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Electronic Micro Systems
Calibrating the Temperature of the Hot Plate.
The thermocouple feedback is placed below the top surface, so there will be a small variation in the readout
temperature and the actual value your wafers experiences so you may wish to try and improve this.
The controller allows teaching two points, that is a Low temperature value with an offset and a High value
with an offset.
So please pick the extreme values you wish to best control the temperature of your wafer.
Set the system to heat up to your lower value and measure the temperature of the top surface, or if possible
use a thermocouple embedded inside a Wafer, and record the value measured.
Repeat again with the High Temperature value, now you have the data to go and change some settings in the
KR3 controller unit.
EMS Default values are:-
A.L.P
Low Temperature Value 50°C.
A.L.o
Low Temperature Offset Value 0°C.
A.H.P
High Temperature Value 200°C.
A.H.o
High Temperature Offset Value -2°C.
You can change these values as follows :-
1. Press
and hold for 3 sec.
2. "PASS" appears on the screen, hold ↑ to enter the value 40,
3. You are now in the "Complete Configuration Mode", please be careful, bad value entry can stop the
system running.
4. You should see "
section, we need to get to "
route you will see the following screens:-
כ
כ
כ
5.
inP,
out,
AL1,
6. So you should now see "
7. A.L.P = 50, change this value with ↑ or ↓ arrows, hit
8. A.L.o = 0, change this value with ↑ or ↓ arrows, hit
9. A.H.P = 200, change this value with ↑ or ↓ arrows, hit
10. A.H.o = -2, change this value with ↑ or ↓ arrows, hit
11. With new setting entered you can now come out of Configuration by press and hold
For a more complete understanding of the "Complete Configuration Mode" please see the enclosed manual
from Ascon Tecnologic KR Series.
כ
inP" on the screen, this is the section for editing Input Values, we don't want this
כ
cAL" Calibration section, this is achieved by hitting
כ
כ
כ
כ
AL2,
AL3,
LbA,
rEG,
כ
cAL" , enter this section by hitting
(Use ↓ if you go passed),
כ
כ
כ
כ
SP,
tin,
PrG,
PAn,
to store and move to next value.
to store and move to next value.
to store and move to next value.
to store and move to next value.
4
Press
כ
כ
כ
SEr,
con,
cAL.
.
, 13 times. On
~5 sec.
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