Related Manuals for Brooks 8200
Summary of Contents for Brooks 8200
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Page 1: Service Instructions
8200 Compressor Installation, Operation and Service Instructions 8040353 Revision AA... - Page 2 © 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
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Page 3: Table Of Contents
8200 Compressor Contents Installation, Operation, and Service Instructions Contents Introduction General............. . .1-2 Installation, Operation and Servicing Instructions . - Page 4 Appendix B: Troubleshooting Procedures ....... . .6-3 Appendix C: Electrical Schematics for 8200 Compressor ....6-7...
- Page 5 8200 Compressor Water Cooling Requirements ..... .4-7 Typical 8200 Compressor Installation.......4-10 Adjusting the Self-Sealing Connectors .
- Page 6 Figures 8200 Compressor Installation, Operation, and Service Instructions This Page Intentionally Left Blank 8040353 Brooks Automation Revision AA...
- Page 7 8200 Compressor Tables Installation, Operation, and Service Instructions Tables Power Requirements (Steady-State Conditions) ..... .1-5 General Specifications ..........1-5 Safety Signal Words.
- Page 8 Tables 8200 Compressor Installation, Operation, and Service Instructions This Page Intentionally Left Blank 8040353 Brooks Automation viii Revision AA...
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Page 9: Introduction
8200 Compressor Installation, Operation, and Service Instructions Introduction Overview This chapter describes this manual and the compressor, including specifications. Chapter Contents General............. . .1-2 Installation, Operation and Servicing Instructions . -
Page 10: General
General Installation, Operation, and Service Instructions General The manual provides instructions for installing, operating and servicing the 8200 Compressor. This compressor is available in two versions: air-cooled, part number 8032549G001/G002 and water cooled, part number 803255G001/G002. If you are installing or operating a Cryo-Torr or On-Board System you should also have available the appropriate cryopump or refrigerator. -
Page 11: Installation, Operation And Servicing Instructions
Installation, Operation, and Service InstructionsInstallation, Operation and Servicing In- Installation, Operation and Servicing Instructions Installation, Operation and Servicing Instructions for your 8200 Compressor provide easily accessible information. All personnel with installation, operation, and servicing responsibilities should become familiar with the contents of these instructions to ensure high quality, safe, reliable performance. -
Page 12: Component Locations
Introduction 8200 Compressor Installation, Operation and Servicing InstructionsInstallation, Operation, and Service In- Rear View - Water Cooled Rear View - Air Cooled Front View - Air and Water Cooled LEGEND 10. Cooling Water Output 1. Compressor Input Power Block 11. Cooling Water Input 2. -
Page 13: Power Requirements (Steady-State Conditions)
Compressor input- Recommended type SO-4 conductor, 600V, neoprene power cable jacket and 14-gauge wire. (customer-supplied) Install per Appendix C: Electrical Schematics for 8200 Compressor on page 6-8, Electrical Schematic diagram, ensuring compliance with all national, state and local standards. Helium pressure Static: 245-255 psig (1688-1757 kPa) at 70 to 80°F (21 to... - Page 14 Introduction 8200 Compressor Installation, Operation and Servicing InstructionsInstallation, Operation, and Service In- Table 1-2: General Specifications (Continued) Specification Description Interface Cold head power receptacle: Mates with plug on cold head power cable. On-Board power receptacle: Mates with plug on cold- head power cable.
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Page 15: Safety
Installation, Operation, and Service Instructions Safety Overview This section describes safety conventions for the Brooks Automation Product. All personnel involved in the operation or maintenance of the product must be familiar with the safety precautions outlined in this section. NOTE: These safety recommendations are basic guidelines. If the facility where the Prod- uct is installed has additional safety guidelines they should be followed as well, along with the applicable national and international safety codes. -
Page 16: Introduction
BROOKS-Cryogenics products. This chapter explains the safety conventions used throughout this manual. BROOKS-Cryogenics uses a specific format for cautions and warnings, which includes standard signal words and safety shapes. See also the Customer Support appendix or call your local Customer Support Center for assistance. -
Page 17: Signal Word Descriptions
8200 Compressor Safety Installation, Operation, and Service Instructions Signal Word Descriptions Signal Word Descriptions All cautions and warnings contain signal words, which call attention to safety mes- sages and designate the degree of hazard seriousness. The following table shows the signal words and their meanings that may be used in this document. -
Page 18: Safety Shape Descriptions
Safety 8200 Compressor Safety Shape Descriptions Installation, Operation, and Service Instructions Safety Shape Descriptions All cautions and warnings contain safety shapes, which have specific safety mean- ings. The following table shows some of the safety shapes used in this document and their meanings. -
Page 19: Inspection
8200 Compressor Installation, Operation, and Service Instructions Inspection Overview This chapter details unpacking the compressor. A High-Vacuum Pump or Refrigerator System is packaged in separate cartons for each major component. An Installation, Operation, and Servicing Manual is included in the carton for the component packaged in that carton. -
Page 20: The Compressor
The Compressor Installation, Operation, and Service Instructions The Compressor On receipt, remove the 8200 Compressor from its shipping carton and inspect the compressor for evidence of damage as described in this Section. Unpack and remove the compressor from its shipping carton. -
Page 21: Installation
Installation, Operation, and Service Instructions Installation Overview This chapter provides complete installation procedures for the Brooks Automation Product. Chapter Contents Compressor Installation ..........4-2 Preparing the Compressor Input-Power Cable . -
Page 22: Compressor Installation
Installation and Scheduled Maintenance Tool Kit. Preparing the Compressor Input-Power Cable To supply input power to the 8200 compressor requires the fabrication of a 600-volt power cable that has an SO-4 conductor, 600-volt rating neoprene jacket and 14-gauge or 2.3 mm wire. - Page 23 8200 Compressor Installation Installation, Operation, and Service Instructions Preparing the Compressor Input-Power Thread input power cable end up through the strain relief into the enclosure. Attach the power conductors onto the appropriate terminals of the terminal block. For three-phase hookups, attach the three power leads to terminals X, Y and Z.
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Page 24: Electrical Terminal Enclosure With Cover In Place
Installation 8200 Compressor Preparing the Compressor Input-Power Cable Installation, Operation, and Service In- Cover Screws Figure 4-1: Electrical Terminal Enclosure with Cover in Place (not used for single phase) Ground Screw Power Cable Figure 4-2: Assembly of Conductors to Terminal Block... -
Page 25: Cooling Water: General Considerations
8200 Compressor Installation Installation, Operation, and Service Instructions Preparing the Compressor Input-Power Tighten fittings on 1/2-inch FPT input and 1/2-inch FPT output connections. DO NOT OVERTIGHTEN. Connect flexible hoses to the fittings and secure with hose clamps. If hard piping is desired, install the water lines directly onto the compressor 1/ 2-inch FPT input and output connections. -
Page 26: Cooling Water Specifications
Installation 8200 Compressor Preparing the Compressor Input-Power Cable Installation, Operation, and Service In- Table 4-1: Cooling Water Specifications Parameter Value Maximum Inlet Temperature 90º F (32º C) Minimum Inlet Temperature 50º F (10º C) Flow Rate 1.0 ± 0.5 gpm (3.8 ± 1.9 lpm) Pressure Drop (inlet-to-outlet) approximately... -
Page 27: Cooling Water: Heat Load And Temperature Rise
0.25 0.50 0.75 1.00 1.50 1.75 2.00 Water Flowrate (GPM) Figure 4-3: 8200 Compressor Cooling Water Flow and Pressure Requirements Allowa b le Op era ting R a nge 0.25 0.50 0.75 1.00 1.50 1.75 2.00... -
Page 28: Final Preparation Of Compressor
Installation 8200 Compressor Final Preparation of Compressor Installation, Operation, and Service Instructions Final Preparation of Compressor Using a voltmeter, measure the phase-to-phase voltage from the power source. Compare this voltage to Table 4-1 and position the voltage range selector switch to the “208V” or “220V” position as required. Also, set the frequency selector switch to the 50 Hz or 60 Hz position, as appropriate. -
Page 29: Connecting The Compressor To The Cold Head
Connect the helium-gas supply line from the gas-supply connector on the rear of the compressor to the gas-supply connector on the cold head. Attach the supply and return line identification decals (BROOKS-Cryogenics supplied) to their respective connecting piping ends. Verify proper helium supply static pressure by confirming that the helium pressure gauge reads 245-250 psig (1690-1725 kPa), in an ambient temperature range of 60 to 100°F (16 to 38°C). -
Page 30: Typical 8200 Compressor Installation
Your system is now ready for operation. User’s Vacuum Chamber On-Board Cryopump Helium Supply Line Helium Return Line On-Board Power Cable Roughing Pump Air Pressure (60-80 psi) Nitrogen (40-80 psi) Figure 4-5: Typical 8200 Compressor Installation 8040353 Brooks Automation 4-10 Revision AA... -
Page 31: Maintenance Procedures
Installation, Operation, and Service Instructions Maintenance Procedures Overview This chapter provides complete maintenance procedures for the Brooks Automation Product. Chapter Contents Scheduled Maintenance ..........5-2 Unscheduled Maintenance . -
Page 32: Scheduled Maintenance
Scheduled Maintenance Installation, Operation, and Service Instructions Scheduled Maintenance The only scheduled maintenance required on the 8200 Compressor is replacement of the compressor adsorber (part number 8080255K001) every 12 months. High Voltage High voltage electric shock could cause severe injury or loss of life. -
Page 33: Brooks Automation Revision Aa
8200 Compressor Maintenance Procedures Installation, Operation, and Service Instructions Scheduled Maintenance TO TIGHTEN TURN WITH 1 3/16 INCH WRENCH HOLD WITH 1 1/8 INCH WRENCH HOLD WITH 1 1/8 INCH WRENCH TURN WITH 1 3/16 INCH WRENCH TO LOOSEN Figure 5-1: Adjusting the Self-Sealing Connectors... -
Page 34: Removing The Adsorber From The Compressor
Maintenance Procedures 8200 Compressor Scheduled Maintenance Installation, Operation, and Service Instructions Explosive Pressure High pressure explosions could cause severe injury and equipment damage. Appropriately depressurize the adsorber before disposing of it. To depressurize the adsorber, attach the depressurization fitting (included in the Installation and Scheduled Maintenance Tool Kit) to the coupling half at either end of the adsorber and tighten it slowly. - Page 35 8200 Compressor Maintenance Procedures Installation, Operation, and Service Instructions Scheduled Maintenance Check the self-sealing connector flat rubber gasket to make sure that it is clean and properly positioned. Equipment Damage To avoid damaging equipment, ensure you hold the left coupling nut...
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Page 36: Unscheduled Maintenance
Maintenance Procedures 8200 Compressor Unscheduled Maintenance Installation, Operation, and Service Instructions Unscheduled Maintenance Suggested Unscheduled Maintenance Equipment It is advisable to keep on hand the unscheduled maintenance equipment and dispos- able supplies listed below. Helium, 99.999% pure. Pressure regulator (0-3000/0-400 psig). - Page 37 For best results, BROOKS suggests a dedi- cated helium bottle, regulator, and line, which are never separated, for adding helium.)
- Page 38 Maintenance Procedures 8200 Compressor Unscheduled Maintenance Installation, Operation, and Service Instructions If the compressor is not running, slowly open the helium charge valve. When the helium pressure gauge rises to 245 - 255 psig (1688 - 1757 kPa), tightly close the charge valve.
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Page 39: Helium Circuit Decontamination
8200 Compressor Maintenance Procedures Installation, Operation, and Service Instructions Helium Circuit Decontamination Helium Circuit Decontamination Refer to Section 4 - Maintenance of the appropriate On-Board Cryopump Installation Operation, and Maintenance manual for information on helium circuit decontamina- tion. Brooks Automation 8040353... - Page 40 Maintenance Procedures 8200 Compressor Helium Circuit Decontamination Installation, Operation, and Service Instructions This Page Intentionally Left Blank 8040353 Brooks Automation 5-10 Revision AA...
- Page 41 Appendix B: Troubleshooting Procedures ....... . .6-4 Appendix C: Electrical Schematics for 8200 Compressor ....6-8...
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Page 42: Appendices
Appendices 8200 Compressor Installation, Operation, and Service Instructions 8040353 Brooks Automation Revision AA... -
Page 43: Appendix A: Customer Brooks Automation Technical Support Information
+49 1804 CALL GUTS (+49 1804 2255 4887) Japan +81-45-477-5980 China +86-21-5131-7066 Taiwan +886-3-552-5225 Korea +82-31-288-2500 Singapore +65-6464-1481 For additional contact information, please go to the Brooks Automation web site at www.brooks.com or send an E-mail to techsupport@brooks.com. Brooks Automation 8040353 Revision AA... -
Page 44: Appendix B: Troubleshooting Procedures
Appendices 8200 Compressor Appendix B: Troubleshooting Procedures Installation, Operation, and Service Instruc- Appendix B: Troubleshooting Procedures Read these safety notices before you perform any troubleshooting procedures: High Voltage High voltage electric shock could cause severe injury or loss of life. - Page 45 8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix B: Troubleshooting Proce- Table 6-1: Compressor Troubleshooting Procedures Problem Possible Cause Corrective Action 2a) No power coming from 2a) Check service fuses, circuit the power source. breakers, and wiring associ- 2) System power ON/...
- Page 46 Appendices 8200 Compressor Appendix B: Troubleshooting Procedures Installation, Operation, and Service Instruc- Table 6-1: Compressor Troubleshooting Procedures Problem Possible Cause Corrective Action 3a) High temperature of the 3a) Confirm that cooling water compressor is caused by to the compressor is flowing.
- Page 47 8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix B: Troubleshooting Proce- Table 6-1: Compressor Troubleshooting Procedures Problem Possible Cause Corrective Action 4) Compressor pump 4a) Intermittent power source 4a) Confirm power source stops after several voltage. voltage between 198-250V, 60...
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Page 48: Appendix C: Electrical Schematics For 8200 Compressor
8200 Compressor Appendix C: Electrical Schematics for 8200 Compressor Installation, Operation, and Ser- Appendix C: Electrical Schematics for 8200 Compressor The following electrical schematics for the 8200 Compressor are in this appendix: • 8200 Compressor Electrical Schematic part number 8032563P001 •... - Page 49 8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix C: Electrical Schematics for GRN/YEL W/ORN WHT/ORN W/BLK WHT/RED WHT/BLK/BLU Brooks Automation 8040353 Revision AA...
- Page 50 Appendices 8200 Compressor Appendix C: Electrical Schematics for 8200 Compressor Installation, Operation, and Ser- 8040353 Brooks Automation 6-10 Revision AA...
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Page 51: Components In The Electrical Control Chassis Of The 8200 Compressor Three-Phase Scott-T Configuration
8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix D: Components in the Electri- Appendix D: Components in the Electrical Control Module of the 8200 Com- pressor The following illustrations are shown in this chapter: • Components in the Electrical Control Chassis of the 8200 Compressor... - Page 52 Appendices 8200 Compressor Appendix D: Components in the Electrical Control Module of the 8200 Compressor 1. Coldhead Phase-Shifting ResistorR3 9. Circuit Breaker, 3ACB2 2. Overtemperature Resistor 10. Circuit Breaker, 3ACB3 3. Run Capacitor, 35 µf 11. Voltage Selector SwitchS1 4. Start Capacitor, 119 µf 12.
- Page 53 8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix E: Flow Diagrams for 8200 Appendix E: Flow Diagrams for 8200 Air-Cooled and Water-Cooled Com- pressors Refer to Figure 6-5 on page 6-14 Figure 6-6 on page 6-15 while reviewing this sub- section.
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Page 54: Flow Diagram Of The 8200 (Air-Cooled) Compressor
Appendices 8200 Compressor Appendix E: Flow Diagrams for 8200 Air-Cooled and Water-Cooled CompressorsInstalla- Figure 6-5: Flow Diagram of the 8200 (Air-Cooled) Compressor 8040353 Brooks Automation 6-14 Revision AA... -
Page 55: Flow Diagram Of The 8200 (Water-Cooled) Compressor
8200 Compressor Appendices Installation, Operation, and Service Instructions Appendix E: Flow Diagrams for 8200 Figure 6-6: Flow Diagram of the 8200 (Water-Cooled) Compressor Brooks Automation 8040353 6-15 Revision AA... -
Page 56: Additional Cooling Water Quality Parameters
Appendices 8200 Compressor Appendix F: Additional Cooling Water Quality Parameters Installation, Operation, and Appendix F: Additional Cooling Water Quality Parameters Table 6-2: Additional Cooling Water Quality Parameters Acceptable Water Constituent Unit Limits Saturation-Index SI (delta pH-value) -0.2 < 0 < +0.2 Total hardness °dH...