Brooks CTI-Cryogenics Manuals

Manuals and User Guides for Brooks CTI-Cryogenics. We have 1 Brooks CTI-Cryogenics manual available for free PDF download: Installation, Operation And Maintenance Instructions

Brooks CTI-Cryogenics Installation, Operation And Maintenance Instructions

Brooks CTI-Cryogenics Installation, Operation And Maintenance Instructions (82 pages)

High Capacity Helium Compressor

Brand: Brooks | Category: Air Compressor | Size: 4.31 MB

Table of Contents

Table of Contents
3
Figures

7
Tables

9
Introduction

11
Chapter Contents

13
- CTI-CRYOGENICS Helium Refrigeration System
  13
- Specifications
  15
  - Dimensions
    15
  - Weight
    16
  - Electrical
    16
  - Cooling Water
    17
  - General
    19
- Electrical Box Front Panel Component Description
  21
  - Low Helium Pressure
    21
  - Power on
    22
  - Cb2
    22
  - Module 1, 2, and 3 Status Indicators
    22
  - Emergency off Button
    22
  - Supply Pressure Gauge
    22
- Electrical Box Rear Panel Component Description
  23
  - Logic Module Panel
    23
  - LED Indicator
    23
  - P2 and MNS LED
    24
  - Mac ID
    24
  - CCJ1/CCP2 Connectors
    25
  - Reverse Phase
    25
  - Main Circuit Breaker
    25
- High Capacity Helium Compressor Rear Panel Component Description
  26
  - Helium in Return
    26
  - Helium out Supply
    26
  - Water out
    26
  - Water in
    26
  - Return Pressure Gauges
    26
  - Helium Charge
    26
- Typical On-Board 8F Cryopump for 300Mm PVD System
  28
Safety

31
Chapter Contents

32
- Introduction
  32
- Signal Word Descriptions
  33
- Safety Shape Descriptions
  34
- References
  34
Unpacking and Inspection

35
Installation

43
Chapter Contents

44
Operation

55
- Adjusting System Helium Pressure
  55
- Static Helium System Pressure Verification
  56
  - Start-Up
    56
  - Shutdown
    57
  - Replacement of Helium Circuit Components
    57
Maintenance

59
Chapter Contents

60
- Scheduled Maintenance
  60
  - Suggested Maintenance Equipment
    60
  - Adsorber Replacement
    60
- Adjusting System Helium Pressure
  63
  - Reducing Helium Pressure
    63
  - Increasing Helium Pressure
    63
  - Adding Helium
    63
Troubleshooting

65
- Troubleshooting the High Capacity Helium Compressor
  66
  - Technical Inquiries
    66
Appendices

71
Appendix A: Customer Support Information

72
- Customer Support Center Locations
  72
- Guaranteed Up-Time Support (GUTS ® )
  72
- Product Information
  72
- E-Mail
  72

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