Sensors
69
Over Pressure Conditions
69
Locating the Sensor
70
Preventing Contamination in a Pirani Sensor
70
Orienting the Series 317Convection Pirani or Convectron Sensor
70
Orienting the Series 345 Pirani Sensor
70
Connecting Convection Pirani, Convectron, or Pirani Sensors
70
Preparing the 317 Sensor for Bakeout
71
Installing Capacitance Manometers - MKS Baratron
72
Installing a Capacitance Manometer
72
Connecting a Capacitance Manometer
72
Series 902B Piezo
73
Installing Mass Flow Controllers
73
Environmental Requirements
73
Interface Cables
73
Setup
74
Gas Line Connections
74
Installing a Pressure Control Valve
74
Installing an Upstream Solenoid Valve
74
Installing a Downstream MKS 153 or T3B Throttle Valve
75
Connecting Relay and Analog Outputs
77
Connecting 946 Relay Outputs
77
Pin out for the 946 Relay Output
77
Proper Setting of a Relay
78
Relay Inductive Loads and Arc Suppression
79
Connecting the 946 Analog Output
79
Buffered Analog Output
80
Logarithmic/Linear and Combination Analog Output
91
Logarithmic/Linear Analog Output
91
Combination Analog Output
91
Logarithmic/Linear Analog Output When the Sensor Power Is Turned off
93
RS232/485 Serial Communication Commands
94
Serial Communication Wiring Diagram
94
Communication Protocols
94
Pressure Reading Commands
95
Relay and Control Setting Commands
96
Capacitance Manometer Control Commands
97
Convection Pirani, Convectron and Pirani Control Commands
97
Cold Cathode Control Commands
98
Hot Cathode Control Commands
99
MFC Control Commands
100
Pressure (Valve) Control Commands
100
PID Recipe Setting Commands
101
Ratio Recipe Setting Commands
102
Pid/Ratio Control Activation Command
102
System Commands
103
Error Codes
105
Maintenance of Series 946 Controller Modules
106
Removing and Installing a Sensor Module
106
Removing and Installing AIO Module
107
Pressure Control (PC) Module
108
Mounting the 946 Controller
109
AC Power Cord
110
Maintenance and Service of MKS Vacuum Sensors
111
And 431 Cold Cathode Sensor
111
Cold Cathode Theory
111
Maintenance of Series 431/422 Cold Cathode Sensor
112
Maintenance of Series 423 I-Mag Cold Cathode Sensor
115
Disassemble the I-Mag Sensor
115
Clean the I-Mag Sensor
117
Assemble the I-Mag Sensor
117
Preparing the Sensor for Bakeout
118
Maintenance of Low Power Nude and Mini BA Hot Cathode Sensors
118
Hot Cathode Theory
118
Cleaning the Hot Cathode Sensor
119
Testing the Hot Cathode Sensor
119
Maintenance of a Pirani Sensor
120
Theory of a Pirani Pressure Sensor
120
Cleaning the Series 345 Sensor
121
Cleaning the Series 317 Sensor
122
Maintenance of a Capacitance Manometer
123
Theory of a Capacitance Manometer
123
Repairing the Baratron Capacitance Manometer
124
Spare Parts and Accessories
125
Appendix
127
MFC Gas Conversion Factors for Selected Gases
127

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MKS 946 Series Operation And Maintenance Manual (130 pages)

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