Hitachi SU8700 Manuals

Manuals and User Guides for Hitachi SU8700. We have 1 Hitachi SU8700 manual available for free PDF download: Instruction Manual

Hitachi SU8700 Instruction Manual (440 pages)

Scanning Electron Microscope

Brand: Hitachi | Category: Microscope | Size: 13 MB

About this Manual
3
Important
4
Leakage X-Ray Radiation from this Instrument
4
Warranty on Product
5
Installation, Relocation, and After-Sales Technical Service
7
Disposal of Instrument
7
Disposal of Cooling Water Circulator (Option)
8
Service Life of Instrument
8
Technical Seminars and Training for Customers
8
Other Precautions
9
Disclaimer of Liability for Industrial Properties of Third Party
9
Handling of Chemicals
9
Trademarks
9
Copyrights
9
Handling of the Insulation Oil Used for HV Power Supply
14
User Manual Addendum for WEEE
15
Information for Users on WEEE (Only for EU Countries)
15
California Perchlorate Material Notice
15
General Safety Guide
16
Safety Alert Symbols and Signal Words
16
Common Safety Precautions
17
Precautions Prior to Use
17
Installation, Maintenance, and Relocation
18
Warnings and Cautions While Operating this Instrument
18
Warning Indications in this Manual
20
Caution Indications in this Manual
23
Warning and Caution Labels on Instrument
24
Standard Version
24
SEMI-S2 Guideline Conforming Version
32
EMO Switch (Option)
43
Outline
43
External View
43
Operation Method of the EMO Switch
44
Recovery Procedures after Pressing the EMO Switch
45
Protection against Movement Caused by Earthquake (Option)
46
Main Unit
46
EO Control Unit
47
Step down Transformer Unit (Option)
48
Weight Unit
49
Main Unit
50
Other Safety Guidelines
55
安全警告标签及标语的定义
60
有关安全的共同注意事项
61
使用前的注意事项
61
安装、维护和搬迁上的注意事项
62
操作手册中的警告
64
操作手册中的注意
66
本设备的警告标签
67
标准类型
67
Semi-S2 适用类型
75
紧急停止开关（选件
86
紧急停止开关的动作方法
87
紧急停止开关动作后的复原方法
88
地震防范措施（选件
89
仪器本体
89
降压变压器（选件
91
各单元的重心位置
93
仪器本体
93
降压变压器（选件
95
重量分配
96
仪器本体
96
其他注意事项
98
根据《电子信息产品污染控制管理办法》有关要求
102
电子信息产品污染控制标志
102
有毒有害物质或元素的名称及含量表示
102
本产品的电子信息产品污染控制标志表示方法
103
안전한 사용을 위해
104
안전 경고 기호와 표제어의 정의
104
안전에 관한 공통적 주의 사항
105
사용 전 주의
105
설치, 보수, 장소 변경에 관한 주의
106
사용 시의 경고 및 주의 사항
106
취급설명서 중의 경고 표시
108
취급설명서 중의 주의 표시
110
본 장치의 경고 라벨
111
표준 타입
111
Semi-S2 대응 타입
119
비상정지 스위치(옵션
130
비상정지 스위치 동작 방법
131
비상정지 스위치 동작 후의 복귀 방법
132
지진 대책(옵션
133
장치 본체
133
Eo 제어 유닛
134
스텝 다운 트랜스(옵션
135
웨이트
136
각 유닛의 중심 위치
137
장치 본체
137
Eo 제어 유닛
138
스텝 다운 트랜스(옵션
139
중량 배분
140
장치 본체
140
Eo 제어 유닛
141
그 외의 주의 사항
142
Table of Contents
148
Specification and Installation Requirements
156
Specifications
156
Resolution
156
Magnification
156
Electron Optics System
157
Specimen Stage
157
Image Display
158
Vacuum System
159
Protections
159
Size and Weight
160
Installation Requirement
161
General
161
Room Temperature, Humidity, Altitude, Contamination Level and Overvoltage Category
161
Power Supply
162
Ground Terminal
162
Compressed Air
163
Water Supply and Drain
163
Stray Magnetic Field
164
Vibration
166
Power Line Noise and Electric Field Noise
167
Disturbance by Sound Waves
169
Caution on Disturbance by Electromagnetic Wave
169
Calorific Value
170
Site Requirement
171
Customer-Supplied Items
173
Assemble
173
Power and Ground Wire
173
Others
173
Function
174
Parts Name
175
External View of Column
175
Configuration of Column
176
Specimen Stage
177
Specimen Current Measurement
178
Vacuum System
179
Condition Display Panel
180
Power Switch
181
Switch Board of the Instrument
181
Manual Operation Panel
182
Trackball (Option)
184
Joystick (Option)
184
UI Operation Display
185
Control Panel Function
187
Electron Beam
187
Vacc
188
Spot Intensity
189
Magnification
189
Preset Magnification
190
Round off Magnification
191
Alignment
192
Auto
203
Run/Freeze
206
Scan
207
Custom Scan
209
Image Shift
210
RR (Raster Rotation)
210
Histogram
212
Saving
214
Capture
224
High Resolution Capture
225
Image List
226
Stage Assist
230
Display Mode
235
Exchange Specimen
238
Observation Condition
239
Sem Map
242
Vacuum Mode Settings
245
Tilt Compensation
246
Beam Marking
247
Input Data
248
Undo
250
Wobbler Settings
251
Control Panel Settings
252
Sub Panel Settings
255
Manual Operation Panel
257
Standard Settings
258
User Account
271
Display Type
272
Monitor Mode
272
Stage Calibration
273
Separator
276
Control Panel Maintenance
277
Electron Gun
277
Electron Gun Baking
279
Electron Gun Maintenance
280
Adjustment of the Objective Aperture Position
281
Manual Alignment
283
Vacuum Display
285
Maintenance of Dry Pump
287
Sc (Air/Evac)
287
SEM Maintenance Tools
288
Maintenance Item
289
Operation Panel
291
Optics Tub
292
Signal Tub
296
Stage Tab
300
Image Display Area
302
Operation
305
Preparation
305
Confirm the Instrument Condition
305
Cooling Water Supply
307
Startup SU8700 Operation Program
309
Set a Specimen
310
Caution on Specimen Preparation
310
Set the Specimen Stub to the Specimen Holder
313
Operation Method of Specimen Exchange Chamber
314
Operation Display of Specimen Exchange Chamber
317
Operation of Specimen Exchange
318
Start SEM Observation
323
Electron Optics System
324
Accelerating Voltage Settings
324
Probe Current Settings
324
Focus Settings
328
Align the Electron Beam Axis (Alignment)
329
Operating the Specimen Stage and Moving the Observing FOV
334
Orientation of the Specimen and Display Setting
334
Outline of the Specimen Stage Operation
334
Movable Range of each Axis
339
Stage Movable Range
340
Moving the Observation FOV by the Image Shift
343
Rotating the FOV
344
The Magnification Setting
344
Magnification Range
345
Observing a Specimen
347
Selecting a Detector
347
Scan Speed Setting
348
Controlling the Brightness and Contrast of an Image
352
Focusing and Astigmatism Correction
353
Recoding an Image
356
Setting the Saving Condition
356
Saving an Image
356
Capturing an Image
356
Operation of the Manual Operation Panel
357
Stopping Operation
358
Shutting down the Accelerating Voltage
358
Removing a Specimen
358
Finishing Operation
359
Maintenance
360
Maintenance of Electron Optical Column
361
Maintaining Vacuum in Electron Gun
361
Maintenance of Parts
361
Maintenance of Dry Pump (Option)
362
Remove the Contamination or Moisture
363
Operation at Power Failure and for Complete Shutdown of Instrument
365
About Shutting down the Electron Gun
366
Operation after Recovery from Power Failure and for Star-Up of Instrument
367
Operation at Water Failure
367
Operation for Water Recovery
367
Procedure of Electron Gun Baking
368
Precaution in Electron Gun Baking
368
Procedure of Electron Gun Baking
369
Startup of Electron Gun
378
Mechanical Axis Alignment
379
Preparation of the Mechanical Axis Alignment
379
Electron Gun Axis Alignment
380
Objective Aperture Axis Alignment
382
First Condenser Lens Axis Alignment
383
Second Condenser Lens Axis Alignment
383
Electron Current Mode Setting Lens Axis Alignment
384
Precaution on Maintenance
384
Replacement Parts (SU8700)
385
Consumables, Life-Limited Pats, and Spear Parts
385
Consumables
385
Life-Limited Parts
386
Spare Parts
388
Accessories
389
Troubleshooting
392
When Vacuum System Does Not Work Normally
392
When the Specimen Chamber Does Not Reach to the Specified Vacuum Status
392
When the Vacuum Status of Electron Gun Is Less than the Specified Value
393
When Emission Current Is Not Set to Normal Value
393
When SEM Image Does Not Display on the Screen
394
When Noise on Image Is Large
394
When Astigmatism Cannot be Corrected
395
When the Discharge Is Occurred
396
When Auto Focus/Auto Stigma Function Does Not Work Properly
396
When SEM Operation Program Does Not Start up
397
When the PC Has Frozen
397
When Error Message Is Displayed
398
When Condensation Is Occurred
398
Measures to Take in Emergency
398
Appendix Error Message List
399
EVACSEQ Error Code List
433

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