Shimadzu TMP-V2804LMC Manuals

Manuals and User Guides for Shimadzu TMP-V2804LMC. We have 1 Shimadzu TMP-V2804LMC manual available for free PDF download: Instruction Manual

Shimadzu TMP-V2804LMC Instruction Manual (98 pages)

TURBO MOLECULAR PUMP

Brand: Shimadzu | Category: Water Pump | Size: 1 MB

Copyrights and Disclaimers
2
Turbo Molecular Pump
2
Precautions for Safe Operation
3
Operating Precautions
6
Explanation of Label
7
Hot Surface
7
SECURITY Seal
7
Location of Label
8
Warranty Period
9
Conditional Warranty
9
Scope of the Warranty
9
Warranty of Repaired or Replacement Parts
9
Disposal of Products and Parts
9
Limitation of Liability
10
Table of Contents
12
Table of Contents
13
Section 1 OUTLINE and DESCRIPTIONS
16
Outline
17
Descriptions
18
Exterior
18
TMP-V3304LM/LMC (F) Outside Drawing
18
TMP-V2804LM/LMC (F) Outside Drawing
19
Power Cable
20
Standard Accessories
20
Section 2 IDENTIFICATION and FUNCTION
22
Pump Main Unit
23
Control Panel
24
External I/F Panel
25
Pump Construction
27
Principle of Turbo Molecular Pumping
27
Control System
30
Specifications
32
Standard Specifications for Pump Unit
33
The Maximum Allowable Flow Rate
35
Standards Fulfilled
35
Installation
36
Pump Mounting Direction
37
Installation of the Pump
38
Instruction and Lifting Method
40
Installation of TMP-V3304LM/LMC (F)
41
Installation of TMP-V2804LM/LMC (F)
43
Example of Piping Connection
45
Connection of Exhaust Line
45
Pipe Joint
46
Connection of Cooling Water Line
46
Connection of Power Cable
47
Preparation for Operation
48
Interlock for Vacuum System
49
Notes on Transportation
49
Operation
50
Overview
51
Introduction : Operation Modes
51
Startup Preparation
53
Start-Up Preparation Sequence in LOCAL Mode
53
Start-Up Preparation Sequence in REMOTE-Control Connector
53
Start-Up Preparation Sequence in Other Communication Means
54
Start-Up
55
Start-Up Sequence in LOCAL Mode
55
Start-Up Sequence in REMOTE-Control Connector
55
Start-Up Sequence in Other Communication Means
55
Shutting down
56
Preparations Prior to Shutting down Operation
56
Shutting down Sequence in LOCAL Mode
56
Shutting down Sequence in REMOTE-Control Connector
57
Shutting down Sequence in Other Communication Means
57
Variable Speed Operation
58
Outline
58
Operation from Start-Up to Low Speed Rotation
59
REMOTE Operation
59
Serial Interface Operation
59
Operation from Rated Speed Rotation to Low Speed Rotation
60
Remote Control Startup Procedure
60
Serial Interface Operation
60
Operation from Low Speed Rotation to Rated Speed Rotation
61
REMOTE Operation
61
Serial Interface Operation
61
Software Operation
62
Remote-Control Connector
64
Specification
64
Pin Assignment
65
Connector
66
Communication Specifications
67
Rs-232C
67
Transfer Specifications
67
Connector Specifications
67
Cable
67
Transfer Specifications
68
Connector Specifications
68
Cable
69
Connector
70
Recommended Maintenance Intervals
75
Turbo Molecular Pump Decontamination
76
Touch-Down Bearing Replacement
76
Check of the Rotor Blades
76
Power Supply Unit Parts Replacement
77
Turbo Molecular Pump Return Request
78
Section 9 TROUBLESHOOTING
80
Vacuum Pressure Rise
81
Abnormal Noise And/Or Vibration
81
Nothing Happens after an Operation Is Made
82
Power Failures
83
Power Failure Counter-Operation
84
Alarm Detection Capabilities
86
Movement in Alarm Detection Capabilities (ALARM)
86
Movement in Alarm Detection Capabilities (WARNING)
86
Reset Procedure
86
Declaration of Conformity
94

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Shimadzu TMP-V2804LMC Instruction Manual (98 pages)

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