User Manuals: Hitachi S-4800 Electron Microscope

Manuals and User Guides for Hitachi S-4800 Electron Microscope. We have 3 Hitachi S-4800 Electron Microscope manuals available for free PDF download: Instruction Manual, Quick Start Manual

Hitachi S-4800 Instruction Manual (296 pages)

FIELD EMISSION SCANNING ELECTRON MICROSCOPE

Brand: Hitachi | Category: Microscope | Size: 10 MB

Foreword
4
Scope of Instruction Manual
5
Guarantee
6
Installation and After-Sales Service
8
Caution on Disposal of Instrument
8
Available Training Programs
9
Handling of Chemicals
9
Safety Summary
10
General Safety Guideline
10
Electrical Hazard
12
High Temperature Hazard
13
Other Relevant Precautions
21
Emergency off Button
24
Main Power Disconnect
25
Power Supply and Grounding Connection
25
Interlock
26
Precautions on Handling
34
General Precautions
36
Measures for Emergency
36
Cautions on Operation
37
Specification
41
Installation Conditions
44
Table of Contents
47
Installation
53
Installation Requirements
53
General
53
Room Temperature and Humidity
53
Line Power Requirement
54
Grounding
54
Water Supply and Drain
54
Stray Magnetic Field
55
Floor Vibration
56
Disturbance by Sound Waves
59
Site Requirements
59
Materials or Instruments to be Prepared by User
61
Wiring
61
Power and Ground Wirings
62
Functions
64
Control Knobs and Switches on Main Unit
65
Main Unit (Column)
65
START STOP Switch
72
Control Knobs and Switches on Display Unit
76
Display
76
Graphical User Interface (GUI)
79
Starting the PC and Logging in the S-4800 Program
79
S-4800 SEM Main Window
81
Control Arrangement on the Window
82
Menu
82
Control Panel
82
Operation Panel
82
Mouse Operation on the Scanning Image
83
Control Panel
89
Auto Control
91
Monitoring Function
92
Operation Panel
96
UTILITY Tab
96
Setup Dialog Window
107
Captured Image Window
114
SEM Data Manager Window
115
Alignment Dialog Window
115
CD Measurement Dialog Window (Option)
116
Comm Port Setting Dialog Window
116
Login Setting Dialog Window
116
Oblique Dialog Window
117
Password Setting Dialog Window
117
Save Image Dialog Window
118
Opt Signal Processing Dialog Window
118
Split/Dual Mag Controller
118
Using Short-Cut Keys
119
Operation
120
Preliminary Operation
122
Check of Column Vacuum
122
Flow the Cooling Water
123
Starting the Display
124
Use of Anti-Contamination Trap
125
Specimen Setting and Specimen Exchange
126
Cautions on Specimen Preparation
126
Specimen Preparation for Materials
126
Adjustment of Specimen Height
127
Specimen Exchange Position
127
How to Set Specimen
128
Application of High Voltage
131
Condition Where the Gun High Voltage Is Applicable
131
Flashing
131
Setting of Accelerating Voltage and Emission Current
132
Application of High Voltage
133
Optimizing the Electron Beam
134
Selecting a Magnification Mode
134
Selecting Electron Optical Column Condition
134
Column Alignment Operation
139
Operation for Image Observation
143
SE Detector
143
Selecting Magnification
147
Selecting Scanning Speed
148
Image Brightness and Contrast Adjustment
150
Focus and Astigmatism Correction
153
Operation of the Specimen Stage (Type I - Manual Stage)
156
Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage)
160
Saving and Recording Images
190
Preparing Images for Recording
191
Setting Conditions for Image Capturing
192
Image Capturing
193
Saving a Scanning Image (Direct Save)
194
Saving Captured Images
195
Taking Photographs (Option)
195
Taking Photographs
195
Using SEM Data Manager
198
SEM Data Manager
198
At the End of Daily Use
199
Turning High Voltage off
199
Setting the Stage at the Specimen Exchange Position
199
Taking out a Specimen
199
Closing Windows and Shutting the Display Power
201
Using Other Functions
202
Screen Mode
202
Split Screen and Dual Mag Mode
204
Signal Selection and Color Mixing
205
X-Ray Analysis Mode
207
Signal Processing
209
Operating Condition Memory
211
Pseudo Color Display
213
Data Entry Function
213
Raster Rotation, Dynamic Focus and Tilt Compensation
216
Printing Images Using Report Generation Function
218
Copy Image
220
Copy Image Information Text
220
Oblique Image
221
Optional Setting
222
Password Setting
224
Setting Login Name
224
Image Quality
226
Accelerating Voltage and Image Quality
226
Condenser Lens Setting and Image Quality
227
Objective Lens Aperture Size and Image Quality
227
Mechanical Column Alignment
228
Preparative Operation for Alignment
228
Mechanical Alignment of the Electron Gun
229
Alignment of the Beam Monitor Aperture
229
Alignment of the Objective Lens Aperture
230
Mechanical Alignment of the First Condenser Lens
230
Mechanical Alignment of the Second Condenser Lens
230
Stigma Alignment (Electro-Magnetic Alignment)
231
Aperture Alignment (Electro-Magnetic Alignment)
231
Using SEM Data Manager
233
Precaution about SEM Data Manager
233
Functions
234
Operation
238
Maintenance
254
Maintenance of Electron Optical Column
254
Maintaining Vacuum of Electron Gun and Intermediate Chamber
254
Replacement and Cleaning of Objective Lens Aperture
254
Cleaning of Aperture Plates
256
Maintenance of Rotary Pump
258
Oil Change
258
Replacement of Oil Mist Trap
259
Troubleshooting
260
Maintenance of Air Compressor
261
Checkup and Maintenance
261
Troubleshooting of Air Compressor
263
Location and Functions of Major Components
264
Troubleshooting
265
When Column Evacuation Does Not Work
265
When Specimen Exchange Chamber Vacuum Is Not Good
265
When Specimen Chamber Vacuum Is Not Good
266
When Ion Pump Vacuum Degraded
266
When Emission Current Is Not Set at Normal Value
267
When Image Is Not Shown on Screen
267
When Image Is very Noisy
268
When You Cannot Correct Astigmatism
269
When Auto Focus or Auto Stigma Does Not Work Satisfactorily
269
When S-4800 Control Program Does Not Start up
270
When PC Has Hanged up
270
When Error Messages Are Shown
271
Operation for Shutting down All Power Supply of S-4800
271
Operation When Power was Shut down by Power Line Failure
271
Operation for Starting S-4800
272
Operation When Power Line Failure Recovered
273
Operation When Water Supply Stopped by Failure
273
Gun Baking Operation
274
Caution on Maintenance
278
Replacement Parts
279
Consumables and Spare Parts
279
Consumables
279
Replacement Parts
280
Spare Parts
281
Accessory Operation
282
Model S-5080 Auto-Camera (Option)
282
Configuration
282
Specifications
284
Assembling the Camera
286
Operation
287

Hitachi S-4800 Instruction Manual (20 pages)

FIELD EMISSION SCANNING ELECTRON MICROSCOPE

Brand: Hitachi | Category: Microscope | Size: 0 MB

Hitachi S-4800 Quick Start Manual (2 pages)

Brand: Hitachi | Category: Microscope | Size: 0 MB

Beam Alignment Procedure
1
Align Beam
1
Align Aperture
1
Align Stigma Align.X and Stigma Align.y
1
Adjust Focus
2
Correct Lens Astigmatism
2

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