Technical Information; Specifications - Agilent Technologies TriScroll 620 INV Series Installation And Operation Manual

Dry scroll vacuum pump
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Technical Information

Model
Interface dimensions
Peak pumping speed
Media
Ultimate pressure (Torr)
Maximum inlet pressure
Maximum continuous inlet pressure
Maximum outlet pressure
Inlet connection
Exhaust connection
Gas ballast
Ambient operating temperature
Storage temperature
Motor rating
Operating voltages
Motor thermal protection
Operating speed
Cooling system
Weight
Noise level (per ISO 11201)
Vibration level at inlet (per ISO 10816-1)
Installation
10
TriScroll 620 INV Series Vacuum Pump
Table 1 Specifications
TriScroll™ 620 INV Dry Scroll Vacuum Pump
See Figure 2
50 Hz: 420 l/m, 25.2 m
60 Hz: 500 l/m, 30 m
Clean air. No toxic, corrosive, explosive or particulate forming gases
-3
7.0 x 10
Torr (9.3 x 10
1.0 atmosphere (0 psig)
100 Torr
1.1 atmosphere (1.5 psig)
NW40
Female 3/8" National Pipe Thread (NW25 adapter provided)
Female 1/4" National Pipe Thread (40 Micron sintered filter provided)
5 °C to 40 °C (41 °F to 104 °F)
–20 °C to 60 °C (–4 °F to 140 °F)
1.0 HP (0.75 kW)
50-60 Hz/100-200 VAC
Automatic
35-64 Hz Factory setting: 62 Hz
Air-cooled
Pump only: 32 kg (71 lbs)
Shipping weight: 42 kg (92 lbs)
Variable with frequency, 58-71 dB(A)
6.3 mm/sec
Pollution Degree: 2
3
/hr (14.8 cfm)
3
/hr (17.7 cfm)
-3
mbar)

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