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Electronic Micro Systems
Changing the Set Point Temperature:-
Press
"SP" will appear flashing on the screen, now you can raise or lower the Set Point
Temperature with the ↑ or ↓ arrows, press
return to normal run mode, or press and hold
Changing the Vacuum / Lift Pin time period:-
Press
button twice, "tr.t1" will appear flashing on the screen, now you can raise or lower
the Time period for the vacuum with the ↑ or ↓ arrows, this is the small green number bottom
right, press
again to store new value. Wait 10 seconds to return to normal run mode or
press and hold
Loading Wafers / samples to be heated.
When the system is switched on it will start to heat up to the "Set point temperature".
Allow the system to reach desired temperature, the temperature display will be
orange when actual temperature is below set point, Green when it is plus or minus 1 degree
from set point, Red for above set point, allow the top plate temperature to become uniform.
When you are happy with the temperature of the Hot Plate place samples to be heated on to
the lift pins, trying to centre the pins under the wafer.
Press the vacuum switch, it will light up and the vacuum is applied while the wafers are
lowered on to the Hot Plate. The duration of the vacuum is displayed in the bottom right of
the display, once complete Vacuum will be switched off and the pins return to the top
position. The display in bottom right will now display "tEnd" for one minute.
Important
Please Note when the vacuum turns off, the heater remains on at the set point temperature.
To maximize the life of the Hot Plate, we recommend when not in use, it should be turned
off, or at least the Set Point (SP) value set to a value below room temperature.
Considering the Hot Plate can rise from room temp to 200°C in about 8 minutes, it is a small
wait to ensure the longevity of the system.
~ 3 seconds.
again to store new value. Wait 10 seconds to
~ 3 seconds.
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