Multi-channel Flow
Rate Sensor Controllers
The Flow rate sensor detects workpieces lifted by vacuum
that could not be detected by the pressure sensor.
A single controller detects four points at the same time
Connectable to a personal computer
● Use a PC to perform flow rate setting, capture of flow rate
value, and reference flow rate setting.
PSU
S.W.OUT
1
2
3
4
ch
A. S. OUT
Three types of sensor heads, depending on flow rate range
● Three types are available,
including
–500〜500 mR/min (ANR),
[–30.5〜30.5 in.
3
/min.]
–3〜3R/min (ANR),
[–0.11〜0.11 ft.
3
/min.]
and 0〜10R/min (ANR),
.
[0〜0.35 ft.
3
/min.]
Not affected by piping resistance
● Since the flow rate sensor head is not affected by piping
resistance, there is no restriction on mounting position.
Measurement
point 1
Nozzle hole
diameter
100 mm
0.1 mm [0.004 in.]
[3.94 in.]
Measurement results using
φ1.8 [0.071 in.] tube
Measurement point 1
Flow rate sensor
0.11R/min [0.0039 ft.
Pressure sensor
−78 kPa [−11.3 psi.]
※ Based on Koganei test standard.
799
PSU
S.W.OUT
1
2
3
4
ch
A. S. OUT
RS232C
Measurement
Vacuum
point 2
source
−98 kPa
[−14.2 psi.]
2000 mm [78.7 in.]
100 mm
[3.94 in.]
Measurement point 2
3
/min.]
0.12R/min [0.0042 ft.
3
/min.]
−95 kPa [−13.8 psi.]
Output Mode
■ Window comparator mode 1
・Mode for freely setting L1
and L2.
Note, however, that switch
output does not go ON while
flow rate is increasing.
L (R/min)
L1
L2
Switch
output
■ Window comparator mode 2 and 3
• Modes for automatically
setting L1, using ΔL setting
and reference flow rate
capture. (L1= Reference
flow rate −ΔL)
L (R/min)
L2
Switch
output
●Window comparator mode 2
• When L1 has been set, this mode maintains it unchanged until reference
flow rate capture is performed again.
●Window comparator mode 3
• Each time the L1 setting is deleted when switch output goes OFF, this
mode performs reference flow rate capture and sets L1.
Effective for situations where flow rate fluctuation is severe.
When using window comparator mode 3, use RS232C to perform
reference flow rate capture from outside.
■ Window comparator mode 4
• Mode for freely setting L1 and
L2.
L (R/min)
L1
L2
Switch
output
Discharge to
Vacuum
Workpiece
Vacuum
atmospheric
valve ON
lifted by
break
pressure
vacuum
ON
Discharge to
Vacuum
Workpiece
Vacuum
atmospheric
valve ON
lifted by
break
pressure
vacuum
Reference flow rate capture
ΔL
L1
ON
Discharge to
Vacuum
Workpiece
Vacuum
atmospheric
valve ON
lifted by
break
pressure
vacuum
ON
Hysteresis
t
Hysteresis
t
Hysteresis
Hysteresis
t
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