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EMS 1000-3 Operation & Maintenance Manual page 2

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Electronic Micro Systems
Thank you for purchasing your Hot Plate from EMS. This Hotplate has
been designed to give many years of accurate service. It has been designed
around some of the best materials available
Services required
1. System is set up for 220/240 V AC
Mains power supply needs to supply up to 5 Amps.
2. Vacuum >> 15" Hg via 6mm OD Tube
Installation
1. Place on flat surface, making sure that the base of the unit has a good airflow around it.
2. Connect vacuum source to 6mm OD Vacuum connector.
3. Connect to the mains power supply 220 / 240 VAC
Quick start Up Guide
System configuration is set up for a Single temperature Set Point and a timed vacuum cycle,
with synchronised Lift Pins will allow easy loading and unloading of the wafers / substrate.
The Vacuum / Lift Pins cycle is started when the Vacuum momentary switch is pressed. The
vacuum will now be pulling through the small holes on the top plate and the pins will lower
the wafer / substrate onto the top plate, the duration of the vacuum is displayed in the bottom
right of the display, once complete Vacuum will be switched off and the pins return to the
top position.
Operator has access to change both the set point temperature and the time period for the
vacuum via the four buttons on the controller unit.
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