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4.5
Measurement Accuracy
Total accuracy (X, Y axes)
•
When a traceable standard scale or a conforming evaporation pattern is placed on the
stage glass and is measured with a fixed zoom position, at the center of the viewfield ("L"
represents any measured length in mm)
Repeatability (when magnification is 3.5 × ):
Maximum permissible indication error for single-axis
measurement MPE
Maximum permissible indication error for dual-axis
measurement MPE
Total accuracy (Z axis)
•
Indication error for measurement using a laser scale
Maximum permissible indication error for single-axis
measurement MPE
4.6
Operating Conditions
Operating environment
•
Temperature:
Humidity:
Altitude:
Pollution:
Indoor use only
Environment in which accuracy is guaranteed
•
Temperature:
Floor strength
•
Average load bearing capacity: Must be able to bear the mass on the total floor surface,
Collapsing load:
Permissible floor vibration
•
Vibration frequency of 10 Hz or less: Amplitude of 3 µm
Vibration frequency of 10 to 1000 Hz: Vibration acceleration of 0.012 m/s
(when magnification is 3.5 × ):
E1
(when magnification is 3.5 × ):
E2
:
E1
10 °C to 35 °C
70% max.
2000 m max.
Degree 2
20 °C ± 0.5 K
including the maximum mass of the system (main body
with parts and components assembled: 140 kg;
miscellaneous: 50 kg)
Greater than the total mass of main body with parts and
components assembled
- 17 -
1 µm (2σ)
2 + 8L/1000 µm
3 + 8L/1000 µm
3 + L/50µm
max.
P-P
2
(1.2 gal) max.
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