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RKC INSTRUMENT REX-F9000 Instruction Manual

High resolution temperature controller
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High Resolution
Temperature Controller
REX-F9000
Instruction Manual
IM9000F01-E4
RKC INSTRUMENT INC.
®

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Summary of Contents for RKC INSTRUMENT REX-F9000

  • Page 1 High Resolution Temperature Controller REX-F9000 Instruction Manual IM9000F01-E4 RKC INSTRUMENT INC. ®...
  • Page 2 All Rights Reserved, Copyright 1999, RKC INSTRUMENT INC.
  • Page 3 Thank you for purchasing the RKC instrument. In order to achieve maximum performance and ensure proper operation of your new instrument, carefully read all the instructions in this manual. Please place this manual in a convenient location for easy reference.
  • Page 4 The figures, diagrams and numeric values used in this manual are only for purpose of illustration. RKC is not responsible for any damage or injury that is caused as a result of using this instrument, instrument failure or indirect damage.

  • Page 5: Table Of Contents

    CONTENTS Page 1. PREPARATION..............1 1.1 Handling Procedure..................1 1.2 Check of Product Delivered................2 1.3 Check of Model Code..................2 2. MOUNTING ................3 2.1 Cautions for Mounting ..................3 2.2 Dimensions .....................4 2.3 Mounting Procedures ..................5 3. WIRING ................. 6 3.1 Cautions for Wiring..................6 3.2 Terminal Configuration ..................8 3.3 Wiring Example .....................12 4.
  • Page 6 Page 6. OPERATIONS ..............46 7. DISPLAY AT ABNORMALITY ..........48 8. REPLACING THE RUBBER PACKING ......50 9. FUNCTION DESCRIPTION..........52 9.1 PV Bias......................52 9.2 Digital Filter....................52 9.3 Control Response Parameter................52 9.4 AT Bias......................53 9.5 Sensor Bias Function ..................53 9.6 Alarms (ALM) ....................54 9.7 Bar-Graph Display ..................60 9.8 Power Feed Forward Function ..............61...

  • Page 7: Preparation

    1. PREPARATION The REX-F9000 is a temperature controller in high resolution, high accuracy and high control stability merchandised mainly for semiconductor manufacturing equipment. Both 1-channel and 2-channel types of controller are available. For the 2-channel type, as each parameter is independent for each channel, one controller can be used for two loops.

  • Page 8: Check Of Product Delivered

    1. PREPARATION 1.2 Check of Product Delivered Check than the following items are delivered without damage. Mainframe: 1 unit Mounting bracket: 2 pieces Instruction manual (IM9000F01-E4): 1 copy Communication Instruction Manual (IM9000F02-E ): 1 copy Power feed transformer (PFT-01 or PFT-02) [Option]: 1 piece (Separate packing) 1.3 Check of Model Code Check the model code from the following list to determine if the product delivered is as desired.

  • Page 9: Mounting

    2. MOUNTING WARNING In order to prevent electric shock or instrument failure, do not turn on the power before mounting or removing the instrument. 2.1 Cautions for Mounting (1) This instrument is intended to be used under the following environmental conditions. (IEC61010-1) OVERVOLTAGE CATEGORY II POLLUTION DEGREE 2...

  • Page 10: Dimensions

    2. MOUNTING 2.2 Dimensions Engineering unit: mm Fig. 2.1 Dimensions +0.8 70 (*2) (*1) 2-M4 Mounting dimensions 19.5 (*2) 68 (*2) (*1): Minimum (*2): Maximum Fig. 2.2 Panel cutout Fig. 2.3 Dimensions (Power feed transformer) IM9000F01-E4...

  • Page 11: Mounting Procedures

    2. MOUNTING 2.3 Mounting Procedures 1. Mount the panel cutout corresponding to the number of units on the panel by referring to panel cutout dimensions. 2. Insert the instrument into the panel from the panel cutout. 3. Insert the projections at the bottom of the bracket into the slots at the top of the controller (Fig.

  • Page 12: Wiring

    3. WIRING WARNING In order to prevent electric shock or instrument failure, do not turn on the power supply until all of the wiring is completed. In failure or error of this instrument could result in a critical accident of the system, install an external protection circuit to prevent such an accident.
  • Page 13 3. WIRING (4) For wiring, use wires conforming to the domestic standard of each country. (5) For power supply wires, use twisted wires with low voltage drop. (6) About 5 to 6 second are required as the preparation time for contact output after power on. Use a delay relay when the output line, is used for an external interlock circuit.

  • Page 14: Terminal Configuration

    3. WIRING 3.2 Terminal Configuration Conduct wiring by referring to following diagrams. Power terminals Ground 24 V 24 V 100 to 240 V Output terminals FAIL： Rear terminals FAIL Relay contact output 250 V AC, 1 A (Resistive load) 1 "a" contact NO: Normally open Input terminals Contact input...
  • Page 15 3. WIRING Rear terminals Control output terminals (CH1) Voltage pulse Current Alarm output terminals (CH1) Alarm 1 ALM1 Input terminals (CH1) RTD input Alarm 2 ALM2 4-wire system 3-wire system NO: Normally open As input, different types of input (3-wire and 4-wire systems) can be connected to CH1 and CH2.
  • Page 16 3. WIRING Rear terminals Control output terminals (CH2) * Voltage pulse Current Alarm output terminals (CH2) * Alarm 1 ALM1 Input terminals (CH2) * RTD input Alarm 2 ALM2 4-wire system 3-wire system NO: Normally open For the 2-channel type, always connect sensors to CH1 and CH2.
  • Page 17 3. WIRING Rear terminals Output terminals (CH2) Analog output (Option) Output terminals (CH1) Analog output Use only for 2-channel type. (Option) Analog output (Option) Number of output points: 1 point (1-channel type) 2 points (2-channel type) Output types: Voltage output: 0 to 5 V DC, 1 to 5 V DC Current input: 0 to 20 mA DC, 4 to 20 mA DC Allowable load resistance: Voltage output: 1 k...

  • Page 18: Wiring Example

    3. WIRING 3.3 Wiring Example 1-channel type Power supply (Load) Fast-blow fuse Rear terminals Power supply Alarmer FAIL output Dry contact RTD input input Controlled (3-wire system) object (Control RUN/STOP) Load Power feed Analog output (CH1) input Recorder RS-485 (2-wire system) Power feed transformer RS-232C/ RS-232C...

  • Page 19: Name Of Parts

    4. NAME OF PARTS (12) ALM1 FAIL ALM2 MODE MONI (11) (10) (1) Measured value (PV) display unit [Green] Displays measured value (PV). Displays various each parameter symbol set value depending on the instrument. (2) Set value (SV) display unit [Orange] For the 2-channel type, measured value (PV) is displayed.
  • Page 20 4. NAME OF PARTS (4) Bar-graph display unit Manipulated output value (MV) display: When manipulated output value (MV) becomes 0 % or less, the dot at the left end of the bar-graph only flashes and when it exceeds 100 %, that at the right end flashes. [Example of display] Deviation display: The dots at both ends of bar-graph light to indicate deviation display.
  • Page 21 4. NAME OF PARTS (11) MODE (Mode key) Used to call up "Mode transfer." Used to select "PID/Autotuning transfer," "Control RUN/STOP," "AUTO/MANUAL" or "Set data lock." (12) Channel (CH) display unit Displays the channel Number being used. For the 2-channel type and CH1PV/CH2PV display, nothing is displayed. IM9000F01-E4...

  • Page 22: Setting

    5. SETTING 5.1 Calling-Up Procedure of Monitor and Each Mode Power ON Input type and input range display (Display for approx. 4 sec) Display changes automatically Monitor Mode transfer MODE CH1PV/CH2PV PID/AT transfer display Control RUN/STOP PV/SV display transfer MV display MONI AUTO/MANUAL transfer...
  • Page 23 5. SETTING Input type/input range display This instrument immediately confirms input type and range following power-ON. Power-ON (1) Input type display a: Input display parameter symbol (Inp) b: Engineering unit ( C) c: Input type: : Pt100 (3-wire system) : JPt100 (3-wire system) Display changes : Pt100...

  • Page 24: Monitor

    5. SETTING 5.2 Monitor The monitor unit monitors the measured value (PV) and set value (SV), and also monitors and changes the manipulated output value (MV). The display in the monitor unit is selected by pressing the MONI key. (1) Display sequence CH1PV/CH2PV display The PV display unit shows measured value (PV) in CH1, while the SV display unit shows...
  • Page 25 5. SETTING (2) Procedure for setting the manipulated output value (MV) in MAN mode Manipulated output value (MV) in the manual (MAN) mode can be manually set in the PV/SV display. The manipulated output value (MV) is changed after "MANUAL" is selected by "AUTO/MANUAL transfer"...

  • Page 26: Mode Transfer

    5. SETTING 5.3 Mode Transfer "Mode transfer" is used to change PID/AT, control RUN/STOP or AUTO/MANUAL or to set the set data lock. Display in the mode transfer is changed by the MODE key. If the 2-channel type, select the mode or data lock for every channel. [However, with the exception of control RUN/STOP by contact input (DI) ] Select CH2 and then select the desired mode.
  • Page 27 5. SETTING To B Set data lock function Selected when either the set data lock function is invalidated (unlock) or validated (lock). (The figure at left shows the unlock.) For details on set data lock, See "5.6 Setup Mode" (P. 30). MODE : Dim lighting : Bright lighting...
  • Page 28 5. SETTING 2. Press the MODE key to display "Control RUN/STOP transfer." The display selected is brightly lit. MODE MONI Control RUN/STOP transfer 3. Press the DOWN key to change the instrument from RUN to STOP. For mode transfer, mode transfer becomes valid at this time.
  • Page 29 5. SETTING (3) Control RUN/STOP transfer by contact input The control RUN/STOP can be transferred according to the open/close status of the contact input (DI). The control RUN/STOP transfer status by contact input is shown in the following. The contact state during control RUN/STOP transfer Front key Communication Status of contact...

  • Page 30: Sv Setting Mode

    5. SETTING 5.4 SV Setting Mode The SV setting mode is used to set the temperature set value (SV) which is the target value for control. Setting change procedure If the set data is locked, no SV setting mode is displayed. [Example] When the set value (SV) is change to 20.000 C 1.
  • Page 31 5. SETTING 3. Press the UP key to set "2." Pressing the UP key increments numeric value, and pressing the DOWN key decrements the value. MODE MONI 4. Pressing the SET key registers the value thus set. (The present screen is changed to the PV/SV display.) MODE MONI...

  • Page 32: Operator Set Mode

    5. SETTING 5.5 Operator Set Mode The operator set mode is used to set various parameters for alarm set values and control. The display within operator set mode is changed by pressing the SET key. If the 2-channel type, parameter can be set for every channel. Select CH2 and then select the desired mode.
  • Page 33 5. SETTING Continued from the previous page. #1: Factory set value Symbol Name Setting range Description Control 0: Slow Response required due to set- response 1: Medium point change in PID action is (rPT) parameter 2: Fast performed. (3) Procedure for setting each parameter For this instrument, the numeric value is not registered if it is only change by the UP/DOWN keys.
  • Page 34 5. SETTING 3. Press the SHIFT key to brightly light the units digit. MODE MONI 4. Press the DOWN key to enter "0" in the units digit. MODE MONI 5. Press the SHIFT key to move the brightly lit digit up to the most significant digit. MODE MONI IM9000F01-E4...
  • Page 35 5. SETTING 6. Press the UP key to enter "5" in the significant digit. MODE MONI 7. After the displayed value is changed, press the SET key. (The present display changes to the proportional band display.) MODE MONI Proportional band For the 1-channel type, if the key is not operated for more than 1 minute, the present display automatically returns to the PV/SV display.

  • Page 36: Setup Mode

    5. SETTING 5.6 Setup Mode The setup mode is used to set some specific specifications (input type, input range, alarm type, etc.) and characteristics (setting limiter, alarm differential gap, etc.) of this instrument. (1) Display sequence Operator set mode Press the SET key for more 5 sec. From Output limiter Alarm...
  • Page 37 5. SETTING To PG10 From PG50 Bar-graph Input Setting limiter Control section section section section PG17 PG20 PG21 PG22 From PG15 To PG23 ar-graph Setting Input type Output display limiter selection cycle time (high limit) selection (Inp) (CY) (SLH) (dE) Setting Decimal point Direct/...
  • Page 38 5. SETTING To PG10 Alarm Communication Set data lock data section 2 section section section PG23 PG24 PG40 PG50 From PG22 Set data Alarm 1 type Device lock level selection address version selection (AS1) (Add) (VEr) (LCK) Alarm 1 Mode lock Communi- Operating energize/de-...
  • Page 39 5. SETTING (2) Description of each parameter If the 2-channel type, parameter can be set for every channel. Select CH2 and then select the desired mode. PV correction section [PG10] #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG10.
  • Page 40 5. SETTING AT section [PG13] #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG13. (PG13) AT bias Adds bias to set value (SV) 0.000 19.999 to +19.999 C when autotuning (AT) is (ATb) performed.
  • Page 41 5. SETTING Analog output section [PG15] #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG15. (PG15) Analog output 0: Measured value (PV) Sets analog output type. specification 1: Deviation (DEV) (Ao) selection * 2: Set value (SV) 4: Manipulated output value...
  • Page 42 5. SETTING Input section [PG20] The setting of parameter group 20 (PG20) can be changed only in the control stop state. #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG20. (PG20) Input type Can change measured 0: Pt100...
  • Page 43 5. SETTING Control section [PG22] The setting of parameter group 22 (PG22) can be changed only in the control stop state. #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG22. (PG22) Output 0.1 to 100.0 sec Sets control output cycle.
  • Page 44 5. SETTING Alarm section 2 [PG23] The setting of parameter group 23 (PG23) can be changed only in the control stop state. #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG23. (PG23) Alarm 1 type Selects alarm 1 action.
  • Page 45 5. SETTING Continued from the previous page. Alarm section 2 [PG23] #1: Factory set value Symbol Name Setting range Description Alarm 2 type See Table 1 (Alarm types) Selects alarm 2 action. selection (AS2) Alarm 2 0: Energize alarm Selects whether alarm 2 is set energize/ 1: De-energize alarm to energized alarm or de-...
  • Page 46 0 to 250 ms Sets interval time to match Interval time timing during data send and (InT) receive. 0: RKC standard Selects communication Protocol selection communication protocol. (CMPS) 1: Ladder communication If the 2-channel type, set independent device addresses to CH1 and CH2.
  • Page 47 5. SETTING Set data lock section [PG40] #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG40. (PG40) Set data See Table 1 (Set data lock Set level which enables set lock level level) data lock.
  • Page 48 5. SETTING Data section [PG50] #1: Factory set value Symbol Name Setting range Description Parameter The first characters of group parameter group PG50. (PG50) ROM version The SV display unit shows the ROM number. (VEr) Operating time 0 to 99999 time Display the totalized operation time of this (UT)
  • Page 49 5. SETTING (3) Procedure for setting each parameter For this instrument, the numeric value is not registered if it is only change by the SET key. If the set data is lock, all of the digits on the SV display unit are brightly lit and the set value cannot be changed.
  • Page 50 5. SETTING 3. Press the SET key to set the instrument to the "Setting limiter (high limit)." MODE MONI Setting limiter (high limit) 4. Press the SHIFT key to move the brightly lit digit up to the most significant digit. Every time the SHIFT key is pressed, each brightly lit digit moves as follows.

  • Page 51: Procedure For Selecting Ch2 (For 2-Channel Type)

    5. SETTING 6. Press the SET key to change to the next parameter. Thus, the set value is registered. MODE MONI Setting limiter (low limit) The same setting procedure applies when other parameters are also set. For the instrument of 2-channel type, press the CH key to select CH2, then make the setting. The setting procedure is the same as the CH1 parameter setting.

  • Page 52: Operations

    6. OPERATIONS CAUTION Connect the input signal wiring, and then turn ON the power. Otherwise, this controller judges that the input line breaks to be set to the FAIL state. Action at input break: Up-scale Action at input short circuit: Downscale Even when only one channel is used for the 2-channel input type of controller, connect sensors to both channels.
  • Page 53 6. OPERATIONS (3) Cautions at operation stop (STOP) In the monitoring status, the measured value (PV) display unit shows measured value (PV). Also the set value (SV) display unit, " (SToP)". (4) Requirements for autotuning (AT) Autotuning (AT) is the function of automatically measuring, computing and setting the optimum PID constants.

  • Page 54: Display At Abnormality

    7. DISPLAY AT ABNORMALITY For input abnormality Display Details Action (output) Measures Input abnormality The controller takes WARNING Measured value Measured value (PV) alarm action which is (PV) exceeds the setting selecting of parameter In order to prevent electric limiter (high limit) or group 23 (PG23).
  • Page 55 Note 1: FAIL output: The relay contact is closed under normal operation. Note 2: The REX-F9000 takes any alarm action selected in the parameter group "23" (PG23). * Any one of other errors (Error 1) is an error item which informs the operator that an error occurs in a different channel.

  • Page 56: Replacing The Rubber Packing

    In order to prevent injury or instrument failure, do not touch the internal printed circuit board. If the waterproof and dustproof rubber packing deteriorates, please contact RKC sales office or the agent. Parts code...
  • Page 57 8. REPLACING THE RUBBER PACKING 2. Replace the old rubber packing with a new one, then put the internal chassis in the case. New rubber packing Insertion direction R-side Plane Central longittidinal direction Firmly push the rubber packing in the board until it also contacts the lever.

  • Page 58: Function Description

    9. FUNCTION DESCRIPTION 9.1 PV Bias The value set in the PV bias is added to the actual input value to correct the input value. The PV bias is used to correct the individual variations in the sensors or when there is difference between the measured value (PV) of other instruments.

  • Page 59: At Bias

    9. FUNCTION DESCRIPTION 9.4 AT Bias The AT bias is set when the autotuning function in which the measured value (PV) does not exceed the set value (SV) is activated. Our autotuning method performs ON/OFF control centering around the set value (SV), then calculates and sets each of the PID constants by hunting the measured value (PV). However, overshooting caused by this hunting may not be preferable depending on the controlled object.

  • Page 60: Alarms (Alm)

    9. FUNCTION DESCRIPTION 9.6 Alarms (ALM) Alarm (ALM) function sets up the alarm status when the measured value (PV) or the deviation reaches the alarm set values. In the alarm status, the alarm output is output from the digital output terminals, and the alarms are used to drive the equipment danger signals or the safety equipment.
  • Page 61 9. FUNCTION DESCRIPTION Deviation high/low alarm The alarm lamp lights if the deviation absolute value Measured value (PV) Set value (SV) is less than or greater than the alarm set value to produce the alarm status. Measured value (PV) Measured value (PV) Alarm set value Deviation...
  • Page 62 9. FUNCTION DESCRIPTION (2) Process alarm This alarm function if measured value (PV) reaches the alarm set value. Process high alarm Process low alarm Measured value (PV) Measured value (PV) Measured value (PV) Measured value (PV) Alarm set value Alarm set value Time Time...
  • Page 63 9. FUNCTION DESCRIPTION High/Low alarm (deviation/process) Measured value (PV) Measured value (PV) Alarm set value Differential gap Set value (SV) Differential gap Alarm set value Time Alarm status Band alarm Measured value (PV) Measured value (PV) Differential gap Alarm set value Set value (SV) Alarm...
  • Page 64 9. FUNCTION DESCRIPTION (4) Alarm hold action Hold action is an action which makes the alarm function invalid even if measured value (PV) is in the alarm status at the time of power-ON, transferring operation mode from STOP to execution (RUN) or changing the set value (SV).
  • Page 65 9. FUNCTION DESCRIPTION (5) Alarm timer This is the function of setting the timer to the non-alarm status as far as it is within the alarm timer set time and to the alarm status if it exceeds the alarm timer set time after measured value (PV) or the deviation exceeds the alarm set value.

  • Page 66: Bar-Graph Display

    9. FUNCTION DESCRIPTION 9.7 Bar-Graph Display This is a function of displaying manipulated output value (MV), or deviation on 20-dot LEDs. (1) Manipulated output value (MV) display Manipulated output value (MV) is displayed in a span of from 0 to 100 %. One dot is 5 % fixed. Example: For 40 % manipulated output value (MV) When manipulated output value (MV) becomes 0 % or less, the dot at the left end of the bar- graph only flashes and when it exceeds 100 %, all dots on the bar-graph light and only the...

  • Page 67: Power Feed Forward Function

    The power feed forward function is used to stabilize the control point by monitoring the load voltage by the power feed transformer. If the power feed input voltage becomes less than approx. 30 % of the rated value, control automatically stops. REX-F9000 Power feed input Control...

  • Page 68: Specifications

    10. SPECIFICATIONS Input Input type: RTD input Pt100 (JIS/IEC), JPt100 (JIS) Corresponding to the 3- and 4-wire systems Number of input points: 1 point or 2 points Input range: 0.000 to 50.000 C Action at input break: Up-scale Action at input short circuit: Downscale Display Function Measured value (PV) display unit: 5 digit, 7-segment LED (Green)
  • Page 69 10. SPECIFICATIONS Alarm Function Number of alarm point: 2 points, each Alarm type: Deviation high alarm * Deviation low alarm * Deviation high/low alarm * Band alarm * Process high alarm * Process low alarm * Set value high alarm Set value low alarm * Hold action can be added.
  • Page 70 RKC standard communication: Vertical parity check (With parity bit selected) Horizontal parity check (BCC check) Maximum connection: RKC standard communication: 32 sets including a host computer. Ladder communication: 32 sets including a PLC Communication code: RKC standard communication: ASCII 7-bit code...
  • Page 71 10. SPECIFICATION Analog Output Function (Option) Number of output point: 1 point (1-channel type) 2 points (2-channel type) Output signal: Voltage output: 0 to 5 V DC, 1 to 5 V DC Current output: 0 to 20 mA DC, 4 to 20 mA DC Specify when ordering Allowable load resistance: Voltage output: 1 k or more Current output: 600...
  • Page 72 MEMO IM9000F01-E4...
  • Page 73 The first edition: APR.1999 The fourth edition: JUN.2002 [IMQ00]...
  • Page 74 RKC INSTRUMENT INC. HEADQUARTERS: 16-6, KUGAHARA 5-CHOME, OHTA-KU TOKYO 146-8515 JAPAN PHONE: 03-3751-9799 (+81 3 3751 9799) E-mail: info@rkcinst.co.jp FAX: 03-3751-8585 (+81 3 3751 8585) IM9000F01-E4 JUN.2002...

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