Brooks PreciseFlex 2300 Manual

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PreciseFlex 2300/2400 Robot

Hardware Introduction and Reference Manual

Part Number PP20-DI-00010 Revision A

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Page 1 PreciseFlex 2300/2400 Robot Hardware Introduction and Reference Manual Part Number PP20-DI-00010 Revision A...
Page 2 © 2023 Brooks Automation. All rights reserved. The information included in this manual is proprietary information of Brooks Automation, and is provided for the use of Brooks customers only and cannot be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
Page 3 Europe support_preciseflex@brooksautomation.com +81 120-255-390 (Toll Free) Japan +81 45-330-9005 (Local) http://www.brooks.com/ China +86 21-5131-7066 +886 080-003-5556 (Toll Free) Taiwan +886 3-5525258 (Local) Korea 1800-5116 (Toll Free) +65 1-800-4-276657 (Toll Free) Singapore +65 6309 0701 (Local) Copyright © 2023 Brooks Automation, Inc.
Page 4: Revision History
Revision History Revision ECO Number Date Explanation of Changes Rev 5.0.0 April 9, 2022 The first Brooks version of the manual. Updated manual to follow standard Rev 5.0.1 December 3, 2022 Brooks technical publication styles. Copyright © 2023 Brooks Automation, Inc.
Page 5: Table Of Contents
Releasing a Trapped Operator: Brake Release Switch Mechanical Limit Stops E-Stop Stopping Time and Distance Safety Zones Safety Standards Reference Material Standards Compliance and Agency Certifications Moving Machine Safety 3. Installation Information Environmental Specifications Facilities Connections System Dimensions Copyright © 2023 Brooks Automation, Inc.
Page 6 Replacing and Adjusting the Z Motor and Z-Axis Bearings Appendices Appendix A: Product Specifications PreciseFlex 2300/2400 Specifications PreciseFlex 2300/2400 Environmental Specifications Appendix B: Frequently Asked Questions Appendix C: Spare Parts List Appendix D: System Schematics Copyright © 2023 Brooks Automation, Inc.
Page 7: Safety
1. Safety Safety Setup Brooks uses caution, warning, and danger labels to convey critical information required for the safe and proper operation of the hardware and software. Read and comply with all labels to prevent personal injury and damage to the equipment.
Page 8: Explanation Of Hazards And Alerts
Notice indicates a situation or unsafe practice which, if not avoided, may result in equipment damage. The Notice signal word is white on blue background with no icon. Copyright © 2023 Brooks Automation, Inc.
Page 9: Alert Example
Alerts Alert Example The following is an example of a Warning hazard alert. Number Description How to Avoid the Hazard Source of Hazard and Severity General Alert Icon Signal Word Type of Hazard Hazard Symbol(s) Copyright © 2023 Brooks Automation, Inc.
Page 10: General Safety Considerations
Using parts with different inertial properties with the same robot application can cause the robot’s performance to decrease and potentially cause unplanned robot motion that could result in serious personal injury. Do not use unauthorized parts. Confirm that the correct robot application is being used. Copyright © 2023 Brooks Automation, Inc.
Page 11 Use of this product in a manner or for purposes other than for what it is intended may cause equipment damage or personal injury. Only use the product for its intended application. Do not modify this product beyond its original design. Always operate this product with the covers in place. Copyright © 2023 Brooks Automation, Inc.
Page 12: Mechanical Hazards
Do not operate the product without its protective covers in place. While the collaborative robotics system is designed to be safe around personnel, gravity and other factors may present hazards and should be considered. Copyright © 2023 Brooks Automation, Inc.
Page 13: Electrical Hazards
Improper electrical connection or connection to an improper electrical supply can result in electrical burns resulting in equipment damage, serious injury, or death. Always provide the robot with the proper power supply connectors and ground that are compliant with appropriate electrical codes. Copyright © 2023 Brooks Automation, Inc.
Page 14: Ergonomic Hazards
This product has a high center of gravity which may cause the product to tip over and cause serious injury. Always properly restrain the product when moving it. Never operate the robot unless it is rigidly mounted. Copyright © 2023 Brooks Automation, Inc.
Page 15 Part Number: PP20-DI-00010 Rev. A Ergonomic Hazards Trip Hazard Cables for power and communication and facilities create trip hazards which may cause serious injury. Always route the cables where they are not in the way of traffic. Copyright © 2023 Brooks Automation, Inc.
Page 16: Emergency Stop Circuit (E-Stop)
Do not override or bypass the emergency stop circuit. Recycling and Hazardous Materials Brooks Automation complies with the EU Directive 2002/96/EU Waste Electrical and Electronic Equipment (WEEE). The end user must responsibly dispose the product and its components when disposal is required.
Page 17: Introduction To The Hardware
X-Axis Facilities Panel System Description The PreciseFlex Robot Series includes the PreciseFlex 2300, a three-axis XYZ Cartesian robot, and the PreciseFlex 2400, a four-axis XYZTheta Cartesian Robot. Both robots include an embedded Guidance 3400 four-axis motion controller, a PrecisePower 300 Intelligent Motor Power Supply and a 24VDC power supply located inside the X-axis of the robot.
Page 18: System Diagram And Coordinate Systems
This includes the Guidance 3400 controller, the PrecisePower Intelligent Motor Power Supply and the 24 VDC logic power supply. The Guidance controller not only controls the robot but also provides extensive hardware interfaces including Ethernet and digital and analog IO. Copyright © 2023 Brooks Automation, Inc.
Page 19: System Components
PreciseFlex 2300/2400 Robots The PreciseFlex 2300 Robot (pictured below) is a 3-axis robot composed of an X-axis, with a stroke ranging from a minimum of 500 mm to a maximum of 1 M, a Y-axis with a stroke ranging from a...
Page 20 The PreciseFlex 2400 Robot (pictured below) is a 4-axis robot that is constructed by adding an optional Theta axis to the PreciseFlex 2300 Robot and a 4th motor driver to the robot's controller. The theta axis has a range-of-travel of +/- 270 degrees. The theta axis is utilized in applications where the Z angle of parts is not fixed and objects must be re-oriented as they are being handled.
Page 21: Mounting Plates And Risers
The Theta Axis has a 20 mm through hole (pictured below) that allows a camera mounted above on the Z-axis to view the tool tip. Alternately, cables can be routed through the hole in the cover and the axis to tooling and instrumentation attached to the Theta Axis. Copyright © 2023 Brooks Automation, Inc.
Page 22: Guidance 3400 Controller
In addition, the motor power supply provides 320 VDC volts and takes about two minutes to bleed down after power is disconnected. Disconnect AC power to the robot before removing the rear cover. Copyright © 2023 Brooks Automation, Inc.
Page 23: Low-Voltage Power Supply
The Guidance 3400 requires 0.7 amps of 24 VDC power for its logic circuits and 2 amps for IO power, for a total of 2.7 amps. For applications using remote IO or Ethernet cameras, Brooks recommends a total of 4 amps. This power is obtained from a 24 VDC power supply included with the robot.
Page 24: Intelligent Motor Power Supplies
In addition, the power supplies provide 160 VDC or 320 VDC volts and take about two minutes to bleed down after power is disconnected Disconnect AC power to the robot before accessing these units. Copyright © 2023 Brooks Automation, Inc.
Page 25: Remote Front Panel, E-Stop Box And Manual Control Pendant
NOTE: To enable motor power without an E-Stop Box, Hardware Manual Control Pendant or remote front panel, the jumper plug supplied with the system (pictured below) must be installed in the 25-pin Remote Front Panel connector. Copyright © 2023 Brooks Automation, Inc.
Page 26: Remote Io Module
The RIO contains unshielded 24 VDC signals and pins. Mount this product in a cabinet or machine chassis that is not accessible when power is turned on.. Copyright © 2023 Brooks Automation, Inc.
Page 27: Machine Vision Software And Cameras
This option is typically factory installed, but can be installed in the field if necessary. Controller Status LED The system includes a yellow Status LED that is mounted on the top of the Z-axis carriage cover. This LED blinks to indicate the execution state of the controller. Copyright © 2023 Brooks Automation, Inc.
Page 28: Machine Safety
Motor Power Supply delivers between 160 VDC and 320 VDC to the controller depending upon the Power Supply type and the input AC voltage. The motors will operate correctly throughout this range of DC voltages. Copyright © 2023 Brooks Automation, Inc.
Page 29: Robot Back Cover
Robot Back Cover In the PreciseFlex robots, the Guidance 3400 and its power supplies are mounted in the X extrusion under a cover that should be in place whenever power is applied to the robot. Copyright © 2023 Brooks Automation, Inc.
Page 30: Releasing A Trapped Operator: Brake Release Switch
However, in order to move the Z-axis, the operator can release the Z-axis brake by pressing the brake release switch, shown in the previous System Diagram and Coordinate Systems section, as long as power to the robot’s controller is enabled. Copyright © 2023 Brooks Automation, Inc.
Page 31: Mechanical Limit Stops
Setup > Parameter Database > Controller > Operating Mode and set parameter DataID 267 to the desired delay. If this delay is set to 0, the motor power relay will be disabled within 1ms after an input signal is asserted. Copyright © 2023 Brooks Automation, Inc.
Page 32: Safety Zones
“uncertified zones” and the “speed restrict zones” are referred to as “certified zones”. The supported zone shapes are rectangular volumes, cylinders and spheres. To define a safety zone, the type of safety zone must be specified along with its origin and dimensions. Copyright © 2023 Brooks Automation, Inc.
Page 33 Brooks Automation 2. Introduction to the Hardware Part Number: PP20-DI-00010 Rev. A Machine Safety Figure 2-1: Rectangular Volume Figure 2-2: Cylinder Figure 2-3: Sphere Copyright © 2023 Brooks Automation, Inc.
Page 34 For both of these tests, in order to satisfy the computational redundancy requirement of the Category 3 safety regulations, the shapes of these safety zones are limited to non-rotated rectangular volumes. Copyright © 2023 Brooks Automation, Inc.
Page 35 Non-rotated rectangular volume, XY speed restrict zone Table 2-2 describes the safety zone DataIDs. When any of these DataIDs are modified, the controller must be rebooted for the change to be put in effect. Copyright © 2023 Brooks Automation, Inc.
Page 36 Z/XY spd mm/sec it should be a negative value and defaults to -200. The second value is the maximum permitted speed in the horizontal XY plane (when within the safety zone), and defaults to 200 mm/sec. Copyright © 2023 Brooks Automation, Inc.
Page 37: Safety Standards Reference Material
PreciseFlex is a light-duty robot that can only apply approximately 120 Newton's of force, it is very important for operators to keep their hands, arms and especially their head out of the robot’s operating volume. Copyright © 2023 Brooks Automation, Inc.
Page 38 ANSI/RIA R15.06 Safety Standard for Industrial Robots or EN ISO 10218-2-2007, Robots for Industrial Environments, Safety Requirements, for information on recommended safe operating practices and enclosure design for robots of various sizes and payloads. Copyright © 2023 Brooks Automation, Inc.
Page 39: Installation Information
The right (Facilities) end cap of the X-Axis extrusion includes the following: System AC input power receptacle Lighted AC on/off power switch Two 4mm OD pneumatic tubing fittings (one-touch type tube insertion) Connectors for controller input and output signals Copyright © 2023 Brooks Automation, Inc.
Page 40: System Dimensions
3. Installation Information PreciseFlex 2300/2400 Robot System Dimensions Part Number: PP20-DI-00010 Rev. A System Dimensions Both top and right views are shown below. All dimensions are in millimeters. Copyright © 2023 Brooks Automation, Inc.
Page 41: Mounting Instructions
It is recommended that there be a mounting support at least every 300mm under the robot. The locations of the mounting holes on the X extrusion for a 800mm stroke robot are shown below. Copyright © 2023 Brooks Automation, Inc.
Page 42 M5 screws up to 140mm long (available from Misumi) can be run directly thru the M5 holes into M5 tapped holes on the mounting surface. The M5 holes in the extrusion may need to be drilled out to M5.2 or so for screw clearance. Copyright © 2023 Brooks Automation, Inc.
Page 43: Tool Mounting - Pp2300
Tool Mounting - PP2300 The PreciseFlex 2300 Z-Axis has been designed to permit tooling to be easily attached. The face of the Z-Axis has two vertical slots that can be used to mount an optional Theta Axis, syringe operators, grippers, cameras, or other user items.
Page 44: Tool Mounting - Pp2400
Tool Mounting - PP2400 The PreciseFlex 2400 Robot is constructed by adding a Theta axis to the PreciseFlex 2300 Robot and a fourth motor driver to the robot's controller. Tooling for the PreciseFlex 2400 Robot must be mounted to the standard tooling flange for the Theta unit that is pictured below.
Page 45 The Theta unit is mounted to the Z-Axis of the PreciseFlex 2400 using the T-slots in the face of the Z-axis as shown below. If required, the Theta unit can be vertically repositioned on the Z-axis, although this will change the Z-height of any taught locations. Copyright © 2023 Brooks Automation, Inc.
Page 46: Accessing The Controller And Power Supplies
180 to 264 VAC, 50 or 60 Hz. The robots are equipped with an IEC electrical socket that accepts country specific electrical cords. Power requirements vary with the robot duty cycle, but do not exceed 500 watts RMS. Copyright © 2023 Brooks Automation, Inc.
Page 47: Emergency Stop
Remote Front Panel connector. Alternately, users can purchase a Precise Manual Control Pendant. The Pendant has an integrated E-Stop button and provides a convenient means for manually jogging the robot via a portable hand-held device. Copyright © 2023 Brooks Automation, Inc.
Page 48: Hardware Reference
On/Off Switch. To simplify interfacing, most of the electrical interfaces provided by the robot's embedded Guidance Controller are available on the Facilities Panel. These include: Digital input signals Digital output signals Copyright © 2023 Brooks Automation, Inc.
Page 49: Digital Input Signals
The Facilities Panel includes 12 general purpose optically isolated digital input signals (in addition to those signals that are available at the Z-Axis IO Board). These lines are accessed in a single DB15 connector. Copyright © 2023 Brooks Automation, Inc.
Page 51 Digital Input 4 10006 Digital Input 6 10008 Digital Input 8 10010 Digital Input 10 10012 Digital Input 12 10001 Digital Input 1 10003 Digital Input 3 10005 Digital Input 5 10007 Digital Input 7 Copyright © 2023 Brooks Automation, Inc.
Page 52: Digital Output Signals
Alternately, the output signals can be configured as "sourcing", i.e. the external equipment must pull-down an output pin to ground and the controller pulls this pin to 24 VDC when the signal is asserted as true. This configuration is compatible with "sinking" (NPN) devices. Copyright © 2023 Brooks Automation, Inc.
Page 53 Always disconnect the main AC power before removing the back cover of the X- axis. The pin out for the Digital Output Connector and the corresponding GPL signal numbers are described in See "Digital Output Signals" on page Pin Out Table Copyright © 2023 Brooks Automation, Inc.
Page 54: Ethernet Interface
I/O units and Ethernet cameras. The Ethernet switch automatically detects the sense of each connection, so either straight-thru or cross-over cables can be used to connect the controller to any other Ethernet device. Copyright © 2023 Brooks Automation, Inc.
Page 55: Remote Front Panel / Mcp / E-Stop Interface
"on" button with a high power "on" indicator lamp, and a RS- 232 interface for a Manual Control Pendant (MCP). These signals are provided in a DB25 female connector mounted on the robot's Facilities Panel. Copyright © 2023 Brooks Automation, Inc.
Page 56 X-Axis Facilities Panel Part Number: PP20-DI-00010 Rev. A In the future, Brooks will offer a Remote Front Panel option that plugs into this connector. Alternatively, customers can develop their own custom front panels (please see the section on "Safety Circuits For Remote Front Panel" in the Guidance 3000/2000 Controllers, Hardware Introduction and Reference Manual for a suggested design).
Page 57 5 VDC. WARNING - This voltage is provided as a convenience but is limited in the current that can be supplied. Drawing excessive current can damage the controller. Consult Brooks if there is any question about the use of this voltage.
Page 58: Rs-232 Serial Interface
RXD - Receive data Not used Not used CTS - Clear to send for hardware flow control RTS - Request to send for hardware flow control Not used Interface Panel Connector Part No DB9 Female Connector Copyright © 2023 Brooks Automation, Inc.
Page 59: And Y Axes
To remove the cover for either the X-axis or Y-axis to gain access to the motor carriage, perform the following steps: Step Action Slide the carriage to one end of its travel. Copyright © 2023 Brooks Automation, Inc.
Page 60 Contact with electrical power can cause serious personal injury or death. All of the motors for the PreciseFlex robot are operated at 320 VDC. As such, the motor wires present a high-risk. Disconnect the main AC power to the robot before touching unshielded pins and conductors. Copyright © 2023 Brooks Automation, Inc.
Page 61: Z-Axis And Z-Axis Io Pcb
320 VDC is positioned near the ZIO2. As such, accessing this board represents a high-risk Disconnect the main AC power to the robot before accessing this board. Copyright © 2023 Brooks Automation, Inc.
Page 62 The Theta encoder internal harness Harness/Motor connector should be plugged into the "To Harness" board connector. If a Theta axis is present, its encoder should be plugged into the "To Motor" connector. Copyright © 2023 Brooks Automation, Inc.
Page 63 ZIO2 pulls this pin to 24 VDC when the signal is asserted as true. Each output signal can supply a maximum of 100mA. For convenience, ground pins are supplied on the digital output signal connector. These outputs are compatible with "sinking" (NPN) devices. Copyright © 2023 Brooks Automation, Inc.
Page 64 10040 Digital Input 8 9 to 16 24 VDC Amp 746285-3 or Molex 22-55-2161 or Molex 90142-0016. For the Molex plugs, use User Plug Part No Molex pins 16-02-0103 and Molex crimp tool 63811-1000. Copyright © 2023 Brooks Automation, Inc.
Page 65 PVC, 3319/16 or Amphenol Spectra-Flex high flex life flat cable 843-191- 2811-016. There are two four-pin connectors that provide power for an Ethernet camera and camera ring light if the Arm Mounted Camera Kit is installed. Copyright © 2023 Brooks Automation, Inc.
Page 66 AMP 1-794610-2 sockets for wiring to the plug. If the yellow Outer Link status LED is configured as normally shipped from the factory, the following See "" on page 60 describes how to interpret each light pattern. Copyright © 2023 Brooks Automation, Inc.
Page 67: Arm Mounted Camera Kit
A short Ethernet cable and coupler to interface the camera to the Ethernet plug available under the ZIO cover Mounting hardware The camera mounting bracket and the ring light with mounting bracket are pictured below. Copyright © 2023 Brooks Automation, Inc.
Page 68 The camera bracket is attached to the T-slots on the face of the Z-axis and extended outboard of the Z-axis. The ring light and its bracket are attached to the T-slots under the camera bracket. Copyright © 2023 Brooks Automation, Inc.
Page 69 This configuration is used for high-precision alignment of small parts where both the part and key features required for its alignment must be viewed by the camera in the same image at the same Copyright © 2023 Brooks Automation, Inc.
Page 70 Theta axis, and often some special lighting must be implemented. The normal field of view is very small due to the Theta axis hole size and the typical desire for very high accuracy. Copyright © 2023 Brooks Automation, Inc.
Page 71: Software Reference
Z I/O board output 2 Z I/O board output 3 Z I/O board output 4 Z I/O board output 5 Z I/O board output 6 Z I/O board output 7 Z I/O board output 8 Copyright © 2023 Brooks Automation, Inc.
Page 72: Z-Axis Dedicated Digital Outputs
Z-axis status light. Set to 1 to turn on the light. Normally parameter “Power 8040 State DOUT” (DataID 235) is set to this signal number so that the Z-axis LED displays the robot controller's execution state. Copyright © 2023 Brooks Automation, Inc.
Page 73: Service Procedures
“Clunking” when Remove carriage. Check motor suspension plate mounting screws. Screws should be tight reversing enough to allow motor spring tension to work, but not loose. If loose, apply Loctite and re- direction tighten. Copyright © 2023 Brooks Automation, Inc.
Page 74: Setting The Encoder Zero Positions
X and Y axes is detected by the controller. The final location of each axis will define the physical position that will correspond to their lower hard stop positions. Copyright © 2023 Brooks Automation, Inc.
Page 75: Replacing The Absolute Encoder Battery
If this battery voltage drops to a certain threshold, the system generates a warning message on the console stating “Low battery voltage”. At this point the battery should be replaced within one or two weeks. Copyright © 2023 Brooks Automation, Inc.
Page 76: Y Linear Scale Cleaning And Replacement
X-axis, the PreciseFlex label should be readable when standing behind the robot by the controller and, in the case of the Y-axis, when standing on the side facing the Z-axis. In both cases, the vinyl spline should be pressing against the side with the stainless steel band. Copyright © 2023 Brooks Automation, Inc.
Page 77: Removing The X-Axis Carriage
In order to change the motor or bearings on the X carriage, it is necessary to remove the X carriage. This can be done without removing the Z-axis and Y carriage from the Y-axis. Prior to performing this procedure, get four 15 mm bearing ball retainer blocks from Brooks customer service.
Page 78 Pick up the entire Y, Z and Theta axis assembly and lay it down in front of the X-axis with the end of the Y-axis close to the left end of the X-axis. This will allow the harness to lay flat as it comes out of the end of the X-axis. Copyright © 2023 Brooks Automation, Inc.
Page 79: Installing And Adjusting The X-Axis Carriage
To engage the traction drive, the motor tension adjusting screw should be tightened until the friction wheel touches the drive surface and the spring starts to compress, and then turned 5 more full turns Copyright © 2023 Brooks Automation, Inc.
Page 80: Removing And Installing The Y-Axis Carriage
Remove the tape seals from the tension bars. Remove the Y end cap opposite the X-axis. Remove the harness from the Y carriage in a manner similar to the X carriage. Copyright © 2023 Brooks Automation, Inc.
Page 81: Replacing The X And Y Motors
The linear encoder read head connector plugs into the pins closest to the surface of the PCB. Pin 1 for both 5-pin connectors (denoted by small arrows on the connectors) is plugged into the pins closest to the encoder end of the motor. Copyright © 2023 Brooks Automation, Inc.
Page 82: Replacing The X And Y Axis Bearings
Step Action Remove the X carriage. (See the section on Removing the X-Carriage for details.) Remove the linear bearings. Remove the bearing blocks from the carriage. Copyright © 2023 Brooks Automation, Inc.
Page 83: Replacing And Adjusting The Z Motor And Z-Axis Bearings
PreciseFlex robot are operated at 320 VDC. As such, the motor wires present a high-risk. Do not touch unshielded pins and conductors unless the main AC power to the robot is first disconnected. Copyright © 2023 Brooks Automation, Inc.
Page 84 If the Z belt or Z bearing needs to be replaced, these screws must be removed. Then the upper Z end cap must be removed. At this point the Z bearing block and Z linear rail may be removed and replaced. Copyright © 2023 Brooks Automation, Inc.
Page 85: Appendices
Z Force Continuous downwards Z force - 80N PreciseFlex 2300: 5 kg for Y lengths <= 400 mm, 4 kg for Y > 400 Payload PreciseFlex 2400: 3.5 kg for Y lengths <= 400 mm, 2.5 kg for Y >...
Page 86 Programming Interface Programming Language (standalone), PC controlled over Ethernet using TCP/IP. General Required Power Input range: 90 to 264 VAC single phase, 50-60 Hz, 500-watts maximum. Weight 30 kg typical, will vary with size Copyright © 2023 Brooks Automation, Inc.
Page 87: Preciseflex 2300/2400 Environmental Specifications
Range & Features Ambient temperature 5ºC to 40ºC Ingress protection IP51. Protected against light dust and water drips. Storage and shipment temperature -25ºC to +55ºC Humidity range 5 to 90%, non-condensing Altitude Up to 3000m Copyright © 2023 Brooks Automation, Inc.
Page 88: Appendix B: Frequently Asked Questions
Appendix B: Frequently Asked Questions Part Number: PP20-DI-00010 Rev. A Appendix B: Frequently Asked Questions This section contains a compilation of frequently asked questions related to PreciseFlex 2300/2400 robots. Robot Hardware How do you operate the robot when plugged into a GFI circuit?
Page 89 The system software that is already loaded into the controller will operate either the PreciseFlex 2300 or 2400 robot. To change the robot type, provide new configuration information in the form of the "Configuration and Parameter Database Disk Files,"...
Page 90: Appendix C: Spare Parts List
Encoder Battery with Pigtails (size C cell) PF10-EA-00002 Fuse, PrecisePower 500 W Motor Power Supply Wickman PN 1811630000 Fuse, PrecisePower 300 W Motor Power Supply Wickman PN 1941630000 Z-axis T nuts, M4 Misumi PN HNTTBS5-4 Mounting Plate PP11-MC-M0006 Copyright © 2023 Brooks Automation, Inc.
Page 91: Appendix D: System Schematics
Brooks Automation Appendices Appendix D: System Schem- Part Number: PP20-DI-00010 Rev. A atics Appendix D: System Schematics Copyright © 2023 Brooks Automation, Inc.

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