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- Page 1 CTI-Cryogenics High Capacity Helium Compressor Installation, Operation and Maintenance Instructions 8040600 Revision A...
- Page 2 © 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
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Page 3: Table Of Contents
Introduction CTI-CRYOGENICS Helium Refrigeration System ......1-3 Specifications ............1-5 Dimensions . - Page 4 Phase Check ........... .4-8 RS-232 Cable Connections (Optional).......4-9 8040600 Brooks Automation Revision A...
- Page 5 ..............1 Brooks Automation...
- Page 6 Contents High Capacity Helium Compressor Installation, Operations, and Maintenance This Page Intentionally Left Blank 8040600 Brooks Automation Revision A...
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Page 7: Figures
High Voltage Electrical Schematic........8-9 Brooks Automation 8040600... - Page 8 Figures High Capacity Helium Compressor Installation, Operations, and Maintenance This Page Intentionally Left Blank 8040600 Brooks Automation viii Revision A...
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Page 9: Tables
B-1 Helium Flow Diagram - Three Modules ......8-7 Brooks Automation 8040600... - Page 10 Tables High Capacity Helium Compressor Installation, Operations, and Maintenance This Page Intentionally Left Blank 8040600 Brooks Automation Revision A...
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Page 11: Introduction
Chapter Contents CTI-CRYOGENICS Helium Refrigeration System ......1-3 Specifications ............1-5 Dimensions . - Page 12 Network Terminal (48 VDC). A manual is shipped with each system component to provide information for installation and operation of that component. A loose-leaf binder with index tab separators is also provided so that a complete set of tabulated manuals can be compiled. 8040600 Brooks Automation Revision A...
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Page 13: Cti-Cryogenics Helium Refrigeration System
CTI-CRYOGENICS Helium Refrigeration System CTI-CRYOGENICS Helium Refrigeration System The operation of CTI-CRYOGENICS’ On-Board 8F Cryopump for 300mm PVD is based upon a closed loop helium expansion cycle. The system is made up of two major components: the On-Board 8F Cryopump for 300mm PVD, which contains the cold head, and the High Capacity Helium Compressor which compresses the helium gas. - Page 14 Introduction High Capacity Helium Compressor CTI-CRYOGENICS Helium Refrigeration System Manual Figure 1-1: High Capacity Helium Compressor (Front View) 8040600 Brooks Automation Revision A...
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Page 15: Specifications
High Capacity Helium Compressor Introduction Manual Specifications Specifications Dimensions The dimensions of the High Capacity Helium Compressor are shown in Figure 1-2. Figure 1-2: High Capacity Helium Compressor Dimensions Brooks Automation 8040600 Revision A... -
Page 16: Weight
15 KW @ 50 Hz 10 KW @ 50 Hz 10 KW @ 50 Hz Nominal Power 0.85 0.85 Factor Rated FL/LR 58/255 24/125 (480V 60Hz, 380V 50 Hz) 39/170 18/83 Current 27/125 (480V 50Hz, 380V 60Hz 8040600 Brooks Automation Revision A... -
Page 17: Cooling Water
6.0 - 8.0 pH 6.0 - 8.0 pH Calcium Carbonate** < 75 ppm < 75 ppm *NOTE: Refer to Figure 1-5 Figure 1-6 for high voltage configurations. **NOTE: Water conditioning is required for applications not meeting these requirements. Brooks Automation 8040600 Revision A... - Page 18 Cooling Water Inlet Temperature, degrees F 342-355 VAC 60 Hz. 355-365 VAC 60 Hz. 365-375 VAC 60 Hz. 375-506 VAC 60 Hz. Figure 1-5: Cooling Water Flow versus Inlet Temperature (Two Compressor Modules High Voltage Configuration) 8040600 Brooks Automation Revision A...
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Page 19: General
325 - 335 psig 325 - 335 psig (22.4 - 23.1 bars) (22.4 - 23.1 bars) Ambient 50 - 100º F 50 - 100º F Operating Temperature (10 - 38º C) (10 - 38º C) Range Brooks Automation 8040600 Revision A... - Page 20 Every 3 Years Every 3 Years Schedule NOTE: The High Capacity Helium Compressor is designed for continuous operation and should remain ON when the On-Board 8F Cryopump for 300mm PVD is in a regeneration cycle. 8040600 Brooks Automation 1-10 Revision A...
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Page 21: Electrical Box Front Panel Component Description
Helium Compressor will automatically shut down if the helium return pressure drops below 20 psig (1.38 bar). NOTE: Refer to Section 7, Troubleshooting for more information if the Low Helium Pressure indicator is illuminated. Brooks Automation 8040600 1-11 Revision A... -
Page 22: Power On
High Capacity Helium Compressor is ON. Refer to for the appropriate static helium charge pressure. The Supply Pressure Gauge also indicates system static helium charge pressure when the High Capacity Helium Compressor and On- Board 8F Cryopump for 300mm PVD are OFF. 8040600 Brooks Automation 1-12 Revision A... -
Page 23: Electrical Box Rear Panel Component Description
Helium Compressor. The RS-232 port supports a 9600 baud rate. NOTE: To meet regulatory compliance, the RS-232 cable must be fully shielded through to the connector shell. Use cable CTI-CRYOGENICS P/N 8132157GXXX or equivalent. The RS-232 cable must also pass through ferrite to minimize losses along the cable. -
Page 24: P2 And Mns Led
Flashing Amber Minor fault and/or connection time out. MAC ID Media Access Control ID switch allows selection of the DeviceNet address for the High Capacity Helium Compressor. 8040600 Brooks Automation 1-14 Revision A... -
Page 25: Ccj1/Ccp2 Connectors
High Voltage The Main Circuit Breaker must be switched to the OFF position before performing any work on the electrical components of the On-Board 8F Cryopump for 300mm PVD System to prevent electric shock. Brooks Automation 8040600 1-15 Revision A... -
Page 26: High Capacity Helium Compressor Rear Panel Component Description
Capacity Helium Compressor when helium charging is required. Refer to 1-9. The charge port is a 1/4 inch 45 º male flare fitting, and mates with Figure the CTI-CRYOGENICS’ charge line P/N 7021002P001. Refer to Adjusting System Helium Pressure in Section 5 for additional information. 8040600... - Page 27 REAR PANEL RETURN PRESSURE GAUGES AND MAIN CIRCUIT BREAKER CHARGE VALVE ACCESS PANEL WINDOWS HELIUM IN RETURN WATER IN WATER OUT HELIUM OUT SUPPLY Figure 1-9: High Capacity Helium Compressor Rear Panel Component Location Brooks Automation 8040600 1-17 Revision A...
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Page 28: Typical On-Board 8F Cryopump For 300Mm Pvd System
12 On-Board 8F Cryopumps for 300mm PVD as shown in Figure 1-11. HELIUM SUPPLY HELIUM RETURN Figure 1-10: Typical On-Board 8F Cryopump for 300mm PVD System Helium Connections (Two Module Configuration) 8040600 Brooks Automation 1-18 Revision A... - Page 29 Figure 1-11: Typical On-Board 8F Cryopump for 300mm PVD System Helium Connections (Three Module Configuration) Refer to Chapter 3 - Installation, for more information on connecting On-Board 8F Cryopump for 300mm PVD to the High Capacity Helium Compressor. Brooks Automation 8040600 1-19 Revision A...
- Page 30 Introduction High Capacity Helium Compressor Typical On-Board 8F Cryopump for 300mm PVD System Manual This Page Left Blank Intentionally 8040600 Brooks Automation 1-20 Revision A...
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Page 31: Safety
Manual Safety Overview This section describes safety conventions for the Brooks Automation Product. All personnel involved in the operation or maintenance of the product must be familiar with the safety precautions outlined in this section. NOTE: These safety recommendations are basic guidelines. If the facility where the Prod- uct is installed has additional safety guidelines they should be followed as well, along with the applicable national and international safety codes. -
Page 32: Introduction
Manual Introduction Follow all safety precautions during installation, normal operation, and when servic- ing CTI-Cryogenics products. This chapter explains the safety conventions used throughout this manual. CTI-Cryo- genics uses a specific format for cautions and warnings, which includes standard sig- nal words and safety shapes. -
Page 33: Signal Word Descriptions
A signal word accompanied by a safety shape that indicates indicates a potentially hazardous situation. WARNING If not avoided, the action may result in serious injury or death. A WARNING is highlighted in orange. Brooks Automation 8040600 Revision A... -
Page 34: Safety Shape Descriptions
ISO 7010: 2003(E), Graphic symbols - Safety colours and safety signs - Safety signs used in workplaces and public areas • ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety signs - Part 1: Design principles for safety signs in workplaces and public areas 8040600 Brooks Automation Revision A... -
Page 35: Unpacking And Inspection
Shipping Carton Contents ........3-6 Removing the Wheel Assemblies (Optional)......3-6 Brooks Automation 8040600... -
Page 36: Shipping Carton Inspection
7. Carefully roll the High Capacity Helium Compressor down the ramp and onto the floor. 8. Carefully move the High Capacity Helium Compressor into its installation position. 9. Refer to Section 3, Installation, for more information. 8040600 Brooks Automation Revision A... - Page 37 High Capacity Helium Compressor Unpacking and Inspection Manual Shipping Carton Inspection RAMP Figure 3-1: Removing the High Capacity Helium Compressor from the Shipping Carton Brooks Automation 8040600 Revision A...
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Page 38: Alternate Removal Method
7. Lower the High Capacity Helium Compressor onto the floor and remove the lifting device from the lifting eyes. 8. Carefully move the High Capacity Helium Compressor into its installation position. 9. Refer to Section 3, Installation, for more information. 8040600 Brooks Automation Revision A... - Page 39 High Capacity Helium Compressor Unpacking and Inspection Manual Alternate Removal Method Figure 3-2: Alternate High Capacity Helium Compressor Removal Method Brooks Automation 8040600 Revision A...
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Page 40: High Capacity Helium Compressor Inspection
Capacity Helium Compressor wheel assemblies off the floor as shown in Figure 3-3-3. 2. Remove the four wheel assembly bolts, as shown in Figure 3-3-3, from each wheel assembly. Remove the wheel assemblies from the side of the High Capacity Helium Compressor rack. 8040600 Brooks Automation Revision A... - Page 41 2. Use a 9/16 inch wrench to tighten the leveling screw lock nuts. 3. Store the wheel assemblies on the shoulder bolts on the side of the rack as shown in Figure 3-3-3. 4. Save the wheel assembly bolts. Brooks Automation 8040600 Revision A...
- Page 42 Unpacking and Inspection High Capacity Helium Compressor High Capacity Helium Compressor Inspection Manual This Page Left Blank Intentionally 8040600 Brooks Automation Revision A...
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Page 43: Installation
Helium Line Connections .........4-10 Brooks Automation... -
Page 44: Introduction
3/4 inch female ORS water supply and return fittings Connectors for EMO circuit Figure 4-1 highlights the major tasks for High Capacity Helium Compressor installation and refers to the appropriate installation procedures within this section. 8040600 Brooks Automation Revision A... - Page 45 (refer to page 4-5) Phase Check (refer to page 4-8) Multiple On-Board 8F Cryopump for 300mm PVD Flexline Connections (refer to page 4-10) Refer to Chapter 4 - Operation Figure 4-1: High Capacity Helium Compressor Installation Flowchart Brooks Automation 8040600 Revision A...
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Page 46: Supply And Return Water Line Connections
3. Connect the Supply flexible water line to the IN ORS fitting and secure. 4. Connect the Return flexible water line to the OUT ORS fitting and secure. 5. Turn on the water, and verify that there are no water leaks. 8040600 Brooks Automation Revision A... -
Page 47: Electrical Connections
Figure 4-2. 2. Remove the terminal block cover by turning the two 1/4 turn screws. The conductor isolator blocks will be inside the terminal block cover as shown in Figure 4-2. Brooks Automation 8040600 Revision A... - Page 48 Terminal Block Cover (with captive screws) Electrical Panel Cover (with captive screws) Figure 4-2: High Capacity Helium Compressor Power Cable Connections 3. Refer to Table 1-4 and cut the appropriate cable with ground to an appropriate length. 8040600 Brooks Automation Revision A...
- Page 49 9. Remove the screws from the High Capacity Helium Compressor circuit breaker terminals X, Y, and Z as shown. Customer Supplied Strain Relief Connector PHASE MONITOR Power Cable Entrance Ground Stud 1 inch nominal bushing (customer supplied) Figure 4-3: Power Cord Installation Brooks Automation 8040600 Revision A...
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Page 50: Phase Check
3. If the High Capacity Helium Compressor does not start and the phase monitor indicator is illuminated, perform the following steps: a. Turn the High Capacity Helium Compressor circuit breakers CB1 and CB2 to the OFF position. b. Disconnect the power cord from the power source. 8040600 Brooks Automation Revision A... -
Page 51: Rs-232 Cable Connections (Optional)
2. Connect the opposite end of the RS-232 cable to the host computer RS- 232 network. Emergency Off (EMO) System Connections 1. Wire the CCJ1/CCP2 connectors as shown in Figure 4-2. Brooks Automation 8040600 Revision A... -
Page 52: Multiple On-Board 8F Cryopump For 300Mm Pvd Flexline Connections
Gas Return connector on the On-Board 8F Cryopump for 300mm PVD. 6. Connect the Gas Supply Line to the system helium manifold and then to the Gas Supply connector on the On-Board 8F Cryopump for 300mm PVD. 7. Refer to Section 4, Operation. 8040600 Brooks Automation 4-10 Revision A... - Page 53 TURN WITH 1 3/16 INCH WRENCH HOLD WITH 1 INCH WRENCH HOLD WITH 1 1/8 INCH WRENCH TURN WITH 1 3/16 INCH WRENCH TO LOOSEN Figure 4-4: Proper Connection/Disconnection Technique for Helium Line Couplings Brooks Automation 8040600 4-11 Revision A...
- Page 54 Installation High Capacity Helium Compressor Multiple On-Board 8F Cryopump for 300mm PVD Flexline Connections Manual This Page Left Blank Intentionally 8040600 Brooks Automation 4-12 Revision A...
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Page 55: Adjusting System Helium Pressure
Replacement of Helium Circuit Components ......5-3 Adjusting System Helium Pressure The CTI-CRYOGENICS On-Board 8F Cryopump for 300mm PVD system is comprised of several pressurized components i.e. High Capacity Helium Compressor, flex lines, and On-Board 8F Cryopumps for 300mm PVD. -
Page 56: Static Helium System Pressure Verification
2. Set the Control Circuit Breaker to the ON (DOWN) position. 3. Close all Cryopump gate valves. 4. Refer to the On-Board 8F Cryopump for 300mm PVD Installation, Operation and Maintenance Instructions CTI-CRYOGENICS P/N 8040509 (that came with your cryopump) and perform the Cryopump start-up procedure. -
Page 57: Shutdown
Cryopumps for 300mm PVD, helium gas lines or High Capacity Helium Compressors, or change the configuration of the system. Whenever any of these conditions occur, Static Helium System Pressure Verification should be performed to ensure that static helium pressure has not changed. Brooks Automation 8040600 Revision A... - Page 58 Operation High Capacity Helium Compressor Static Helium System Pressure Verification Manual This Page Left Blank Intentionally 8040600 Brooks Automation Revision A...
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Page 59: Maintenance
Maintenance Overview This chapter provides maintenance directions for the Brooks Automation Product. Chapter Contents Scheduled Maintenance ..........6-2 Suggested Maintenance Equipment . -
Page 60: Scheduled Maintenance
Torque wrench, 0 to 35 inch-pounds — Refer to Appendix A, Customer Support Information, and contact the local Customer Support Center to obtain the CTI-CRYOGENICS parts listed in this table. Adsorber Replacement Use the following procedure to change the adsorbers every three years. - Page 61 11. Ensure that the pressure gauge reads the proper value as shown in Table 1-4. 12. If additional gas pressure is required, refer to the Adding Helium section below. If gas pressure needs to be reduced, refer to the Reducing Helium Pressure section below. Brooks Automation 8040600 Revision A...
- Page 62 Manual NOTE: The third (top) compressor module is not present in two compressor configurations ADSORBER SELF SEALING COUPLINGS ADSORBER MOUNTING BOLT ADSORBER Figure 6-2: Adsorber Location within the High Capacity Helium Compressor (Rear Panel Removed) 8040600 Brooks Automation Revision A...
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Page 63: Adjusting System Helium Pressure
This procedure ensures that both the regulator and the charging line will be purged of air and that the air trapped in the regulator will not diffuse back into the helium bottle. For best results, CTI-CRYOGENICS suggests a dedicated helium bottle, regulator, and line, which are never separated, for adding helium. - Page 64 9. Shut off the helium pressure regulator on the helium bottle. 10. Remove the charging line from the compressor charge port. 11. Reinstall the flare cap on the compressor charge port. 12. Reinstall the gas charge fitting access panel. 8040600 Brooks Automation Revision A...
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Page 65: Troubleshooting
Technical Inquiries..........7-2 Brooks Automation... -
Page 66: Troubleshooting The High Capacity Helium Compressor
Table 6-1. Technical Inquiries Refer to Appendix A of this manual for a complete list of the CTI-Cryogenics’ world wide customer support centers. System Damage Do not change or modify any High Capacity Helium Compressor internal wiring circuits. Modification of the wiring could damage the High Capacity Helium Compressor or On-Board 8F Cryopump for 300mm PVD system. - Page 67 Customer Sup- port Center. 5) Low Helium Pressure light 1) Return Pressure is below 1) Add Helium. Refer to Add- is lit and the compressor is 140PSI. ing Helium in Section 5 for running. instructions. Brooks Automation 8040600 Revision A...
- Page 68 ON (1) position when to Table 1-2. switched ON. 2) Damaged component in the 2) Refer to Appendix A to High Capacity Helium Com- contact the Customer Sup- pressor power or control cir- port Center. cuit. 8040600 Brooks Automation Revision A...
- Page 69 Restart the compres- sor. Verify adequate phase-to- phase input voltage. Refer to Table 1-2. If the problem occurs again, refer to Appendix A to con- tact the Customer Support Center. Brooks Automation 8040600 Revision A...
- Page 70 2) Damaged component in the 2) Refer to Appendix A to con- High Capacity Helium Com- tact the local Customer Sup- pressor power or control cir- port Center. cuit. 8040600 Brooks Automation Revision A...
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Page 71: Appendices
Overview The following appendices are included to provide the user with a single location for specific information related to the Brooks Automation Product. Contents Appendix A: Customer Support Information ......9-2 Customer Support Center Locations. -
Page 72: Appendix A: Customer Support Information
Appendix A: Customer Support Information Customer Support Center Locations To locate a Customer Support Center near you, please visit our website www.brooks.com on the world wide web and select CONTACT on the home page. Guaranteed Up-Time Support (GUTS ® For 24-hour, 7-day per week Guaranteed Up-Time Support (GUTS) dial:... - Page 73 This appendix contains the various harware, wiring and Helium flow diagrams. Females (sockets) Males (pins) Figure B-1: Logic Module Connector P2 Pinout Diagram Table B-1: P2 Wiring Data Signal Wire Color Drain Bare Black CAN_H White CAN_L Blue Brooks Automation 8040600 Revision A...
- Page 74 Appendices High Capacity Helium Compressor Appendix B: Diagrams Operations Manual CRYO COMPRESSOR SWITCH REF. AMAT# 0150-201160 FROM MAIN AC REF. AMAT# 0150-20578 EMO IN EMO OUT Figure B-2: EMO Connector Schematic 8040600 Brooks Automation Revision A...
- Page 75 Appendices Operations Manual Appendix B: Diagrams Contactor Circuit Board Pump Motor Module Overload 5 VDC 24 VDC Power Power Supplies RESET BUTTON Supply Phase Monitor Figure B-3: Tower Compressor Electrical Chassis Top View (Cover Removed) Brooks Automation 8040600 Revision A...
- Page 76 ARE THE PROPERTY OF SECTION 602 OF THE FEDERAL CLEAN SECTION 602 OF THE FEDERAL CLEAN ANGLE +/- ANGLE +/- CTI-CRYOGENICS AND MUST CTI-CRYOGENICS AND MUST AIR ACT (42 USC SECTION 7671A) AIR ACT (42 USC SECTION 7671A) TWO PLACE DEC +/-...
- Page 77 High Capacity Helium Compressor Appendices Operations Manual Appendix B: Diagrams Table B-1: Helium Flow Diagram - Three Modules Brooks Automation 8040600 Revision A...
- Page 78 Appendices High Capacity Helium Compressor Appendix B: Diagrams Operations Manual Figure B-5: Low Voltage Electrical Schematic 8040600 Brooks Automation Revision A...
- Page 79 High Capacity Helium Compressor Appendices Operations Manual Appendix B: Diagrams Figure B-6: High Voltage Electrical Schematic Brooks Automation 8040600 Revision A...
- Page 80 Appendices High Capacity Helium Compressor Appendix B: Diagrams Operations Manual This Page Intentionally Left Blank 8040600 Brooks Automation 8-10 Revision A...
- Page 81 Electrical box rear panel 1-13 verifying Electrical specifications High capacity helium compressor 1-18 Emergency off button 1-12 High voltage electrical schematic 1-12 EMO Connector Schematic EMO connector schematic ID switch 1-14 EMO In 1-15 EMO Out 1-15 Brooks Automation 8040600 Index-1 Revision A...
- Page 82 Water lines, hard Power on indicator 1-12 installing Water Out connector 1-16 Weight Wheel assemblies Refrigeration system removing Return pressure gauges 1-16 Wiring data Reverse phase indicator 1-15 RS-232 cables connecting RS-232 port 1-13 8040600 Brooks Automation Index-2 Revision A...