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EMS 1000-3 Operation & Maintenance Manual

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Electronic Micro Systems

Hot Plate Model 1000-3

Operation & Maintenance

Features include:

1. Temperatures from 50

2. Accurate to 1% across working surface.

3. A vacuum port ensures intimate contact between substrate and

hotplate.

4. Lift Pins to enable easy load / unload of wafers / substrate

5. Substrate size from 10 mm to 150 mm.

6. Computer Temperature Controller with digital readout

Manual



C to 200

Applications

Uses include:

 Curing of photo resist

 Curing of epoxy

 Any work requiring precise

temperature.

Page 1 Electronic Micro Systems Hot Plate Model 1000-3 Operation & Maintenance Manual Features include: Applications   1. Temperatures from 50 C to 200 Uses include: 2. Accurate to 1% across working surface. 3. A vacuum port ensures intimate contact between substrate and ...
Page 2 Electronic Micro Systems Thank you for purchasing your Hot Plate from EMS. This Hotplate has been designed to give many years of accurate service. It has been designed around some of the best materials available Services required 1. System is set up for 220/240 V AC Mains power supply needs to supply up to 5 Amps.
Page 3 Electronic Micro Systems Changing the Set Point Temperature:- Press “SP” will appear flashing on the screen, now you can raise or lower the Set Point Temperature with the ↑ or ↓ arrows, press again to store new value. Wait 10 seconds to return to normal run mode, or press and hold ~ 3 seconds.
Page 4 Wafer, and record the value measured. Repeat again with the High Temperature value, now you have the data to go and change some settings in the KR3 controller unit. EMS Default values are:- A.L.P Low Temperature Value 50°C.
Page 5: Fault Finding
The heater plate is a sealed unit and will have to be returned to EMS Base for service. The temperature controller is an Ascon Tecnologic KR3 series, the full set up manual for the controller is enclosed, further details can be found at www.t-uk.co.uk...