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Brooks 8600 Installation, Operation And Maintenance Manual

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8600 Compressor
Installation, Operation and
Maintenance Manual
8040707 Revision A

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Summary of Contents for Brooks 8600

  • Page 1 8600 Compressor Installation, Operation and Maintenance Manual 8040707 Revision A...
  • Page 2 © 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.

  • Page 3: Table Of Contents

    Compressor Description BROOKS-Cryogenics Helium Refrigeration System ......2-3 Specifications ............2-4 Dimensions .
  • Page 4 Installing Flexible Water Lines........4-6 Electrical Connections for Type 01 8600 Compressor ..... . .4-7 Electrical Connections for Type 02 8600 Compressor .
  • Page 5 Technical Inquiries..........7-6 8600 Compressor Error Messages ........7-6 Troubleshooting when the NORMAL/C20 Switch is Set to NORMAL .
  • Page 6 Contents 8600 Compressor Installation, Operation and Maintenance Manual This Page Intentionally Left Blank 8040707 Brooks Automation Revision A...

  • Page 7: Figures

    Helium Pressure Control Components, Type 02 Shown ....6-9 8600 Compressor Flow Diagram ........7-4...
  • Page 8 Remote/Response Pin Assignments, Type 02......7-19 8600 Compressor Electrical Schematic......7-21...
  • Page 9 Suggested Maintenance Equipment ....... .6-2 8600 Compressor Safety Devices ........7-5 Alarm Status Table.
  • Page 10 Tables 8600 Compressor Installation, Operation and Maintenance Manual This Page Intentionally Left Blank 8040707 Brooks Automation viii Revision A...

  • Page 11: Safety

    Installation, Operation and Maintenance Manual Safety Overview This section describes safety conventions for the Brooks Automation Product. All personnel involved in the operation or maintenance of the product must be familiar with the safety precautions outlined in this section. NOTE: These safety recommendations are basic guidelines. If the facility where the Prod- uct is installed has additional safety guidelines they should be followed as well, along with the applicable national and international safety codes.

  • Page 12: Introduction

    BROOKS-Cryogenics products. This chapter explains the safety conventions used throughout this manual. BROOKS-Cryogenics uses a specific format for cautions and warnings, which includes standard signal words and safety shapes. See also the Customer Support appendix or call your local Customer Support Center for assistance.

  • Page 13: Signal Word Descriptions

    8600 Compressor Safety Installation, Operation and Maintenance Manual Signal Word Descriptions Signal Word Descriptions All cautions and warnings contain signal words, which call attention to safety mes- sages and designate the degree of hazard seriousness. The following table shows the signal words and their meanings that may be used in this document.

  • Page 14: Safety Shape Descriptions

    Safety 8600 Compressor Safety Shape Descriptions Installation, Operation and Maintenance Manual Safety Shape Descriptions All cautions and warnings contain safety shapes, which have specific safety mean- ings. The following table shows some of the safety shapes used in this document and their meanings.

  • Page 15: Compressor Description

    Chapter Contents BROOKS-Cryogenics Helium Refrigeration System ......2-3 Specifications ............2-4 Dimensions .
  • Page 16 Compressor Description 8600 Compressor Installation, Operation and Maintenance Manual Cooling Water OUTLET ......... .2-21 Helium Gas Charge Control Valve .

  • Page 17: Brooks-Cryogenics Helium Refrigeration System

     BROOKS-Cryogenics Helium Refrigeration System NOTE: The 8600 Compressor, part number 8175001G001, supports a single Cryo-Torr 20HP Cryopump. The operation of BROOKS-Cryogenics cryopumps is based upon a closed loop helium expansion cycle. The system is made up of two major components: the cryopump, which contains the cold head, and the helium Compressor which compresses the helium gas.

  • Page 18: Specifications

    Compressor Description 8600 Compressor Specifications Installation, Operation and Maintenance Manual Specifications Dimensions Figure 2-2 shows the side and front dimensions of the 8600 Compressor. Figure 2-4 on page 2-6 shows the rear dimensions of the 8600 Compressor. 17.83” 20.08” (453 MM)
  • Page 19 HELI X TECHNOLOGY CORPORATI O N 8600 Compressor 370 MM Figure 2-3: 8600 Compressor Side and Front Dimentions, Type 02 Equipment Damage To avoid damaging the compressor, do not place a weight greater than 75 pounds on top of the 8600 Compressor.
  • Page 20 Compressor Description 8600 Compressor Specifications Installation, Operation and Maintenance Manual 2.24” (57MM) 13.54” (344MM) 8.15” (207MM) 2.99” (76 MM) 4.72” (120 MM) 2.24” 57 MM Figure 2-4: 8600 Compressor Rear Dimensions, Type 01 8040707 Brooks Automation Revision A...

  • Page 21: Weight

    (344MM) 8.15” (207MM) 2.99” (76 MM) 4.72” (120 MM) 2.24” 57 MM Figure 2-5: 8600 Compressor Rear Dimentions, Type 02 Weight 269 lbs (122kg) Electrical Table 2-1: Electrical Input Specifications Parameter Value Operating Voltage Range 190 - 220VAC @ 50Hz...

  • Page 22: Cooling Water

    Type 02: 17A (50Hz), 21A (60Hz) Minimum Electrical Service 30 Amps Cooling Water The water used to cool the 8600 Compressor must meet the specifications shown in Table 2-2 for proper system operation. The correct pressure drop (illustrated in Figure...
  • Page 23 NOTE: Figure 2-6 defines the water flow rate through the 8600 Compressor as a function of the pressure drop from water inlet to water outlet. You must provide the correct pressure drop in your water supply system to ensure that the water flow condition...

  • Page 24: General

    Ambient Operating 50 - 100º F (10 - 38º C) Temperature Range Interface Cryo-Torr 20HP Cryopump Power Receptacles: mates with the BROOKS-Cryogenics supplied cryopump power cable for single pump use. Gas Supply Connector 1/2 in. Aeroquip self-sealing coupling Gas Return Connector 1/2 in.

  • Page 25: Component Description

    8600 Compressor Compressor Description Installation, Operation and Maintenance Manual Component Description Component Description The following figure shows the 8600 Compressor components accessible from the front panel. Figure 2-9 on page 2-13 shows the 8600 rear panel components. ON/OFF RESET SWITCH...
  • Page 26 (BEHIND FRONT PANEL) CASTERS Figure 2-8: 8600 Compressor Front View Component Locations, Type 02 NOTE: To turn the compressor on and off with the Reset Switch, you must use the allen wrench provided with the compressor, part number 7024020P001. See...
  • Page 27 CONTROLLER BACK POWER CONNECTOR HELIUM SUPPLY LINE COUPLING COMPRESSOR REMOTE CONNECTOR HELIUM RETURN LINE COUPLING COOLING WATER INLET (3/8 FPT) COOLING WATER OUTLET (3/8 FPT) Figure 2-9: 8600 Compressor Rear View Component Locations, Type 01 Brooks Automation 8040707 Revision A 2-13...

  • Page 28: Controller Front Panel Components

    WATER OUT COOLING WATER INLET (3/8 FPT) COOLING WATER OUTLET (3/8 FPT) Figure 2-10: 8600 Compressor Rear View Component Locations, Type 02 Controller Front Panel Components The 8600 Compressor controller on the front panel (see Figure 2-11 on page 2-15) enables the user to control and monitor the 8600 Compressor.
  • Page 29 Installation, Operation and Maintenance Manual Component Description Figure 2-11: 8600 Compressor Controller Front Panel, Type 01 C30PVRT Figure 2-12: 8600 Compressor Controller Front Panel, Type 02 The following sections describe each of the 8600 Compressor Controller front panel components. Brooks Automation 8040707 Revision A...
  • Page 30 Power Indicator (Type 01 Only) The Power indicator illuminates when the ON/OFF switch is placed in the ON position. The 8600 Compressor pump is energized when the power indicator is illuminated and the elapsed time meter records system operation time.

  • Page 31: Controller Back Panel Components

    The RDY light appears. Controller Back Panel Components The 8600 Compressor Controller on the back panel (see the following figure) enables the user to make connections to and set the operation mode for the 8600 Compressor. NORMAL/C20 Switch L/H Non-functional...
  • Page 32 NO. 3 RESPONSE Figure 2-14: 8600 Compressor Controller Back Panel, Type 02 Each of the 8600 Compressor Controller back panel components are described in the following sections. Circuit Protector (Inside the Panel, Type 02 Only) Applies current to the compressor unit, and is normally turned ON. To turn OFF the circuit protector, remove the rear panel of the compressor unit, and turn OFF the near side circuit protector.

  • Page 33: Fuse Panel, Type 01

    L/H Switch (Type 01 Only) This switch is non-functional with this compressor model. Normal/C20 Switch (Type 01 Only) This switch enables you to select the input signal when you operate the 8600 Com- pressor. The switch has two settings: •...

  • Page 34: Cooling Water Inlet

    The following sections describe each 8600 Compressor circuit protector. CP1 Circuit Protector (manual reset) The CP1 breaker lever shuts off power to the 8600 Compressor if any line in the com- pressor circuitry is shorted. You can power on the 8600 Compressor by lifting up the CP1 breaker lever on the fuse panel.

  • Page 35: Cooling Water Outlet

    2-8. Cooling Water OUTLET The Cooling Water OUTLET connector returns the water that has been used to cool the 8600 Compressor to your facility. The connector thread size is a 3/8 in. female pipe thread. Cryopump Electrical Outlet The electrical outlet provides 3-phase power to a single Cryo-Torr 20HP Cryopump.

  • Page 36: Helium Return Line Coupling

    Helium Return Line Coupling The ½-inch self-sealing Helium Return Line coupling returns the helium (which has been cycled through the Cryo-Torr 20HP Cryopump) back to the 8600 Compressor. Helium Supply Line Coupling The ½-inch self-sealing Helium Supply Line coupling provides a connection for high pressure compressed helium to the Cryo-Torr 20HP Cryopump cold head.
  • Page 37 The Elapsed Time Meter/Error Message Display has two functions: • Elapsed Time Meter - during normal operation, the meter records the number of hours the 8600 Compressor has been operating since being turned on for the first time. • Error Message Display (Type 01 Only) - when an error condition occurs, this indicator shows an error message on the display.
  • Page 38 Compressor Description 8600 Compressor Component Description Installation, Operation and Maintenance Manual This Page Intentionally Left Blank 8040707 Brooks Automation 2-24 Revision A...
  • Page 39 Installation, Operation and Maintenance Manual Unpacking and Inspection Overview This section provides instructions for unpacking and inspecting your 8600 Compres- sor. Chapter Contents Shipping Carton Inspection ..........3-2 Compressor Inspection .

  • Page 40: Shipping Carton Inspection

    3-3 for a list of the shipping contents. Compressor Inspection Inspect the 8600 Compressor for visible signs of damage as indicated in the following sections. Compressor Inspect the exterior of the 8600 Compressor for visible signs of damage and evidence of an oil leak, and check the Helium Pressure Gauge for proper helium pressure.

  • Page 41: Shipping Carton Contents

    Allen wrench, part number 7024020P001 8600 Compressor Quick Installation Guide part number 8040705 for 8175001G001 or  8040743 for 8175001G003 8600 Installation, Operation, and Maintenance Instructions part number 8040707 NOTE: *The cable length must be specified by the customer at the time of purchase.
  • Page 42 Unpacking and Inspection 8600 Compressor Shipping Carton Contents Installation, Operation and Maintenance Manual This Page Intentionally Left Blank 8040707 Brooks Automation Revision A...

  • Page 43: Installation

    Installing Flexible Water Lines........4-6 Electrical Connections for Type 01 8600 Compressor ..... . .4-7 Connecting and Disconnecting Helium Flex Lines.

  • Page 44: Installation Tasks

    Connections on page 4-4 Electrical Connections on 4-7. Connecting and Discon- necting Helium Flex Lines on page 4-11 Cryo-Torr 20HP Cryopump Connections on page 4-14 Pre-operation Checklist on page 4-16 Figure 4-1: 8600 Compressor Installation Flowchart 8040707 Brooks Automation Revision A...

  • Page 45: Environmental Specifications

    Environmental Specifications Environmental Specifications Install the 8600 Compressor in an environment that meets the specifications listed in the following table, and that receives little or no resistant electromagnetic waves or dust. Dust on the electric terminal can cause leakage or short-circuiting.

  • Page 46: Supply And Return Water Line Connections

    Prerequisites to Installing Supply and Return Water Line Connections Brooks BROOKS-Cryogenics recommends the following prior to connecting water lines to the 8600 Compressor: • The water used for cooling the 8600 Compressor must meet the specifi- cations outlined in Table 2-2 on page 2-8 •...

  • Page 47: Installing Hard Water Lines

    To avoid damaging the input and output connector threads, do not over tighten the ferrules. Using a wrench, tighten the fittings. Allow water to flow and check for leaks at the rear of the 8600 Compressor. Brooks Automation 8040707 Revision A...

  • Page 48: Installing Flexible Water Lines

    Apply a light coating of standard plumbing thread sealant to the water line fit- ting threads. Install the water line fittings into the Cooling Water Inlet and Cooling Water Outlet connections on the rear panel of the 8600 Compressor. Equipment Damage To avoid damaging the input and output connector threads, do not over tighten the ferrules.

  • Page 49: Electrical Connections For Type 01 8600 Compressor

    8600 Compressor Installation Installation, Operation and Maintenance Manual Electrical Connections for Type 01 8600 Compressor Electrical Connections for Type 01 8600 Compressor The input power cable is supplied with the compressor. Refer to Table 2-1 on page 2- for power specifications.

  • Page 50: Electrical Connections For Type 02 8600 Compressor

    4-9. Connect the compressor input power cable from the compressor to a power source. This controls the On/Off operation for the compressor. NOTE: A high voltage transformer is available from BROOKS-Cryogenics if you use more than 208V. 8040707 Brooks Automation...

  • Page 51: Wiring Procedure For Remote Connector

    8600 Compressor Installation Installation, Operation and Maintenance Manual Electrical Connections for Type 02 8600 Compressor Wiring Procedure for Remote Connector The instructions in this section refer to Figure 4-3. Also see Remote/Response Wiring on page 7-18. Figure 4-3: Connector Parts Loosen the set screw for fixing the endbell in counter clockwise, and take it off from the connector body by turning the endbell.
  • Page 52 Installation 8600 Compressor Electrical Connections for Type 02 8600 Compressor Installation, Operation and Maintenance Manual Installing the Connector Install the endbell to the barrel by turning it. Turn the set screw in clockwise and fix the endbell. Install the clamp saddle.

  • Page 53: Connecting And Disconnecting Helium Flex Lines

    Connecting and Disconnecting Helium Flex Lines Connecting and Disconnecting Helium Flex Lines The following subsections describe how to connect and disconnect the 8600 Compressor helium flex lines. Specifications for flexible helium lines are listed in the following table. Equipment Damage...
  • Page 54 Connect one end of the Helium Supply Line to the Helium Supply connector on the rear of the 8600 Compressor, and connect the other end to the Gas Sup- ply connector on the 20HP Cryopump. Tighten the connection by using a 1 1/...

  • Page 55: Disconnecting Helium Flex Lines

    Wait until the 20HP Cryopump is warmed up to room temperature prior to disconnecting the flexible lines from the Helium Return and Helium Supply connectors at the rear of the 8600 Compressor. However, if you are performing a helium circuit decontamination procedure, immediately disconnect the flexi- ble lines from the Helium Return and Helium Supply connectors when the pump is cold.

  • Page 56: Cryo-Torr 20Hp Cryopump Connections

    Cryo-Torr 20HP Cryopump Connections Installation, Operation and Maintenance Manual Cryo-Torr 20HP Cryopump Connections The following procedure describes how to connect the Cryo-Torr 20HP Cryopump to the 8600 Compressor. Refer to Figure 4-5 on page 4-14 for connections described in the procedure.
  • Page 57 Installation Installation, Operation and Maintenance Manual Cryo-Torr 20HP Cryopump Connections Connect the Supply and Return lines to the 8600 Compressor as described in Connecting and Disconnecting Helium Flex Lines. Connect the appropriate end of the coldhead power cable to the Cold Head...

  • Page 58: Pre-Operation Checklist

    Adjusting System Helium Pressure on page 6-6 to add or remove helium from the compressor. The following procedure describes how to set up the 8600 Compressor prior to oper- ation: Make sure that the input power requirements are within the specified values...
  • Page 59 Adjusting System Helium Pressure on page 6-6 to add or remove helium from the compressor. After you have verified the final checklist (the previous steps), you are ready to oper- ate the 8600 Compressor and refrigerator. Brooks Automation 8040707 Revision A...

  • Page 60: 8600 Compressor Storage

    Periodically check the helium gas pressure. If the indicated pressure falls and remains below the minimum static pressure, call the BROOKS-Cryogenics Customer Support center. NOTE: If the 8600 Compressor is not used for three or more months, operate the compres- sor at least once during that time. Equipment Damage To avoid damaging the compressor while shipping, package the compressor the same way in which it was originally shipped.

  • Page 61: Operation

    Operation Overview This chapter provides the operation procedures for the 8600 Compressor. Chapter Contents Adjusting System Helium Pressure ........5-2 "OFF"...

  • Page 62: Adjusting System Helium Pressure

    After cool down, the normal system operating pressure is recorded. NOTE: The 8600 Compressor is designed for continuous operation and should remain ON even when the cryopumps are in regeneration.

  • Page 63: Off" Condition Helium System Pressure Verification

    Figure 2-9 on page 2-13. Compare the gauge reading to the appropriate 50/60 Hz line frequency value in the following table. Table 5-1: 8600 Compressor Helium ("OFF" Condition) Charge Line Frequency Helium ("OFF" Condition) Charge Pressure 50/60 Hz 200 ±...

  • Page 64: Compressor Operation

    Before using the compressor, do the following: Check the input power requirements, as specified in Specifications on page 2-4. Set the LOCAL/REMOTE switch for Type 01 8600 Compressors. See Control- ler Front Panel Components on page 2-14 for more information.

  • Page 65: Turn On The Type 01 Compressor

    Compressor Operation Turn On the Type 01 Compressor The following procedure describes how to turn on the 8600 Compressor, Type 01: Press the ON/OFF key on the front control panel (for Type 01) to turn on the 8600 Compressor, and to start cryopump operation.

  • Page 66: Turn Off The Type 02 Compressor

    Turn Off the Type 02 Compressor The following procedure describes how to turn off the 8600 Compressor, Type 02: Ensure the compressor is in Local mode by following the instructions in the previous section.
  • Page 67 8600 Compressor Operation Installation, Operation and Maintenance Manual Compressor Operation The compressor pressure reading decreases from the normal system operating pres- sure during cryopump regeneration, or if you operate fewer cryopumps. These are normal variations in the compressor pressure. If you have concerns about system performance changing, then check the normal sys-...

  • Page 68: Secondary Power: Cp1 Breaker And Troubleshooting Diagnostic Problems

    Observe the following precautions when powering up the 8600 Compressor. • You can power on the 8600 Compressor by lifting up the (CP1) breaker lever on the fuse panel. DO NOT switch the breaker lever to OFF immediately after turning on the compressor. If you switch the compressor off too soon, the diag- nostic tests will fail, the LCD digits on the Error Display will display a series of black dots, and the alarm will sound continuously.

  • Page 69: Replacement Of Helium Circuit Components

    NOTE: If you use the 8600 Compressor on the same manifold as other BROOKS-Cryogen- ics compressors, reduce the helium charge pressure to 200 - 210 psig. This prevents the helium safety valves from opening.
  • Page 70 Operation 8600 Compressor Replacement of Helium Circuit Components Installation, Operation and Maintenance Manual This Page Intentionally Left Blank 8040707 Brooks Automation 5-10 Revision A...
  • Page 71 8600 Compressor Installation, Operation and Maintenance Manual Maintenance Overview This chapter explains the regularly scheduled maintenance recommended for 8600 Compressors. Chapter Contents Scheduled Maintenance ..........6-2 Suggested Maintenance Equipment .

  • Page 72: Scheduled Maintenance

    Oakite or equivalent detergent soap Denatured alcohol Refer to Appendix A: Customer Brooks Automation Technical Support Information on and contact the local Customer Support Center to obtain the BROOKS- page 7-2 Cryogenics parts listed in this table. Adsorber Replacement Use the following procedure to change the adsorber every 24,000 hours.
  • Page 73 (lock-out and tag-out). Disconnect the flexible lines from the Helium Return and Helium Supply con- nectors at the rear of the 8600 Compressor. Using an open-ended wrench, remove the two rear panel jam nuts.
  • Page 74 Maintenance 8600 Compressor Scheduled Maintenance Installation, Operation and Maintenance Manual To Tighten Coupling Halves Turn here with Hold here with 1 3/16 inch wrench 1 1/8 inch wrench Hold here with Turn here with 1 1/8 inch wrench 1 3/16 inch wrench Use the 1 1/8 in.
  • Page 75 Install the 8600 Compressor rear panel and secure the panel by inserting and tightening the seven (7) screws removed earlier in this procedure. Ensure that the helium pressure gauge reads 1.4+0.04MPa (gage) as shown in Table 5-1 on page 5-3.

  • Page 76: Adjusting System Helium Pressure

    NOTE: The procedures in the following subsections can be performed on an 8600 Compressor that has its ON/OFF switch in either the ON or OFF position. The helium pressure gauge should be set to: •...
  • Page 77 8600 Compressor Maintenance Installation, Operation and Maintenance Manual Adjusting System Helium Pressure Figure 6-4: Component Locations Behind Front Panel Brooks Automation 8040707 Revision A...

  • Page 78: Reducing Helium Pressure

    Compressor Operation on page 5-4. • If the normal helium system pressure is unknown, then place the ON/ OFF switch for the 8600 Compressor in the OFF position and perform the procedure in "OFF" Condition Helium System Pressure Verification on page 5-3 instead.

  • Page 79: Increasing Helium Pressure

    • The appropriate value Table 5-1 on page 5-3 if the 8600 Compressor is OFF and acclimated to a temperature between 60º F and 80º F (15.5º C - 26.6º C). • The value previously recorded in Compressor Operation on page 5-4 the 8600 Compressor is ON.
  • Page 80 Compressor Operation on page 5-4 in order to perform this procedure. If the normal helium system pressure is unknown, then place the 8600 Compressor ON/OFF switch in the OFF position and perform the procedure in "OFF" Condition Helium System Pressure Verification on page 5-3 instead.
  • Page 81 Set the two-stage regulator to 290psi (2MPa) (gage). If the 8600 Compressor ON/OFF switch is in the ON position, proceed to the next step. If the 8600 Compressor ON/OFF switch is in the OFF position, pro- ceed to...
  • Page 82 Step NOTE: To avoid opening the safety relief valves, add the helium slowly. Ensure that the helium charge valve on the 8600 Compressor is tightly closed. Shut off the helium pressure regulator on the helium bottle and remove the charging line from the male flare fitting. Then reinstall the flare cap.

  • Page 83: Appendices

    Appendix C: Troubleshooting Procedures....... . .7-6 8600 Compressor Error Messages ........7-6 Troubleshooting when the NORMAL/C20 Switch is Set to NORMAL .

  • Page 84: Appendix A: Customer Brooks Automation Technical Support Information

    Appendix A: Customer Brooks Automation Technical Support Information Installation, Operation and Mainte- Appendix A: Customer Brooks Automation Technical Support Information When contacting Brooks Automation for Technical Support, please have the follow- ing information available. Record the part number and serial number from the equipment.

  • Page 85: Appendix B: Flow Diagram

    Appendix B: Flow Diagram Appendix B: Flow Diagram The 8600 Compressor flow diagram is shown in the following figure. The flow through the compressor starts when low-pressure helium gas returning from the cryopump cold head enters the compressor. A small quantity of oil is injected into the gas stream.
  • Page 86 Appendices 8600 Compressor Appendix B: Flow Diagram Installation, Operation and Maintenance Manual Figure 7-1: 8600 Compressor Flow Diagram 8040707 Brooks Automation Revision A...
  • Page 87 8600 Compressor Appendices Installation, Operation and Maintenance Manual Appendix B: Flow Diagram Table 7-1: 8600 Compressor Safety Devices Name Function Specification Pressure Located in the helium supply line and operates auto- 2.55MPa Relief matically when the pressure exceeds the specified...

  • Page 88: Appendix C: Troubleshooting Procedures

    8600 Compressor Error Messages When error messages appear on the front panel elapsed time meter/error message display of the 8600 Compressor (see display in the following figure), perform one of the these procedures according to the NORMAL/C20 switch setting: •...

  • Page 89: Troubleshooting When The Normal/C20 Switch Is Set To Normal

    Appendix C: Troubleshooting Procedures ELAPSED TIME METER/ ERROR MESSAGE DISPLAY Figure 7-2: 8600 Compressor Elapsed Time Meter/Error Message Display, Type 01 Troubleshooting when the NORMAL/C20 Switch is Set to NORMAL Perform the following procedure if an error message appears on the elapsed time...

  • Page 90: Troubleshooting When The Normal/C20 Switch Is Set To C/20

    NOTE: For your convenience, there is an operating log (Table 7-3 on page 7-12) that you can use to log significant statistical events related to your 8600 Compressor. High Voltage To avoid high voltage electric shock, turn off all electrical power to the compressor before performing this procedure.
  • Page 91 To avoid burns, do not perform any work on the compressor untils it cools down after you turn it off. Equipment Damage To avoid damaging the compressor and cryopump, do not modify any internal wiring circuits on the compressor. Table 7-2: 8600 Compressor Error Messages Message Possible Cause Corrective Action COOLING Thermal switch Check the cooling water requirements.
  • Page 92 Appendices 8600 Compressor Appendix C: Troubleshooting Procedures Installation, Operation and Maintenance Manual Table 7-2: 8600 Compressor Error Messages Message Possible Cause Corrective Action Cir PROTEC- Circuit Protector Turn on the Cir P2. Contact the customer TOR-2 (CP2) operates. support center.
  • Page 93 8600 Compressor Appendices Installation, Operation and Maintenance Manual Appendix C: Troubleshooting Procedures Hot Surface To avoid burns, do not perform any work on the compressor untils it cools down after you turn it off. Equipment Damage To avoid damaging the compressor and cryopump, do not modify any internal wiring circuits on the compressor.
  • Page 94 Appendices 8600 Compressor Appendix C: Troubleshooting Procedures Installation, Operation and Maintenance Manual Table 7-3: Operating Log Cryopump S/N CRYO-TORR Date OPERATING LOG Compressor Unit S/N Person Cold Head S/N Room Temp. °F Power VX Ø Time Compressor Unit Cryopump Remarks...

  • Page 95: Appendix D: Troubleshooting Procedures, Type 02 Only

    8600 Compressor Appendices Installation, Operation and Maintenance Manual Appendix D: Troubleshooting Procedures, Type 02 Only Appendix D: Troubleshooting Procedures, Type 02 Only These troubleshooting procedures apply to Tyoe 02 compressors only. See the previ- ous sections for Type 01 and Type 02 troubleshooting procedures.

  • Page 96: Alarm Code Description

    Appendices 8600 Compressor Appendix D: Troubleshooting Procedures, Type 02 Only Installation, Operation and Maintenance Manual High Voltage To avoid high voltage electric shock, only qualified personnel should access the electrical connections for the compressor. Alarm Code Description Reverse Phase, Low Volt (Improper Phase Sequence, Lower Voltage) Detect reverse phase or lower voltage of AC mains.
  • Page 97 OL1 Comp. Over Current (Overload, or Phase Loss) Alerts when over-current and/or phase loss of compressor are detected. Refer Appendix E: Electrical Schematic for the 8600 Compressor on page 7-17 OL1. Check the helium pressure, and then open controller and check the set-point of OL1.
  • Page 98 Appendices 8600 Compressor Appendix D: Troubleshooting Procedures, Type 02 Only Installation, Operation and Maintenance Manual Controller Fault Control module always checks the hardware for the safety operation. The alert indicates MC fault during running operation, loosened wiring in controller. When the alert occurrs, turn OFF power of the compressor unit and check the loosened wirings if it is possible.

  • Page 99: Appendix E: Electrical Schematic For The 8600 Compressor

    Installation, Operation and Maintenance Manual Appendix E: Electrical Schematic for the 8600 Compressor Appendix E: Electrical Schematic for the 8600 Compressor Introduction The following schematic supports the 8600 Compressor, part number 8175G001. Table 7-4: Basic Control Assembly Legend Identifie Name...

  • Page 100: Remote/Response Wiring

    Appendices 8600 Compressor Appendix E: Electrical Schematic for the 8600 Compressor Installation, Operation and Maintenance Manual Remote/Response Wiring The interface for remote operation is shown in the following figure. You can select input signal 1 or 2 by selecting the front panel NORMAL/C20 switch, respectively. To cancel the failure message, press the RESET switch on the front panel.
  • Page 101 8600 Compressor Appendices Installation, Operation and Maintenance Manual Appendix E: Electrical Schematic for the 8600 Compressor Figure 7-5: Remote Connections, Type 02 Figure 7-6: Remote/Response Pin Assignments, Type 02 Brooks Automation 8040707 Revision A 7-19...
  • Page 102 Appendices 8600 Compressor Appendix E: Electrical Schematic for the 8600 Compressor Installation, Operation and Maintenance Manual Table 7-5: Response (No-Voltage/Dry Contact) Item Pin Number Status 10-11 Alarm Table 7-6: System Response/Failure Response Max. Switching Capacity Parameter Resistive Load Inductive Load...
  • Page 103 8600 Compressor Appendices Installation, Operation and Maintenance Manual Appendix E: Electrical Schematic for the 8600 Compressor Figure 7-7: 8600 Compressor Electrical Schematic Brooks Automation 8040707 Revision A 7-21...
  • Page 104 Appendices 8600 Compressor Appendix E: Electrical Schematic for the 8600 Compressor Installation, Operation and Maintenance Manual This Page Intentionally Left Blank 8040707 Brooks Automation 7-22 Revision A...

  • Page 105: Index

    Adsorber Replacement 2-23, 2-23 Electrical Connections 4-7, 4-7, Environmental Specifications Error Message Display 2-23 Basic Control Assembly Legend 7-17 Error Messages, 8600 Compressor Display Brooks Automation contact information Front-ii Flow Diagram Cir P2 Circuit Protector 2-20 Compressor Clearance Requirements Fuse Panel...
  • Page 106 7-12 Operating the Compressor Power Connector 2-22 Power Indicator 2-16 Power Inlet 2-22 Powering On the 8600 Compressor and Troubleshooting Diagnostic Prob- lems Prerequisites to Installing Supply and Re- turn Water Line Connections Procedures Compressor Troubleshooting Reducing Helium Pressure Ref Fuse...

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