Pfeiffer Vacuum IKT 010 Operating Instructions Manual

Pfeiffer Vacuum IKT 010 Operating Instructions Manual

Cold cathode sensor for integrated pressure measurement
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OPERATING INSTRUCTIONS
EN
Translation of the Original
IKT 010 ∣ IKT 011
Cold cathode sensor for integrated pressure measurement

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Summary of Contents for Pfeiffer Vacuum IKT 010

  • Page 1 OPERATING INSTRUCTIONS Translation of the Original IKT 010 ∣ IKT 011 Cold cathode sensor for integrated pressure measurement...
  • Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new sensor is designed to support you in your individual application with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
  • Page 3: Table Of Contents

    Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Product description Function Switch and status display Identifying the product Scope of delivery...
  • Page 4 Table of contents Troubleshooting Identifying errors at the measurement chamber Shipping Recycling and disposal 11.1 General disposal information 11.2 Dispose of sensors Service solutions by Pfeiffer Vacuum Spare parts Accessories 14.1 Accessory information 14.2 Order accessories Technical data and dimensions 15.1 General 15.2 Technical data...
  • Page 5 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Variants Tbl. 3: Abbreviations used Tbl. 4: Electronic drive units and required firmware versions Tbl. 5: Illuminating diodes Tbl. 6: Required firmware versions Tbl. 7: Calibration factors for the pressure range < 10 hPa Tbl.
  • Page 6 List of figures List of figures Fig. 1: Switch and LED Fig. 2: Establishing the vacuum connection Fig. 3: Micro USB connection (type B) Fig. 4: Displayed pressure Fig. 5: Removing the sensor Fig. 6: Disassembling the sensor Fig. 7: Removing the ignition aid Fig.
  • Page 7: About This Manual

    Variants You can find the part number on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale. Dimensions are in mm unless stated otherwise.
  • Page 8: Conventions

    About this manual ● Maintenance and cleaning ● Storage or disposal The work described in this document is only permitted to be performed by persons with the appropriate technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac- uum.
  • Page 9: Abbreviations

    Turbopump electronic drive unit (turbo controller) Measuring signal [V] (output voltage) Underrange Tbl. 3: Abbreviations used 1.4 Trademark proof ● HiPace ® is a registered trademark of Pfeiffer Vacuum GmbH. ● Molex ® is a registered trademark of Molex Incorporated, Lisle, Illinois, USA. 9/46...
  • Page 10: Safety

    Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault.
  • Page 11 ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
  • Page 12: Safety Precautions

    ► Provide suitable touch protection, if the surface temperature exceeds 70 °C. ► Inform yourself about any contamination before starting work. 2.4 Proper use The sensor is used for integrated pressure measurements on Pfeiffer Vacuum HiPace turbopumps throughout the permissible pressure range. 12/46...
  • Page 13: Foreseeable Improper Use

    ● Use with replacement or accessory parts that are unsuitable or are not approved 2.6 Responsibilities and warranty Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party: ● disregards this document ● does not use the product for its intended purpose ●...
  • Page 14: Ensuring Personnel Qualification

    ─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training.
  • Page 15: Product Description

    2 LED "ST" (supply voltage/error) 3.3 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. 1. Read the data on the product rating plate. 2. Record this data.
  • Page 16: Transport And Storage

    Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. Packing We recommend keeping the transport packaging and original protective cover.
  • Page 17: Installation

    Installation 5 Installation 5.1 Establishing the vacuum connection DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010.
  • Page 18: Establishing The Electric Connection

    Installation Fig. 2: Establishing the vacuum connection 1 Seal with centering ring Seal with centering ring and filter 2 Electronic unit Tensioning piece 3 Protective cap Recommendations ► Where possible, ensure that the sensor is not exposed to any vibrations during operation, as vi- brations in general will lead to deviations in the measured values.
  • Page 19: Connecting The Sensor With Micro Usb To Hipace Neo

    Installation Prerequisites Electronic drive unit Firmware version (or higher) TC 110 012500 TC 120 010300 TC 400 012400 TC 1200 012400 TM 700 010600 Tbl. 4: Electronic drive units and required firmware versions Accessories required ● TIC 010, adapter for two sensors Procedure 1.
  • Page 20: Operation

    Illuminating diodes Signal evaluation via output interfaces The output interfaces of the electronic drive unit with the applicable Pfeiffer Vacuum proto- col and the Pfeiffer Vacuum parameter set are used to operate the connected accessory devices on a Pfeiffer Vacuum vacuum pump.
  • Page 21: Tbl. 7: Calibration Factors For The Pressure Range < 10 Hpa

    Operation p [hPa] Xe Kr Ne He –3 –4 –5 –6 –7 –7 –6 –5 –4 –3 –2 [hPa] Fig. 4: Displayed pressure In the pressure range < 10 hPa, the display is linear. Gas and vapor mixtures Process gases are mostly mixtures of gas and vapor. Precise measuring of gas and vapor mixtures is only possible using partial pressure measurement instruments, for example a quadrupole mass spectrometer.
  • Page 22: Ignition Delay

    Operation Calculating pressure for gases other than air ► Calculate the effective pressure using the following formula: = C × p ● P = Effective pressure ● C = Calibration factor ● p = Displayed pressure (sensor calibrated for air) 6.2 Ignition delay Cold cathode measuring systems have an ignition delay upon activation.
  • Page 23: Removal

    Removal 7 Removal DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010.
  • Page 24: Removing The Sensor

    Removal Fig. 5: Removing the sensor 1 Seal with centering ring Tensioning piece 2 Protective cap Removing the sensor 1. Disconnect the sensor cable from the turbopump’s electronic drive unit. 2. Remove the sensor from the vacuum system. 3. Fit the protective cap on the connection flange. 24/46...
  • Page 25: Maintenance

    Contact the Pfeiffer Vacuum Service Center in the event of process-related shorter mainte- nance intervals. 8.1 Sensor maintenance Pfeiffer Vacuum calibrated the sensor to standard values at the factory. The sensor is maintenance- free. Replacing faulty components ► Replace the ionization chamber and the ignition aid or the complete measurement chamber (re- placement sensor) only if the unit is faulty.
  • Page 26: Replacing The Ignition Aid

    Maintenance Fig. 6: Disassembling the sensor 1 Circlip Electronic unit 2 Ionization chamber Grub screw 3 Measurement chamber Disassembling the sensor 1. Loosen the grub screw on the side of the electronic unit. 2. Remove the complete measurement chamber from the electronic unit. 3.
  • Page 27: Removing The Ignition Aid

    Maintenance Fig. 7: Removing the ignition aid 1 Ignition aid Mounting tool Removing the ignition aid ► Remove the ignition aid. Fig. 8: Inserting the ignition aid in the mounting tool 1 Ignition aid Mounting tool 2 Serrated end of ignition aid Inserting the ignition aid in the mounting tool 1.
  • Page 28: Cleaning Of Components

    ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
  • Page 29: Installing The Sensor

    Maintenance 4. Replace the ionization chamber if only the ionization chamber is contaminated. 5. Replace the complete measurement chamber if the measurement chamber is heavily contaminat- 6. Replace the ignition aid if the ignition aid is contaminated. Cleaning of components 1.
  • Page 30: Installing The Sensor

    Maintenance Setting the calibration value of the replacement sensor ► Set the calibration value for the replacement sensor at the switch for the calibration value (CAL) of the electronic unit. Fig. 11: Installing the sensor 1 Circlip Measurement chamber (complete) 2 Ionization chamber Grub screw 3 Measurement chamber...
  • Page 31: Malfunctions

    Malfunctioning of the equipment as a direct result of contamination or wear, as well as wear parts, is not covered by the warranty. Rectifying malfunctions (reset) In the event of a malfunction, Pfeiffer Vacuum recommends disconnecting the supply volt- age, and then reconnecting after 5 seconds. 9.1 Troubleshooting...
  • Page 32: Tbl. 9: Measurement

    Malfunctions Fig. 12: Contact pins of the measurement chamber 1 – 5 Contact pin Measurement chamber Measurement be- Setpoint Reasons for values being outside of setpoint range tween range 5 and 6 ∞ Value <<∞: contamination, short circuiting of cold cathode Tbl.
  • Page 33: Shipping

    ► Comply with the instructions for safe distribution. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Instructions for safe shipping ► Do not ship microbiological, explosive or radioactively contaminated products.
  • Page 34: Recycling And Disposal

    11.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron –...
  • Page 35: Service Solutions By Pfeiffer Vacuum

    We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality.
  • Page 36 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
  • Page 37: Spare Parts

    Ignition aid set (10 x) BN 845 995 -T Mounting tool for ignition aid PT 120 316 -T Ionization chamber (titanium, stainless steel) IKT 010 PT 120 313 -T Ionization chamber (stainless steel) IKT 011 PT 120 312 -T Complete measurement chamber...
  • Page 38: Accessories

    Accessories 14 Accessories View the range of accessories for hybrid-bearing HiPace turbopumps (pressure sensors) on our website. View the range of accessories for magnetically levitated HiPace turbopumps (pressure sen- sors) on our website. 14.1 Accessory information Adapter for 2 sensors (TIC 010) Adapter for connecting Piezo/Pirani and cold cathode sensors to the turbopump’s TC electronic drive unit Seals with centering ring and filter...
  • Page 39: Technical Data And Dimensions

    0.1 V Ignition voltage (in the measurement chamber) ≤ 4.5 kV Operating voltage (in the measurement chamber) ≤ 3.3 kV Operating current (in the measure- IKT 010 Low current ment chamber) IKT 011 High current Power consumption ≤ 2 W Fuse (to be connected in series) ≤...
  • Page 40: Tbl. 14: Electrical Data

    Technical data and dimensions Parameter Value Connection (electrical) PT R7x 0xx Molex PicoBlade, 4-pin, screened PT R7x 1xx (cable with suitable plug for TIC 010) PT R7x 5xx Micro USB plug (cable with suitable plug for HiPace neo) Cable length (l) PT R7x 05x 0.5 m PT R7x 55x...
  • Page 41: Tbl. 18: Substances In Contact With The Media

    Technical data and dimensions Parameter Value Ionization chamber IKT 010: Titanium, stainless steel (1.4016) IKT 011: Stainless steel (1.4301, 1.4016) Ignition aid Stainless steel (1.4310) Tbl. 18: Substances in contact with the media Parameter Value Protection degree IP40 Output voltage...
  • Page 42: Dimensions

    Technical data and dimensions 15.3 Dimensions DN 25 ISO-KF Fig. 14: Dimensions Dimensions in mm. Connecting cable length 42/46...
  • Page 43: Certification

    The products IKT 010 and IKT 011 with Molex connector - conform to the UL standard UL 61010-1:2012. TÜV Rheinland - are certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. https://www.certipedia.com (Certificate No. 72142403)
  • Page 44: Declaration Of Conformity

    Declaration of conformity Declaration for product(s) of the type: Cold cathode sensor IKT 010 IKT 011 We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. Electromagnetic compatibility 2014/30/EU Restriction of the use of certain hazardous substances 2011/65/EU...
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This manual is also suitable for:

Ikt 011

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