Cleaning - Agilent Technologies TriScroll 620 INV Series Installation And Operation Manual

TriScroll 620 INV Series Vacuum Pump

Cleaning

Exterior: The exterior surfaces of the TriScroll may be
cleaned with mild detergents only.
Interior: Internal dry scroll pumps do not contain fluid for
the cleansing of accumulated dust and debris. Run the
pump periodically at atmosphere for a minute or two to
flush it out.
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