All Return Origin Screen; All Origin Return Screen - Canon BESTEM-D01R Manual

1. Pre-Operation

1.2 All origin return screen

Explanation on all origin return screen.
⑦ ⑧
①
: Current date and time display
②
: Current product type name, frame name and wafer name display.
③
All origin return cancel button
When selected: Fine adjustment screen will be displayed.
④
⑤
ON0001
①
⑤
⑨ ⑩
All origin return execute button
When selected: All origin return will be executed
Unit status display
Display status of unit origin return (left icon show origin return in
progress)
②
1-3
1. Pre-Operation
③ ④
OM0001
１
章
運
転
準
備