MKS 959 Series Manuals

MKS 959 Series Manuals

Manuals and User Guides for MKS 959 Series. We have 1 MKS 959 Series manual available for free PDF download: Operation And Maintenance Manual

MKS 959 Series Operation And Maintenance Manual

MKS 959 Series Operation And Maintenance Manual (124 pages)

Hot Cathode Controller

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents

Table of Contents
4
1 Package Contents

10
2 Safety Information

11
- Symbols Used in this Manual
  11
- Safety Precautions
  12
3 Specifications

14
- Controller
  14
- Standard Pirani
  15
- Convection Enhanced Pirani
  16
- Low Power Nude Tube
  17
- Mini BA
  18
- Front View
  20
- Rear View
  20
4 Feature and Control Locations

20
- Side View
  21
  - Standard Pirani
    22
  - Convection Enhanced Pirani
    23
  - Low Power Nude Tube
    23
  - Mini BA
    24
5 Typical Applications for the 959 Hot Cathode Controller

25
6 About the 959 Hot Cathode Controller

26
7 Installing the 959 Hot Cathode Controller

28
- Controller Installation
  28
8 Operating the 959 Hot Cathode Controller

43
- How the 959 Hot Cathode Controller Works
  43
- Controller Module Operation
  43
- Hot Cathode Sensor Module Operation
  44
- Pirani Sensor Module Operation
  45
- User Interface
  45
  - Controller Power up
    45
- Controller Modes of Operation
  45
  - Pressure Measurement Mode
    45
  - Set Point Mode
    46
  - Set up Mode
    46
  - Parameter Input Constraints
    46
  - Leak Test Mode
    46
- Front Panel Overview
  47
  - Front Panel Switch Definitions
    47
- Pressure Measurement Modes
  48
- Set Point Operation
  49
- Set up Configuration
  56
  - Filament Select
    56
  - Combined Pressure Measurement
    56
  - Combined Mode Constraints
    57
  - Hot Cathode Sensitivity
    57
- Calibration
  58
  - Pirani
    58
  - Vacuum Calibration
    58
  - Atmospheric Calibration
    58
  - Pirani Atmospheric Calibration
    59
  - Pirani Vacuum Calibration
    59
  - Emission Current Assignment
    60
  - Degas Time
    60
- Leak Test Operation
  61
  - Entering Leak Test Mode
    61
  - Resetting the Baseline Pressure
    61
  - Audible Operation
    61
  - Exiting Leak Test Mode
    62
  - Leak Test Constraints
    62
  - Using the Series 959 as a Leak Detector
    62
- Leak Test Displays
  65
- Status Readouts
  67
  - Under Pressure
    67
  - Over Pressure
    67
  - Low Emission
    68
- Miscellaneous Displays
  69
  - LCD Display Test
    69
  - Factory Reset
    70
  - Front Panel Lock
    70
- Buffered Analog Output
  71
9 Maintaining the 959 Hot Cathode Controller

75
10 Using the 959 Hot Cathode Controller with Other Gases

77
- Adjusting System Sensitivity for Another Gas
  77
- Relative Sensitivity Table
  78
11 Accessories

79
12 Product Warranty

81
13 Appendix A Serial Communications

82
- 13. Appendix A Serial Communications Overview
  82
- Message Compatibility
  82
- Message Format
  82
- Serial Communications
  82
- Message Syntax
  83
  - Command Syntax
    83
  - Query Syntax
    83
  - Response Syntax
    83
- Addressed RS232
  84
  - Message Syntax
    84
  - Field Definitions
    84
    
    Attention Character
    84
    
    Device Address
    84
- ASCII Command Set Definition
  85
- Message Handling
  85
- Setup Messages
  86
  - Set Point Value - Spx
    86
  - Control Set Point Value - CSP
    87
  - Protect Pressure - PRO
    88
  - Gauge Correction - GC
    89
  - Atmospheric Calibration -ATM
    90
  - Vacuum Calibration - VAC
    91
  - Time to Degas -TD
    92
  - Front Panel Lock - FPL
    93
  - Factory Default - FD
    94
- Control Messages
  95
  - Active Filament - AF
    95
  - Filament Power - FP
    96
  - Degas Power - DG
    97
  - Combined Pressure Measurement - CMB
    98
  - Set Point Enable - Enx
    99
  - Emission Current - EC
    100
- Status Messages
  101
  - Pressure Reading - Prx
    101
  - Filament Status - FS
    102
  - Degas Status - DS
    103
  - Set Point Status - Ssx
    104
  - Control Set Point Status - CSS
    105
  - Units Selection - U
    106
  - Manufacturer - MF
    107
  - Model Designation - MD
    108
  - Device Type - Dtx
    109
  - Serial Number - Snx
    110
  - Firmware Version - Fvx
    111
  - Hardware Version - Hvx
    112
  - 14. Appendix B Serial Communication Error Codes
    115
14 Appendix B

115
- Error Codes
  115

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