Shimadzu TMP-V3304LM Instruction Manual
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Shimadzu TMP-V3304LM Instruction Manual

Shimadzu TMP-V3304LM Instruction Manual

Turbo molecular pump
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263-43069
I
TURBO MOLECULAR PUMP
Model : TMP-V3304LM/LMC (F)
Model : TMP-V2804LM/LMC (F)
Instruction Manual
(Original Instructions)
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division

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Summary of Contents for Shimadzu TMP-V3304LM

  • Page 1 263-43069 TURBO MOLECULAR PUMP Model : TMP-V3304LM/LMC (F) Model : TMP-V2804LM/LMC (F) Instruction Manual (Original Instructions) Read the instruction manual thoroughly before you use the product. Keep this instruction manual for future reference. Semiconductor Equipment Division...

  • Page 2: Copyrights And Disclaimers

    Every effort has been made to prepare an accurate and complete manual, but if an error or omission should be discovered, revisions might not be possible immediately. Shimadzu does not take responsibility for any effects that may result from the use of this manual.

  • Page 3: Precautions For Safe Operation

    WARNING Turbo molecular pump repair and/or power supply repair can be very hazardous. Only trained technicians who are authorized by Shimadzu may do service of products. WARNING Neither overhaul nor modify the pump proper and power supply unit without admission.
  • Page 4 Improper turbo molecular pump use may be hazardous to operator's health in applications not recommended or approved by Shimadzu. In the event removal of the turbo molecular pump from an application is required, full protective measures including purging of the turbo molecular pump with an inert gas and/or apparel are recommended when the turbo molecular pump has been used in applications that required the use of corrosive, reactive, stimulative, or toxic gases.
  • Page 5 　 CAUTION Avoid to install the pump at the following places. (1) Place where the pump is inevitably exposed to significant vibration and impact. (2) Unstable place. (3) Place where the pump is inevitably exposed to magnetic field and radioactive ray. The pump proper is a precision machine.

  • Page 6: Operating Precautions

    CAUTION The following "CAUTIONS" are to prevent operation anomalies. ○ Operating Precautions (1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo molecular pump is in operation. (2) Protect the pump from any and all types of impact during operation. Impacts can also be transmitted via the flange, so be careful of impacts near the pump as well.

  • Page 7: Explanation Of Label

    (6) SECURITY seal This label certificates that the product was made or maintenanced by Shimadzu or by Shimadzu authorized facility. In case "this label is removed" or "there is a mark showing once this label has been removed", Shimadzu warranty shall not be...

  • Page 8: Location Of Label

    ○ Location of label TURBO MOLECULAR PUMP Instruction Manual...

  • Page 9: Warranty Period

    　 ○ Warranty period 12 months on new TMP's from the date of shipment from Shimadzu, or from any of its worldwide sales offices. ○ Conditional warranty During the warranty period and under normal operation, if the TMP fails to meet its product specification due to defects in material and/or workmanship, Shimadzu will, at its discretion, either repair it or exchange it with a new one for free.

  • Page 10: Limitation Of Liability

    EXPRESSED OR IMPLIED (EITHER IN FACT OR BY OPERATION OF LAW), STATUTORY OR OTHERWISE : AND, EXCEPT AS STATED HEREIN, SHIMADZU SHALL HAVE NO LIABILITY FOR SPECIAL OR CONSEQUENTIAL DAMAGES OF ANY KIND OR FROM ANY CAUSE ARISING OUT OF THE SALE, INSTALLATION, OR USE OF ANY OF ITS PRODUCTS.
  • Page 11 　 This page is intentionally left blank. 263-43069...

  • Page 12: Table Of Contents

    Exterior ..........3 1.2.1.1 TMP-V3304LM/LMC (F) Outside drawing ... . . 3 1.2.1.2 TMP-V2804LM/LMC (F) Outside drawing .

  • Page 13: Table Of Contents

    Instruction and Lifting Method..... . 25 5.1.2.2 Installation of TMP-V3304LM/LMC (F) ....26 5.1.2.3 Installation of TMP-V2804LM/LMC (F) .
  • Page 14 Table of contents 6.3 Start-up ......... 40 6.3.1 Start-up Sequence in LOCAL Mode .
  • Page 15 Table of contents Section 8 TURBO MOLECULAR PUMP RECONDITION 8.1 Recommended maintenance intervals ....60 8.2 Turbo Molecular Pump Decontamination ....61 8.3 Touch-Down Bearing Replacement .

  • Page 16: Section 1 Outline And Descriptions

    OUTLINE AND DESCRIPTIONS 1.1　Outline 1.2　Descriptions 1.2.1　Exterior 1.2.1.1　TMP-V3304LM/LMC (F) Outside drawing 1.2.1.2　TMP-V2804LM/LMC (F) Outside drawing 1.2.2　Power Cable 1.2.3　Standard Accessories...

  • Page 17: Outline

    SECTION 1　OUTLINE AND DESCRIPTIONS Outline The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a backing vacuum pump to create a high vacuum in a vacuum chamber. Typical Applications ;　　　 Semiconductor equipments, Industrial equipments, R&D applications, The other ultra high vacuum applications.

  • Page 18: Descriptions

    1.2　Descriptions Descriptions 1.2.1 Exterior 1.2.1.1 TMP-V3304LM/LMC (F) Outside drawing Inlet flange φE n-φd φD 12-φ13 VG300 φ400 φ370 18.5 12-φ13 VG350 φ450 φ420 24.5 12-φ13 ISO320B φ425 φ395 22.5 Fig. 1-1　TMP-V3304LM/LMC (F) Outside drawing TURBO MOLECULAR PUMP Instruction Manual...

  • Page 19: Tmp-V2804Lm/Lmc (F) Outside Drawing

    SECTION 1　OUTLINE AND DESCRIPTIONS 1.2.1.2 TMP-V2804LM/LMC (F) Outside drawing Fig. 1-2　TMP-V2804LM/LMC (F) (VG250) Outside drawing 263-43069...

  • Page 20: Power Cable

    4 262-76773-20 AC cable, 1003MD20 200 20 MT ・Connector ・Clamp 5 263-41042 AC connector set ・Core ・Assembling procedure 1.2.3 Standard Accessories TMP-V3304LM/LMC (F) Description Note Part number VG300 : O-ring gasket 036-13529-86 Gasket (inlet flange) VG350 : O-ring gasket 036-13529-97 (Note) ISO320B : Not included ―...
  • Page 21 1.2　Descriptions This page is intentionally left blank. 263-43069...

  • Page 22: Section 2 Identification And Function

    IDENTIFICATION AND FUNCTION 2.1　Pump Main Unit 2.2　Control Panel 2.3　External I/F Panel...

  • Page 23: Pump Main Unit

    SECTION 2　IDENTIFICATION AND FUNCTION Pump Main Unit Fig. 2-1　Pump Main Unit (1) INLET FLANGE ....Inlet flange, joint the turbo molecular pump, VG300, VG350, ISO320B, VG250. (2) PORT FOR GAS PURGE.

  • Page 24: Control Panel

    2.2　Control Panel Control Panel Fig. 2-2　Outline view of control panel (1) AC INPUT connecter ... Power cable receptacle Refer to Section 5.2 "Connection of Power Cable". (2) POWER Switch....Power switch (3) START/STOP button .

  • Page 25: External I/F Panel

    SECTION 2　IDENTIFICATION AND FUNCTION External I/F Panel Fig. 2-3　I/F Panel (1) REMOTE connector ... . Connector for Remote-control Refer to Section 6.7 "Remote-Control Connector". (2) SERIAL connector ... . . Connector for RS-232C or RS-485 communication Refer to Section 6.8 "Communication Specifications".
  • Page 26 CONSTRUCTION AND PRINCIPLE 3.1　Pump Construction 3.2　Principle of Turbo Molecular Pumping 3.3　Control system...

  • Page 27: Pump Construction

    SECTION 3　CONSTRUCTION AND PRINCIPLE Pump Construction Fig. 3-1 is a sectional drawing of a magnetic bearing type turbo molecular pump. The built-in high frequency motor (1) is accelerated to the specified revolutions (speed) by the high frequency power supply unit. Rotor blades (4) are fitted onto the drive shaft (3) and the stator blades (5) are arranged in between the rotor blades.
  • Page 28 3.2　Principle of Turbo Molecular Pumping Fig. 3-1　Pump Sectional Drawing (1) High frequency motor (6) Spacer (11) Inlet flange (2) Receptacle (7) Radial magnetic bearing (12) Outlet flange (3) Drive shaft (8) Axial magnetic bearing (13) Protective net (4) Rotor blade (9) Touch-down bearing (14) Cooling water pipeline (5) Stator blade...
  • Page 29 SECTION 3　CONSTRUCTION AND PRINCIPLE The movement of an object has 6 degrees of freedom. Levitation can be achieved in a turbo molecular pump by controlling the following 5 degrees of freedom (excluding the rotational degree (Z axis) of freedom). rotational axis Parallel movement Radial displacement Axial displacement...

  • Page 30: Control System

    3.3　Control system Control system This product has a controller comprising a magnetic bearing control system that levitates the rotors in a specific position inside the turbo molecular pump, a high frequency power supply system that rotates the rotor at a specific speed, and a pump temperature control system. The magnetic bearing control system levitates the rotor at a given position by using a gap sensor inside the pump to detect the rotor position and controlling the electromagnet current.
  • Page 31 SECTION 3　CONSTRUCTION AND PRINCIPLE This page is intentionally left blank. 263-43069...

  • Page 32: Specifications

    SPECIFICATIONS 4.1　Standard Specifications for Pump Unit 4.2　The maximum allowable flow rate 4.3　Standards Fulfilled...

  • Page 33: Standard Specifications For Pump Unit

    SECTION 4　SPECIFICATIONS Standard Specifications for Pump Unit Turbo molecular pump model TMP-V3304LM/LMC (F) TMP-V2804LM/LMC (F) (Note 1) Battery Not Necessary Inlet flange VG300 / VG350 / ISO320B VG250 Outlet flange KF40 Cooling Method Water Cooled Mass 94 kg Ultimate pressure (after baking)
  • Page 34 4.1　Standard Specifications for Pump Unit If power interruption is 1 second or less, pre-interruption Instantaneous Power Interruption functions are maintained. If interruption exceeds 1 second, the (Note 7) brake is activated, which allows the pump to be restarted after resetting. This valve is closed during power supply OFF, and the coolant water is stopped.

  • Page 35: The Maximum Allowable Flow Rate

    TMP-V2804LMC (F) 2750 mL/min (Note 1) Consult your Shimadzu representative before using gasses except shown in above table. (Note 2) mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.) (Note 3) The maximum allowable flow rate depends on the gas type, the Assuming the parts connected to the molecular pump inlet and the gas purge flow rate.

  • Page 36: Installation

    INSTALLATION 5.1　Installation 5.1.1　Pump Mounting Direction 5.1.2　Installation of the Pump 5.1.2.1　Instruction and Lifting Method 5.1.2.2　Installation of TMP-V3304LM/LMC (F) 5.1.2.3　Installation of TMP-V2804LM/LMC (F) 5.1.3　Example of piping connection 5.1.3.1　Connection of exhaust line 5.1.3.2　Connection of Cooling Water Line 5.2　Connection of Power Cable 5.3　Preparation for operation 5.4　Interlock for Vacuum System...

  • Page 37: Pump Mounting Direction

    SECTION 5　INSTALLATION Installation 5.1.1 Pump Mounting Direction This turbo molecular pump can be installed in vertical, horizontal, inverted, or oblique position. The control connector of the turbo molecular pump should face horizontally or vertically when the turbo molecular pump is mounted in the horizontally and obliquely. When the outlet flange is installed in a non-appropriate position, reliability of operation may deteriorate.

  • Page 38: Installation Of The Pump

    5.1　Installation 5.1.2 Installation of the Pump WARNING Do not operate the turbo molecular pump until safety is confirmed. ・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown torque should be generated when abnormality occurs in the pump by any chance. Incidental accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by insufficient method.
  • Page 39 SECTION 5　INSTALLATION CAUTION The center of gravity of the pump is indicated in Fig. 5-3. Be sure that the pump does not move or fall down during installation or storage. CAUTION This pump is a heavy equipment. Lift this pump by two or more people or by using the lifter or the crane, during installation. Need two or more eyebolts as described in Fig.

  • Page 40: Instruction And Lifting Method

    5.1　Installation 5.1.2.1 Instruction and Lifting Method This product lift the pump in the manner shown in Fig. 5-2. Vacuum Vacuum chamber chamber PUMP PUMP Fig. 5-2　Lifting Method Table 5-1　Eyebolt size Number of Position Eyebolt size Remark eyebolts Vertical Not bundled items Headstand Not bundled items The center of gravity of the pump is shown in Fig.

  • Page 41: Installation Of Tmp-V3304Lm/Lmc (F)

    67400 N•m TMP-V3304LM/LMC (F) (Note) Rapid shutdown torque is the typical value measured by the Shimadzu’s test condition. The torque to transmit to host equipment might be different according to the rigidity of host equipment. Host equipment should be designed to have enough margins in strength.
  • Page 42 5.1　Installation Fig. 5-5　How to use of the bolt Table 5-2　The recommended fixing bolt Bolt-Nut (Half screw) Fixing method Only by the inlet flange Inlet flange VG300 VG350 ISO320B Bolt Size, Quantity M12, 12 PC Material Stainless steel Grade A2-70 (JIS B 1054 / ISO-3506) Washer Special washer (Note) and spring lock washer Bolt-Nut (All screw)・Tap...

  • Page 43: Installation Of Tmp-V2804Lm/Lmc (F)

    67400 N•m TMP-V2804LM/LMC (F) (Note) Rapid shutdown torque is the typical value measured by the Shimadzu’s test condition. The torque to transmit to host equipment might be different according to the rigidity of host equipment. Host equipment should be designed to have enough margins in strength.
  • Page 44 5.1　Installation Fig. 5-8　How to use of the bolt Table 5-4　The recommended fixing bolt Bolt-Nut (Half screw) Fixing method Only by the inlet flange Inlet flange VG250 Bolt Size, Quantity M12, 12 PC Material Stainless steel Grade A2-70 (JIS B 1054 / ISO-3506) Washer Special washer (Note) and spring lock washer Bolt-Nut (All screw)・Tap...

  • Page 45: Example Of Piping Connection

    SECTION 5　INSTALLATION 5.1.3 Example of piping connection 5.1.3.1 Connection of exhaust line Connect a backing vacuum pump or its related pipe connection flange to the outlet flange of the pump. (Refer to Fig. 5-10) ＊ marks are not attached to this turbo molecular pump set. Fig.

  • Page 46: Pipe Joint

    5.1　Installation 5.1.3.2 Connection of Cooling Water Line (1) Supply the coolant water to coolant water IN connection of the solenoid valve for the coolant water as shown in Fig. 5-11, and drain the cooling water pipe from coolant water OUT connection. (2) Connect cooling water pipes to these pumps.

  • Page 47: Connection Of Power Cable

    SECTION 5　INSTALLATION Connection of Power Cable CAUTION The power input voltage of this product is 200 to 240 VAC ± 10 %. Connect Connection of the control system to the incorrect input voltage can cause damage to the equipment. Supply the power via a circuit breaker (rating 15 A).

  • Page 48: Preparation For Operation

    5.3　Preparation for operation Preparation for operation (1) This product is a water cooled model. Always provide a flow of coolant water that meets the indicated specifications. (Note 1) (2) Make sure no water is leaking from the coolant lines. Do not spill coolant on the pump. (3) Confirm the cable from water valve is surely connected to VALVE connector of External I/F panel.

  • Page 49: Interlock For Vacuum System

    (an air suspension truck, for example). Especially when passing by rough road, we recommend that the product is transported keeping the packing condition when it ships from Shimadzu. When the product is put on the high temperature / humidity environment for a long time, it causes the breakdown of the product due to corrosion of mechanical parts or performance loss of electrical parts.

  • Page 50: Operation

    OPERATION 6.1　Overview 6.1.1　Introduction : Operation Modes 6.2　Startup Preparation 6.2.1　Start-up Preparation Sequence in LOCAL Mode 6.2.2　Start-up Preparation Sequence in REMOTE-control connector 6.2.3　Start-up Preparation Sequence in other communication means 6.3　Start-up 6.3.1　Start-up Sequence in LOCAL Mode 6.3.2　Start-up Sequence in REMOTE-control connector 6.3.3　Start-up Sequence in other communication means 6.4　Shutting Down 　6.4.1　Preparations Prior to Shutting Down Operation 　6.4.2　Shutting Down Sequence in LOCAL Mode...

  • Page 51: Overview

    SECTION 6　OPERATION Overview CAUTION Do not turn off the power during pump operation. If the power is turned off repeatedly, the touch-down bearing may need to be replaced. When the power is turned off during operation, levitation is maintained using regenerative power. After decelerating to a lower speed, levitation is stopped and the rotor is supported by the touch-down bearing.
  • Page 52 6.1　Overview Table 6-1　LOCAL and REMOTE Modes mode lamp state Start/Stop procedure LOCAL POWER lamp flashes. The pump can be started or stopped by holding down the START/STOP button. REMOTE POWER lamp lights up. The pump can be started or stopped via a remote RS-232C control connector, serial connector (RS-232C, RS- RS-485...

  • Page 53: Startup Preparation

    SECTION 6　OPERATION Startup Preparation NOTICE When turning the POWER switch ON or OFF, a "clunk" sound may be heard from inside the pump. This sound is from the rotor inside the pump being levitated or de-levitated. This is normal. When the power is switched ON, the unit starts up in the REMOTE mode. It also starts up in the REMOTE mode when restoring power after a power interruption.

  • Page 54: Start-Up Preparation Sequence In Other Communication Means

    6.2　Startup Preparation 6.2.3 Start-up Preparation Sequence in other communication means (1) Feed the cooling water into the cooling line. (2) Turn on the POWER switch and check that the POWER lamp. Under this condition, the rotor of the turbo molecular pump is levitated by the magnetic bearing. (3) Online command is demanded from the communication means and confirm the mode was switched to the communication means mode.

  • Page 55: Start-Up

    SECTION 6　OPERATION Start-up 6.3.1 Start-up Sequence in LOCAL Mode (1) Start-up begins when the 6.2.1 "Start-up Preparation Sequence in LOCAL Mode" is complete. (2) Maintained push the START/STOP button (Fig. 2-2 (3)). (3) Pump acceleration starts. The ROTATION lamp (Fig. 2-2 (6)) lights and the STATUS (Fig.

  • Page 56: Shutting Down

    6.4　Shutting Down Shutting Down CAUTION After having operated the turbo molecular pump for evacuation of corrosive gas, keep the pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by stopping the pump and dispersal of parts.

  • Page 57: Shutting Down Sequence In Remote-Control Connector

    SECTION 6　OPERATION 6.4.3 Shutting Down Sequence in REMOTE-control connector (1) Input the "STOP" signal (Refer to Table 6-4) from the remote-control connector. If stop from "NORMAL" status, "NORMAL" signal is OFF. In addition, and check that the "BRAKE" signal (Refer to Table 6-4) is ON in this product of a standard spec. (2) Wait until the "ROTATION"...

  • Page 58: Variable Speed Operation

    6.5　Variable Speed Operation Variable Speed Operation CAUTION When using the variable speed function to change the pump rotation rate, use a rotation rate that does not cause resonance with other devices installed at the site. NOTICE The variable rotation speed function is only available by remote control. Rotation speed cannot be varied by local control.

  • Page 59: Operation From Start-Up To Low Speed Rotation

    SECTION 6　OPERATION 6.5.2 Operation from Start-up to Low Speed Rotation This is the procedure until low-speed rotation is achieved when the speed setting is made with the pump stopped. 6.5.2.1 REMOTE Operation (1) Start-up begins when the 6.2.2 "Start-up Preparation Sequence in REMOTE-control connector"...

  • Page 60: Operation From Rated Speed Rotation To Low Speed Rotation

    6.5　Variable Speed Operation 6.5.3 Operation From Rated Speed Rotation to Low Speed Rotation The following procedure is used to change the rotation speed setting and operate in the low- speed mode when currently operating at the rated speed or accelerating at a speed greater than low speed rotation.

  • Page 61: Operation From Low Speed Rotation To Rated Speed Rotation

    SECTION 6　OPERATION 6.5.4 Operation from Low Speed Rotation to Rated Speed Rotation This is the procedure to select normal speed operation during low speed rotation. 6.5.4.1 REMOTE Operation (1) Cancel the "LOW SPEED" signal (Refer to Table 6-4) inputted in the remote-control connector.

  • Page 62: Software Operation

    6.6　Software Operation Software Operation NOTICE Settings data can be loaded and overwritten via serial interface. Settings data cannot be loaded or overwritten via remote control. Software functions are indicated in Table 6-2 below. Table 6-2　Software Operating Functions Function Descripition Status Operation mode LOCAL, REMOTE or the other communication means...
  • Page 63 SECTION 6　OPERATION (Note 1) List of run status. STATUS Descripition NORMAL Rotating at rated rotation speed ACCELERATION Accelerating BRAKE Decelerating STOP Stopped E-STOP Alarm is active (stopped) E-BRAKE Alarm is active (decelerating) E-IDLE Alarm is active (coasting motor is off) 263-43069...

  • Page 64: Remote-Control Connector

    6.7　Remote-Control Connector Remote-Control Connector 6.7.1 Specification This turbo molecular pump is provided with remote-control connector for connection with INSIDE OF POWER UNIT remote operation, ALARM signals, etc. (Refer to Fig. 6-2, Fig. 6-3, and Table 6-3) +12V For connection with this connector, cable 1.2k with shield is necessary.

  • Page 65: Pin Assignment

    SECTION 6　OPERATION 6.7.2 Pin Assignment Table 6-4　Remote-Control Signals Electric Name Operation spec Starting operation on GND and short-circuiting START (Note 1) Stopping operation on GND and circuit opening STOP (Note 1) Contact RESET (Note 4) Resetting operation on GND and short-circuiting Input Variable speed operation on GND and short- LOW SPEED...

  • Page 66: Connector

    RS-XXX hardware interlock. (Note 1) When set to EI-03, behavior of remote-control signals is the same as SHIMADZU Turbo Molecular Pump power supply "EI-xx03M" series. (Note 2) When set to SEMI E74, behavior of remote-control signals conform to SEMI E74 standard "Specification for vacuum Pump Interface-Turbo Molecular Pumps".

  • Page 67: Communication Specifications

    SECTION 6　OPERATION Communication Specifications 6.8.1 RS-232C 6.8.1.1 Transfer Specifications Interface RS-232C Synchronous system Asynchronous Transmission rate 9600 bps (fixed) Start bit : 1 Character Data bits : 8 configuration Parity : None Stop bit : 1 Flow control None 6.8.1.2 Connector Specifications Connector SERIAL Connector (shared with RS-485) Connector type...

  • Page 68: Transfer Specifications

    6.8　Communication Specifications a. Cable wiring connections for 9-pin connector cables. Fig. 6-5　Example of RS-232C cable wiring connections 6.8.2 RS-485 6.8.2.1 Transfer Specifications Interface RS-485 (2-wired, half duplex) Synchronous system Asynchronous Transmission rate 9600 bps (fixed) Start bit : 1 Character Data bits : 8 configuration Parity : None...

  • Page 69: Cable

    SECTION 6　OPERATION 6.8.2.3 CABLE (1) Cable Connection T u r b o M o l e c u l a r P u m p N o . 1 COMPUTER A(+) 120Ω B(-) T u r b o M o l e c u l a r P u m p N o .

  • Page 70: Connector

    6.8　Communication Specifications (4) Cable Length Connection cables can be extended up to 1.2 kilometers, but may be subjects to errors depending on actual operational environment. 6.8.3 Connector Fig. 6-7　Serial Connector Pin Configuration (Figure where connector of panel was viewed from the front) NOTICE Serial interface protocol are compliant RS-232C / RS-485.
  • Page 71 SECTION 6　OPERATION This page is intentionally left blank. 263-43069...
  • Page 72 GAS PURGE...
  • Page 73 SECTION 7　GAS PURGE This product includes a port for purging gases in optional specification (Fig. 2-1 (2)). Though not necessary for normal evacuation, use it to inject purging gas to increase maximum allowable flow rate. A purge gas flow rate 30 mL/min is appropriate. Fig.
  • Page 74 TURBO MOLECULAR PUMP RECONDITION 8.1　Recommended maintenance intervals 8.2　Turbo Molecular Pump Decontamination 8.3　Touch-Down Bearing Replacement 8.4　Check of the rotor blades 8.5　Power Supply Unit Parts Replacement 8.6　Turbo Molecular Pump Return Request...

  • Page 75: Recommended Maintenance Intervals

    SECTION 8　TURBO MOLECULAR PUMP RECONDITION Recommended maintenance intervals It is different for deterioration progress speed of each part changes greatly by pump condition. Refer to the following list as overhaul of each process. These are not terms of warranty. Recommended Process maintenance intervals Non-active gas (Sputtering, Evaporation and so...

  • Page 76: Turbo Molecular Pump Decontamination

    Repeated and/or frequent rotor touch down will cause wear and bigger rotational resistance and require replacement of touch down bearings. The replacement of the touch-down bearing is done only by Shimadzu or an approved service company. Check of the rotor blades Rotor blades of turbo molecular pump are high-speed rotor made of aluminum alloy.

  • Page 77: Power Supply Unit Parts Replacement

    To obtain ensure the pump and power supply unit operate safely and perform as designed, have parts that exceed their expected service life be replaced by a Shimadzu service representative or an Shimadzu authorized service provider. Table 8-1　Estimated Service Life for Parts...

  • Page 78: Turbo Molecular Pump Return Request

    Shimadzu will accept and perform service only on turbo molecular pumps that have been properly prepared as stated in (1) and (2) above. Shimadzu will advice the customer of any failure precaution/prevention procedures that are appropriate to each individual turbo molecular pump service request.
  • Page 79 SECTION 8　TURBO MOLECULAR PUMP RECONDITION CAUTION This pump is a heavy equipment. Lift this pump by two or more people or by using the lifter or the crane, during installation. Need two or more eyebolts as described in Fig. 8-1 when lifting this pump on vertical position. Need four eyebolts as described in Fig.

  • Page 80: Section 9 Troubleshooting

    TROUBLESHOOTING 9.1　Vacuum Pressure Rise 9.2　Abnormal Noise and/or Vibration 9.3　Nothing Happens After an Operation is Made 9.4　Power Failures 　9.4.1　Power Failure Counter-Operation 9.5　Alarm Detection Capabilities 　9.5.1　Movement in Alarm Detection Capabilities (ALARM) 　9.5.2　Movement in Alarm Detection Capabilities (WARNING) 　9.5.3　Reset Procedure...

  • Page 81: Vacuum Pressure Rise

    SECTION 9　TROUBLESHOOTING Vacuum Pressure Rise A rapid rise of vacuum pressure in the turbo molecular pump causes the internal motor of the turbo molecular pump to start braking and the STATUS orange lamp lights. Do not suddenly increase the pressure or let atmospheric air enter the pump during pump operation.

  • Page 82: Nothing Happens After An Operation Is Made

    9.3　Nothing Happens After an Operation is Made Nothing Happens After an Operation is Made Table 9-1　Nothing Happens After an Operation is Made PROBLEM POSSIBLE CAUSES CORRECTIVE ACTION Section Power ON/OFF switch in Electrical power cable Properly connect the electrical power the ON position but the not properly connected.

  • Page 83: Power Failures

    Rotational Speed Before Support Period of Time Before Support Pump Model by Touchdown Bearing by Touchdown Bearing (Note 1) TMP-V3304LM/LMC (F) 7500 rpm 9 minutes or less TMP-V2804LM/LMC (F) (Note 1) Times are typical for regenerative braking from the rated speed.

  • Page 84: Power Failure Counter-Operation

    9.4　Power Failures 9.4.1 Power Failure Counter-Operation Table 9-3 shows the counter-operations against power interruption which occurred while the pump rotor is normally rotating. Table 9-3　Counter-Operations Against Power Supply Failure Interruption time 1 second or less (Note 1) Over 1 second (Note 1) Interrupt/re-supply During interruption After re-supply...
  • Page 85 SECTION 9　TROUBLESHOOTING (Note 1) The time can be changed to 2 seconds from 1 second via communication operation. Refer to separate manual for serial communication. (Note 2) For restarting after the power re-supply (restoration), push the RESET button. (Note 3) The pin numbers are shown in Fig. 6-4 "Arrangement of Remote-Control Connector Pins". (Note 4) Actions can be changed via communication operations.

  • Page 86: Alarm Detection Capabilities

    9.5　Alarm Detection Capabilities Alarm Detection Capabilities NOTICE Alarm history data can be loaded using the serial interface, but not using the remote control signal. The fault detection functions shown in Table 9-6 "Table of Alarms" and Table 9-7 "Table of Warnings"...
  • Page 87 TD COUNTER LIMIT The number of high The touch-down bearing may have PF COUNTER LIMIT speed or power failure deteriorated. Consult Shimadzu or an touch-downs has approved service company regarding exceeded the prescribed replacement of the touch-down number. bearing.
  • Page 88 9.5　Alarm Detection Capabilities Alarm Sec- Alarm Name Possible Cause Remedy Code tion EI:DEW ERROR Internal condensation Check that the ambient temperature and humidity around the pump and the temperature of cooling water are within the specified range. Check there are no solids piled up in the water valve.
  • Page 89 SECTION 9　TROUBLESHOOTING Table 9-5　 If the STATUS orange Lamp Flashes Alarm Sec- Alarm Name Possible Cause Remedy Code tion TMP:VALVE WARN Cable of water valve is Confirm the cable from water valve is no connected correctly. surely connectied to VALVE connector of External I/F panel.
  • Page 90 9.5　Alarm Detection Capabilities Table 9-6　Table of Alarms Alarm Alarm Name Possible Cause Protective Action Code Counts of the high speed touch-down counter Start-up impossible TD COUNTER LIMIT exceeded the specified number. (detected during power supply self-diagnostics) Counts of the power failure touchdown counter PF COUNTER LIMIT exceeded the specified number.
  • Page 91 SECTION 9　TROUBLESHOOTING Alarm Alarm Name Possible Cause Protective Action Code MB:VIBRATION1 X1 Excessive magnetic bearing vibration. Deceleration MB:VIBRATION1 Y1 MB:VIBRATION1 X2 MB:VIBRATION1 Y2 MB:VIBRATION1 Z MB:SENSOR ERR. X1 Abnormal output signal from the magnetic bearing sensor. MB:SENSOR ERR. Y1 MB:SENSOR ERR. X2 MB:SENSOR ERR.
  • Page 92 Index Index SEMI F47 ........20 SEMI S2 ........20 SERIAL connector ......10 AC INPUT connecter ......9 START ........9 STATUS lamp ........ 9 backing vacuum pump ......8 touch-down bearing ......13 Control Panel ......... 9 cooling water ......8、31 UL .........
  • Page 93 Index This page is intentionally left blank. TURBO MOLECULAR PUMP 263-43069 Index-2 Instruction Manual...

  • Page 94: Declaration Of Conformity

    No. FE8A-0139C Declaration of Conformity SHIMADZU CORPORATION SEMICONDUCTOR EQUIPMENT DIVISION Address : 1,NISHINOKYO-KUWABARACHO,NAKAGYO-KU, KYOTO ,604-8511, JAPAN as the Manufacturer declares in sole responsibility that the following product Product Name Turbo-Molecular Pump and Power Supply Designation suffix: TMP-V2304LMa Model Name TMP = Turbo-Molecular Pump...
  • Page 95 TMP overhaul / repair request form Please fill out this request form and attach to the product before you send back to Shimadzu service center for overhaul or repair service. We ask that you fill out this form completely to expedite the service and return shipment.
  • Page 96 263-13450-08 「電子情報製品汚染防止管理弁法」 （中華人民共和国 信息産業部発行）に基づく、 「環境保護使用期限」と「製品中の有毒有害物質または元素の名称および含有量」表示 Markings regarding the “Environmental Protection Use Period” and the “Names and Contents of Toxic or Hazardous Substances or Elements” for “Management Methods for Controlling Pollution by Electronic Information Products” (Issued by: Ministry of Information Industry of the People’s Republic of China) Model Name：...
  • Page 97 With your co-operation we are aiming to reduce contamination from waste electronic and electrical equipment and preserve natural resource through re-use and recycling. Please do not hesitate to ask your Shimadzu office or Shimadzu distributor, if you require further information. Information for treatment facilities (TMP-Vxx04 series)
  • Page 98 SHIMADZU (ASIA PACIFIC) PTE LTD. 16 Science Park Drive #01-01 Singapore Science Park, Singapore 118227, Republic of Singapore Phone : 65-6778-6280 Fax : 65-6779-2935 SHIMADZU (CHINA) Co., LTD SHANGHAI BRANCH Block E, No.570 West Huaihai Road, Shanghai, 200052 Phone : 86(21)2201-3888 Fax : 86(21)2201-3666...

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