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LEYBOLD COMBIVAC CM 31 Manual

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LEYBOLD VACUUM
Vacuum Pumps
Instrumentation
Fittings and Valves
GA 09.504 / 5.02
COMBIVAC CM 31
Cat. No.
157 89, 896 89, 897 89
Operating Instructions

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Summary of Contents for LEYBOLD COMBIVAC CM 31

  • Page 1 LEYBOLD VACUUM Vacuum Pumps Instrumentation Fittings and Valves GA 09.504 / 5.02 COMBIVAC CM 31 Cat. No. 157 89, 896 89, 897 89 Operating Instructions...

  • Page 2: Table Of Contents

    PENNINGVAC channel ....17 1.3.1 COMBIVAC CM 31 ....6 2.4.6 RS 232 C interface .
  • Page 3 Output rate and end character for Service at LEYBOLD’s ....35 printer output ..... . . 25 Brief operating instructions .

  • Page 4: Description

    COMBIVAC CM 31 and a com- puter. These Operating Instructions contain important informa- tion on the functions, installation, start-up, operation and Please refer to the technical data of this instrument to troubleshooting of the CM 31.

  • Page 5: Pm Measurement Channel

    Trigger relays reaction time 30 ms approx. Note for a pressure change exceeding The relay outputs also have been designed to handle 1 measurement decade signals for programmable controls. Trigger relays thresholds 2 per measurement channel; changeover contact 1.2.5 Chart recorder outputs Modes level / interval Each measurement channel has its own chart recorder...

  • Page 6: Mechanical Data

    PC compatible logic level (LOW) < 7 V; 0 A PC compatible logic level (HIGH) > 13 V; 7 mA (at 24 V) 1.3.1 COMBIVAC CM 31 Contact via relay approx. 24 V, supplied by the This combination instrument is equipped with three mea-...

  • Page 7: Rs 232 C Interface

    Gauge head cable 5 m for PR gauges 162 88 Cat. No. Gauge head cable 10 m for PR gauges 162 89 COMBIVAC CM 31 Gauge head cable 20 m for PR gauges 157 56 Europe 230 V; mbar 157 89...

  • Page 8: Operation

    For this refer to Section 2.2.1. - Check and if required adapt the line The COMBIVAC CM 31 is supplied ready for immediate voltage setting to the local line voltage. use. - Check and if required exchange the built-in line fuse (see Section 2.2.1).

  • Page 9: Changing The Line Voltage Setting And Exchanging The Fuses

    2.2.1 Changing the line voltage setting and 2.3 Controls and their exchanging the fuses functions To change the line voltage setting or exchange a fuse the power cord must be An overview of the placement of the controls and the dis- disconnected first.

  • Page 10: Digital Display

    2.3.2 Digital display Trigger and equipment modes are indicated in the status display area (3/1). These are related to the keys below The digital display (3/3) is used to digitally display the which are used to select the measurement channel. An pressure with respect to the selected measurement unit.

  • Page 11: Keys Tm 1, Tm 2 And Pm

    selected on parameter page 5. displayed and the triggers will not be active. However, if these conditions have been met once after LOCK switching on, the instrument will indicate that it is ready. The LOCK message comes on, when the entry of para- Thereafter the triggers are active, independently of the meters via the keyboard has been locked.

  • Page 12: Key Decrement

    2.3.7 Key Decrement 2.3.9.1 Checking and setting up of the equipment parameters The decrement key (5/3) is used for setting up the trig- The PARA (5/1) key is pressed when wanting to check or gers and other instrument parameters. Each time this change the settings of the various instrument parame- key is pressed, the displayed mode is decremented by 1;...
  • Page 13 A difference is made between two levels of parameters. two trigger modes. L Level trigger Parameter level 1 Both trigger outputs are operated independently of Entering the parameter level 1 the following will be each other. Thresholds may be set up either within shown: the range between 1·10 and 1·10...
  • Page 14 Page 4 Page 7 for the THERMOVAC channel Correction for the type of gas Filament material of the connected sensor (FILAMENT). GAS.n2 ‰ Air / Nitrogen (N FIL tu Tungsten TR 211, TR 201 and TR 205 FIL ni Nickel TR 206 GAS.Ar ‰...

  • Page 15: Locking Of Parameter Settings

    Page 9 Page 10 for the THERMOVAC measurement channel (TM) Note Adjustment of the analogue output (for this also see Sec- On parameter page 9 of instrument parameter level 2 tion 2.10.2). there are different displays for the THERMOVAC channel and the PENNINGVAC channel.

  • Page 16: Supply And Socket Connections On The Rear

    2.4 Supply and socket 2.4.3 Connection of the PENNINGVAC gauge connections on the rear The PENNINGVAC sensor is supplied with a high tension via socket (7/9). All supply connections and sockets are located on the (3.3 kV ignition voltage, 1.6 kV operating rear.

  • Page 17: Screw Terminal Outputs For The Penningvac Channel

    The 4-way terminal strip is wired as follows (Fig. 7) The 8-way terminal strip is wired as follows (Fig. 7). TM 1 TM 2 Signal Signal Contact symbol ———————————————————————— ———————————————————————— Trigger threshold (TRG) in preparation Ready Trigger threshold (ground) in preparat. n.o.

  • Page 18: Installing The Instrument

    2.5 Installing the instrument 2.5.4 Using the CM 31 as a table-top instrument The CM 31 has been designed to operate reliably under When using the CM 31 as a table-top instrument a sup- all normally encountered industrial conditions (see Sec- port stand (Ref.

  • Page 19: The Penningvac Channel

    2.6.2 PM measurement channel The PENNINGVAC measurement channel is supplied Alignment factory-aligned and does not require any maintenance. too high Test gauge T 35 may be used to check important equip- ment functions. The test gauge is a gauge head simula- tor for the PENNINGVAC gauge head.

  • Page 20: Status Messages

    This symbol indicates that the CM 31 should be operated according to the Operating Instructions as the instrument has been opera- The COMBIVAC CM 31 is able to display a variety of sta- ted incorrectly. tus messages. For example.: L FAIL FAIL indicates that there is a fault in the sensor.

  • Page 21: Chart Recorder Output Tables

    2.10 Chart recorder output Equations for the chart recorder output (Ua) relating to the THERMOVAC measurement channel; see Table 2: tables For Ano = — ( log p + 3) 2.10.1 Chart recorder output table for TM measurement channel For Ano Table 1 Response of the chart recorder output, trigger relay and = 1,58704·log p + 5,23887 ready indicator in the TM channel...
  • Page 22 Table 3 Display resolution and display increments Pressure Increments Increments [mbar / Torr] for STD for HIGH 1.00·10 in 0.1 increments in 0.1 increments 1.00·10 in 0.1 increments in 0.01 increments 3.00·10 in 0.1 increments in 0.02 increments 6.00·10 in 0.1 increments in 0.05 increments 1.00·10 in 0.1 increments...

  • Page 23: Pm Measurement Channel

    2.10.2 Chart recorder ouput tables for PM Example p = 7·10 mbar measurement channel Table 5 Response of the chart recorder output, trigger relay and ready indicator in the PM channel Ua = — ( log 7·10 + 9) = — (-2,155 + 9) = 9,78 V Trigger relay Chart PM channel...
  • Page 24 Table 7 Display resolution and display increments Table 8 Assignment: Measurement range, measurement uncertainty and swit- ching hysteresis for the level trigger mode Pressure Increments Increments mbar Torr Measurement Trigger hysteresis [mbar] for STD for HIGH uncertainty Level trigger 9.90·10 in 0.1 in 0.05 9.9·10...

  • Page 25: Rs 232 C Interface

    3 RS 232 C interface 3.1 Description 3.2 Interface parameters The levels of the RS 232 C interface are defined as fol- 3.2.1 Baud rate lows: The baud rate is fixed to 2400 baud. Level LOW (L) HIGH (H) ———————————————————————— Voltage range -3 to -25 V 3 to 25 V...

  • Page 26: Baud Rate And Data Format

    - Transmission data Pin 2 Opposite side: nowledgement characters <ACK> or <NAK>. Receive data <ACK> (ASCII code: 6 ) means that the received com- - Receive data Pin 3 Opposite side: mand has been detected, the parameters are acceptable Transmission data and that the command which has been received can be - Signal ground GND Pin 5...

  • Page 27: Reset Character

    3.3.1.5 Reset character 3.4 Data output and data With the character <ESC> (Escape; ASCII code: 27 formats without <CR> the interface of the A-series instrument may be reset to a defined state. A character string which is possibly still being processed is erased and proces- 3.4.1 Measurement data output sing of the command is terminated.

  • Page 28: Parameter Output And Response Time

    3.5 Interface commands and Output in the following format, provided measure- ment operation is possible: data input for A-series Measurement channel:Unit:-n.nnE-mm<CR><LF> instruments with RS 232 Meaning: Measurement C interface channel TM1, TM2, PM 3 characters :Unit mbar, Torr, Pa, Micron 7 characters The interface commands are composed of the following :-n.nn...

  • Page 29: Trigger Adjustment Commands

    Reply format: measurement 3.5.3 Operating parameters channel Entry of parameters via Note the keyboard When setting the measurement unit Micron all measure- Enable parameter changes LOK W OFF ment value outputs and trigger setting values are basi- (equipment parameters may cally in Micron;...

  • Page 30: Program Examples For Setting The Parameters

    NAK$ = CHR$(21): ACK$ = CHR$(6) ‘opening RS232 comunication OPEN “COM1:2400,N,8,1,rs,cs,ds,cd“ FOR RANDOM AS #1 LOCATE 1, 1: PRINT “Sample Control Program for Leybold A-Series Gauge“; LOCATE 2, 1: PRINT “COMBIVAC CM31 with RS232-Interface“; ‘ set display to PM measurement channel PRINT #1, “dsp w pm1“...
  • Page 31 ‘ take measurement value from CM31 PM cold cathode gauge channel PRINT #1, “MESr pM1“ ‘ command: read measurement value from CM31 LINE INPUT #1, AckNakTest$ ‘ get handshake character from CM31 IF AckNakTest$ <> ACK$ THEN ‘test for <ACK>/<NAK> character PRINT #1, “eri r“...
  • Page 32 ELSE LOCATE 12, 1: PRINT SPACE$(79); ‘ clear screen line LOCATE 12, 1: PRINT “setting CM31 display to channel TM2 successful“; END IF ‘read current displayed measurement channel of CM31 PRINT #1, “dsp R“ ‘ command: read CM31 display channel LINE INPUT #1, AckNakTest$ ‘...
  • Page 33 PRINT #1, “eri r“ ‘ if <NAK>, then request CM31 error code LINE INPUT #1, AckNakTest$ ‘ get handshake character (without test) LINE INPUT #1, FailMessg$ ‘ get error code from CM31 LOCATE 18, 1: PRINT SPACE$(79); ‘ clear screen line LOCATE 18, 1: PRINT “failure on setting of trigger PM no.

  • Page 34: Examples For The Cable Link Between The Interface And An Ibm ® -Pc

    3.8 Examples for the cable link between the interface and ® an IBM Example for 9-way PC links A-series instruments A-S- A-S- IBM-PC Remark for A-side Desig. Desig. Remark for PC side leave unconnected possibly connect to 6 link link link link link...

  • Page 35: Maintenance

    4 Maintenance 4.1 Service at LEYBOLD’s If you send an appliance to LEYBOLD indicate whether the appliance is free of substances damaging to health or whether it is contaminated. If it is contaminated also indicate the nature of hazard. To do so, you must use a preprinted form which we shall send to you upon re- quest.

  • Page 36: Brief Operating Instructions

    5 Brief operating instructions...
  • Page 37 2nd parameter level Unit Page 6 MBAR, TORR, PA, MICRON PARA For TM measurement channel: Filament material for TM Tungsten, nickel, platinum [Fil tu; Fil ni; Fil pt] Page 7 For PM measurement channel: HV automatic for PM [AUTO.0; AUTO.1] PARA For TM / PM measurement channel: ADisplay resolution Page 8...
  • Page 39 EEC Declaration of Conformity We - LEYBOLD AG - herewith declare that the products Applied harmonized standards: defined below meet the basic requirements regarding • EN 61010 - 1 : 1993 safety and health of the relevant EEC directives by design, type and the versions which are brought in to cir- culation by us.
  • Page 40 LEYBOLD AG Vakuum Bonner Straße 498 (Bayenthal) D-50968 Köln Telefon: (0221) 347-0 Telefax: (0221) 347-1250...

This manual is also suitable for:

Combivac cm 32157 89896 89897 89157 90

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