MKS 943-A-120V60-TR-NA Manuals

Manuals and User Guides for MKS 943-A-120V60-TR-NA. We have 1 MKS 943-A-120V60-TR-NA manual available for free PDF download: Instruction Manual

MKS 943-A-120V60-TR-NA Instruction Manual

MKS 943-A-120V60-TR-NA Instruction Manual (46 pages)

Cold Cathode Vacuum Sensor System

Brand: MKS | Category: Accessories | Size: 1 MB

Table of Contents

Table of Contents
5
Chapter 1 General Information

7
- Receiving Inspection
  7
- International Shipment
  7
- Warranty
  7
- Certification
  7
- Customer Service / Technical Support
  8
Chapter 2 Safety

9
- Safety Introduction
  9
- Responsibility
  10
- Grounding Requirements
  11
- High Voltage
  12
- Over Pressure Conditions
  13
- Damage Requiring Service
  14
Chapter 3 Specifications

15
- General Description
  15
- Intended Use / Applications
  15
  - Improper Use
    15
- Storage
  15
- Specifications
  16
Chapter 4 Installation

19
- Mounting the Controller
  19
  - AC Power Cord
    19
  - Ground the Controller and Vacuum System
    19
  - Fuse Replacement
    20
  - Accessory Connector
    20
  - Logarithmic Analog Output
    21
  - Buffered Analog Output
    21
  - Remote High Voltage Enable/Disable
    23
  - Relay Inductive Loads and Arc Suppression
    24
- Installing a Series 943 System Sensor
  25
Chapter 5 Operation

27
- Theory of a Cold Cathode Ionization Sensor
  27
- 943 Controller Front / Rear Panels
  29
- Series 943 Circuit Description
  29
  - High Voltage Power Supply
    29
  - Electrometer
    30
  - Analog Processing
    30
  - Set Point Comparators
    30
  - Microprocessor
    30
- Using the Series 943 System with Gases Other than Air or N2
  31
  - Calibrating for Other Gases
    32
- Reading Pressure
  33
- Set Points
  33
  - Adjusting the Set Points
    33
  - Protect Set Point
    33
Chapter 6 Service & Maintenance

35
- Introduction
  35
- Service Guidelines
  35
- Damage Requiring Service
  36
- Troubleshooting
  37
- Contaminated 943 Sensor
  38
  - Disassembly
    39
  - Cleaning the Components
    39
  - Reassemble the Sensor
    40
- Customer Service / Technical Support
  41
- Accessories/ Spare Parts
  42
Chapter 7 Index

43

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